Patents by Inventor Chi-Hung Chuang

Chi-Hung Chuang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11940737
    Abstract: A method includes receiving a device design layout and a scribe line design layout surrounding the device design layout. The device design layout and the scribe line design layout are rotated in different directions. An optical proximity correction (OPC) process is performed on the rotated device design layout and the rotated scribe line design layout. A reticle includes the device design layout and the scribe line design layout is formed after performing the OPC process.
    Type: Grant
    Filed: May 7, 2021
    Date of Patent: March 26, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsueh-Yi Chung, Yung-Cheng Chen, Fei-Gwo Tsai, Chi-Hung Liao, Shih-Chi Fu, Wei-Ti Hsu, Jui-Ping Chuang, Tzong-Sheng Chang, Kuei-Shun Chen, Meng-Wei Chen
  • Patent number: 11817384
    Abstract: The present disclosure provides an interconnect structure and a method for forming an interconnect structure. The method for forming an interconnect structure includes forming a bottom metal line in a first interlayer dielectric layer, forming a second interlayer dielectric layer over the bottom metal line, exposing a top surface of the bottom metal line, increasing a total surface area of the exposed top surface of the bottom metal line, forming a conductive via over the bottom metal line, and forming a top metal line over the conductive via.
    Type: Grant
    Filed: January 3, 2022
    Date of Patent: November 14, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Shuen-Shin Liang, Ken-Yu Chang, Hung-Yi Huang, Chien Chang, Chi-Hung Chuang, Kai-Yi Chu, Chun-I Tsai, Chun-Hsien Huang, Chih-Wei Chang, Hsu-Kai Chang, Chia-Hung Chu, Keng-Chu Lin, Sung-Li Wang
  • Publication number: 20220130755
    Abstract: The present disclosure provides an interconnect structure and a method for forming an interconnect structure. The method for forming an interconnect structure includes forming a bottom metal line in a first interlayer dielectric layer, forming a second interlayer dielectric layer over the bottom metal line, exposing a top surface of the bottom metal line, increasing a total surface area of the exposed top surface of the bottom metal line, forming a conductive via over the bottom metal line, and forming a top metal line over the conductive via.
    Type: Application
    Filed: January 3, 2022
    Publication date: April 28, 2022
    Inventors: SHUEN-SHIN LIANG, KEN-YU CHANG, HUNG-YI HUANG, CHIEN CHANG, CHI-HUNG CHUANG, KAI-YI CHU, CHUN-I TSAI, CHUN-HSIEN HUANG, CHIH-WEI CHANG, HSU-KAI CHANG, CHIA-HUNG CHU, KENG-CHU LIN, SUNG-LI WANG
  • Patent number: 11222818
    Abstract: A method for forming a semiconductor device structure is provided. The method includes forming a fin structure over a semiconductor substrate and forming a gate stack over the fin structure. The method also includes forming an epitaxial structure over the fin structure, and the epitaxial structure is adjacent to the gate stack. The method further includes forming a dielectric layer over the epitaxial structure and forming an opening in the dielectric layer to expose the epitaxial structure. In addition, the method includes applying a metal-containing material on the epitaxial structure while the epitaxial structure is heated so that a portion of the epitaxial structure is transformed to form a metal-semiconductor compound region.
    Type: Grant
    Filed: July 13, 2018
    Date of Patent: January 11, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yi-Hsiang Chao, Min-Hsiu Hung, Chun-Wen Nieh, Ya-Huei Li, Yu-Hsiang Liao, Li-Wei Chu, Kan-Ju Lin, Kuan-Yu Yeh, Chi-Hung Chuang, Chih-Wei Chang, Ching-Hwanq Su, Hung-Yi Huang, Ming-Hsing Tsai
  • Patent number: 11217524
    Abstract: The present disclosure provides an interconnect structure, including a first interlayer dielectric layer, a bottom metal line including a first metal in the first interlayer dielectric layer, a conductive via including a second metal over the bottom metal line, wherein the second metal is different from the first metal, and the first metal has a first type of primary crystalline structure, and the second metal has the first type of primary crystalline structure, a total area of a bottom surface of the conductive via is greater than a total cross sectional area of the conductive via, and a top metal line over the conductive via, wherein the top metal line comprises a third metal different from the second metal.
    Type: Grant
    Filed: June 12, 2020
    Date of Patent: January 4, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Shuen-Shin Liang, Ken-Yu Chang, Hung-Yi Huang, Chien Chang, Chi-Hung Chuang, Kai-Yi Chu, Chun-I Tsai, Chun-Hsien Huang, Chih-Wei Chang, Hsu-Kai Chang, Chia-Hung Chu, Keng-Chu Lin, Sung-Li Wang
  • Publication number: 20210391252
    Abstract: The present disclosure provides an interconnect structure, including a first interlayer dielectric layer, a bottom metal line including a first metal in the first interlayer dielectric layer, a conductive via including a second metal over the bottom metal line, wherein the second metal is different from the first metal, and the first metal has a first type of primary crystalline structure, and the second metal has the first type of primary crystalline structure, a total area of a bottom surface of the conductive via is greater than a total cross sectional area of the conductive via, and a top metal line over the conductive via, wherein the top metal line comprises a third metal different from the second metal.
    Type: Application
    Filed: June 12, 2020
    Publication date: December 16, 2021
    Inventors: SHUEN-SHIN LIANG, KEN-YU CHANG, HUNG-YI HUANG, CHIEN CHANG, CHI-HUNG CHUANG, KAI-YI CHU, CHUN-I TSAI, CHUN-HSIEN HUANG, CHIH-WEI CHANG, HSU-KAI CHANG, CHIA-HUNG CHU, KENG-CHU LIN, SUNG-LI WANG
  • Publication number: 20200020583
    Abstract: A method for forming a semiconductor device structure is provided. The method includes forming a fin structure over a semiconductor substrate and forming a gate stack over the fin structure. The method also includes forming an epitaxial structure over the fin structure, and the epitaxial structure is adjacent to the gate stack. The method further includes forming a dielectric layer over the epitaxial structure and forming an opening in the dielectric layer to expose the epitaxial structure. In addition, the method includes applying a metal-containing material on the epitaxial structure while the epitaxial structure is heated so that a portion of the epitaxial structure is transformed to form a metal-semiconductor compound region.
    Type: Application
    Filed: July 13, 2018
    Publication date: January 16, 2020
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yi-Hsiang CHAO, Min-Hsiu HUNG, Chun-Wen NIEH, Ya-Huei LI, Yu-Hsiang LIAO, Li-Wei CHU, Kan-Ju LIN, Kuan-Yu YEH, Chi-Hung CHUANG, Chih-Wei CHANG, Ching-Hwanq SU, Hung-Yi HUANG, Ming-Hsing TSAI
  • Publication number: 20050199377
    Abstract: A heat dissipation module including heat pipes. The heat dissipation module includes a seat with grooves, heat pipes and two fin assemblies. The heat pipes are secured in the grooves at a first end and extend at the second end thereof. A first fin assembly with parallel first fins is soldered to the seat, covering the grooves and heat pipes. A second fin assembly with parallel second fins is secured to the cantilevered end of the heat pipes.
    Type: Application
    Filed: February 8, 2005
    Publication date: September 15, 2005
    Inventors: Chi-Hung Chuang, Wen-Liang Hwang, Chao-Jung Chen, Hung-Chou Chan