Abstract: A cleaning apparatus for removing fine particles from an uneven surface and a method for using such apparatus are disclosed. The cleaning apparatus can be used on any uneven surface, and is particularly suitable for use on a grooved surface such as that of an exposure table in a stepper. The apparatus includes a cleaning head having a head portion with a front surface for contacting the uneven surface to be cleaned. The front surface is equipped with a plurality of vacuum openings and blown air openings. When the cleaning apparatus is suitably connected to a vacuum source and a clean dry air source, fine particles can be dislodged from the grooved surface first by the blown air and then sucked away by the vacuum source through the plurality of vacuum openings.