Abstract: A method is described. The method includes obtaining a relationship between a thickness of a contamination layer formed on a mask and an amount of compensation energy to remove the contamination layer, obtaining a first thickness of a first contamination layer formed on the mask from a thickness measuring device, and applying first compensation energy calculated from the relationship to a light directed to the mask.

Abstract: An apparatus and a method of coating organic material over an organic electro-luminescent device is provided. A substrate having an electrode layer formed thereon is provided. An organic material is coated on the electrode layer by the apparatus of the present invention. The apparatus comprises at least an organic material storage element having an ejection hole and a rolling element. The rolling element is disposed in the ejection hole such that an organic material stored in the organic material storage element flows out by rolling the rolling element. The apparatus of the present invention is capable of reducing the process time and the manufacturing costs.

Abstract: A film removing equipment for removing a film from a substrate is provided. The film removing equipment comprises a base, a transmission mechanism of the erasing device, an erasing device and a positioning platform. The transmission mechanism of the erasing device is set up on the base and the erasing device is set up on the transmission mechanism. The positioning platform is set up on the base to carry the substrate. The transmission mechanism drives the erasing device to remove the film from the substrate. Using the aforementioned film removing equipment, the cost of removing a film from a substrate is reduced substantially.