Abstract: Methods and apparatus for processing a substrate are provided. For example, a method of processing a substrate comprises supplying oxygen (O2) into a processing volume of an etch chamber to react with a silicon-based hardmask layer atop a base layer of ruthenium to form a covering of an SiO-like material over the silicon-based hardmask layer and etching the base layer of ruthenium using at least one of O2 or chloride (Cl2) while supplying nitrogen (N2) to sputter some of the SiO-like material onto an exposed ruthenium sidewall created during etching.

Abstract: A method of forming an interconnect structure for semiconductor devices is described. The method comprises etching a patterned interconnect stack for form first conductive lines and expose a top surface of a first etch stop layer; etching the first etch stop layer to form second conductive lines and expose a top surface of a barrier layer; and forming a self-aligned via.

Abstract: A method of forming an interconnect structure for semiconductor devices is described. The method comprises etching a patterned interconnect stack for form first conductive lines and expose a top surface of a first etch stop layer; etching the first etch stop layer to form second conductive lines and expose a top surface of a barrier layer; and forming a self-aligned via.

Abstract: Methods and apparatus for processing a substrate are provided. For example, a method of processing a substrate comprises supplying oxygen (O2) into a processing volume of an etch chamber to react with a silicon-based hardmask layer atop a base layer of ruthenium to form a covering of an SiO-like material over the silicon-based hardmask layer and etching the base layer of ruthenium using at least one of O2 or chloride (Cl2) while supplying nitrogen (N2) to sputter some of the SiO-like material onto an exposed ruthenium sidewall created during etching.

Abstract: A method of forming an interconnect structure for semiconductor devices is described. The method comprises etching a patterned interconnect stack for form first conductive lines and expose a top surface of a first etch stop layer; etching the first etch stop layer to form second conductive lines and expose a top surface of a barrier layer; and forming a self-aligned via.

Abstract: A method of fabricating a semiconductor structure is described. The method comprises forming at least one mandrel on a substrate, the at least one mandrel comprising a diamond-like carbon and having a top and two opposing sidewalls, the diamond-like carbon comprising at least 40% sp3 hybridized carbon atoms. The mandrel may be used in Self-Aligned Multiple Patterning (SAMP) processes.

Abstract: A method of fabricating a semiconductor structure is described. The method comprises forming at least one mandrel on a substrate, the at least one mandrel comprising a diamond-like carbon and having a top and two opposing sidewalls, the diamond-like carbon comprising at least 40% sp3 hybridized carbon atoms. The mandrel may be used in Self-Aligned Multiple Patterning (SAMP) processes.

Abstract: Thermal drawing processes can be used to make multifunctional, high-resolution neural probes for neural recording and stimulation. An exemplary neural probe may include one or more conductive fibers or microelectrodes coated with two or more layers of insulating material, at least one of which is partially etched to expose a tip at the neural probe's distal end. The conductive fibers conduct electrical signals (e.g., neural spikes or electrical stimulation) between the tip and the neural probe's proximal end. Optional optical and fluidic waveguides may guide light and fluid, respectively, between the tip and the proximal end. A neural probe may be flexible enough for long-term (chronic) implantation in neural tissue (e.g., the brain) without excessive tissue damage, even during movement of the brain in the skull. The probe may be made from biocompatible materials, such as insulating and conductive polymers, that have negligible (insignificant) interaction with the surrounding tissue.

Abstract: A unitary sleeve configured to encompass at least a portion of a dispenser device and convert the substance dispenser into a “smart” dispenser. An actuator is coupled to the dispenser device and actuated in response to mechanical release of a substance from the dispenser device. A transmitter module is coupled to the actuator and operable to transmit an activation signal to a remote device in response to actuation of the actuator. The remote device communicatively coupled to the transmitter module of the unitary sleeve comprises the “smart” substance dispenser system.

Abstract: Thermal drawing processes can be used to make multifunctional, high-resolution neural probes for neural recording and stimulation. An exemplary neural probe may include one or more conductive fibers or microelectrodes coated with two or more layers of insulating material, at least one of which is partially etched to expose a tip at the neural probe's distal end. The conductive fibers conduct electrical signals (e.g., neural spikes or electrical stimulation) between the tip and the neural probe's proximal end. Optional optical and fluidic waveguides may guide light and fluid, respectively, between the tip and the proximal end. A neural probe may be flexible enough for long-term (chronic) implantation in neural tissue (e.g., the brain) without excessive tissue damage, even during movement of the brain in the skull. The probe may be made from biocompatible materials, such as insulating and conductive polymers, that have negligible (insignificant) interaction with the surrounding tissue.

Abstract: Systems and methods for building a trait model for essay evaluation are provided. At least one evaluated essay is received. A plurality of features pertaining to one or more traits from the at least one evaluated essay are identified and extracted. The one or more traits comprise writing errors, discourse, or vocabulary usage. A plurality of vector files based upon the plurality of features are created. A trait model for essay evaluation based upon the plurality of vector files is built. The trait model is evaluated, where the evaluation includes mapping features of a new essay to the trait model by navigating a multi-branched decision tree. At each branch of the decision tree, a value associated with the features of the new essay is used to determine how to proceed through the trait model.

Abstract: To automatically evaluate an essay, the essay is applied to a plurality of trait models and a plurality of trait scores are determined based on the plurality of trait models. Each of these trait scores having been generated from a respective trait model. In addition, a score is determined based on the plurality of trait scores.

Abstract: To automatically evaluate an essay, the essay is applied to a plurality of trait models and a plurality of trait scores are determined based on the plurality of trait models. Each of these trait scores having been generated from a respective trait model. In addition, a score is determined based on the plurality of trait scores.

Abstract: To automatically evaluate an essay, the essay is applied to a plurality of trait models and a plurality of trait scores are determined based on the plurality of trait models. Each of these trait scores having been generated from a respective trait model. In addition, a score is determined based on the plurality of trait scores.

Abstract: To automatically evaluate an essay, the essay is applied to a plurality of trait models and a plurality of trait scores are determined based on the plurality of trait models. Each of these trait scores having been generated from a respective trait model. In addition, a score is determined based on the plurality of trait scores.

Abstract: A structure of a patterned zipper has two zipper tapes, a plurality of patterns formed on the two zipper tapes and a plurality of teeth with at least two different colors crisscrossedly fixed on two insides of the two zipper tapes, so that the teeth do not separate the patterns that are on the two zipper tapes to keep the patterns complete.

Abstract: To automatically evaluate an essay, the essay is applied to a plurality of trait models and a plurality of trait scores are determined based on the plurality of trait models. Each of these trait scores having been generated from a respective trait model. In addition, a score is determined based on the plurality of trait scores.

Abstract: A method of grading an essay using an automated essay scoring system is provided. The method comprises the automated steps of (a) parsing the essay to produce parsed text, wherein the parsed text is a syntactic representation of the essay, (b) using the parsed text to create a vector of syntactic features derived from the essay, (c) using the parsed text to create a vector of rhetorical features derived from the essay, (d) creating a first score feature derived from the essay, (e) creating a second score feature derived from the essay, and (f) processing the vector of syntactic features, the vector of rhetorical features, the first score feature, and the second score feature to generate a score for the essay.

Abstract: A method of grading an essay using an automated essay scoring system is provided. The method comprises the automated steps of (a) parsing the essay to produce parsed text, wherein the parsed text is a syntactic representation of the essay, (b) using the parsed text to create a vector of syntactic features derived from the essay, (c) using the parsed text to create a vector of rhetorical features derived from the essay, (d) creating a first score feature derived from the essay, (e) creating a second score feature derived from the essay, and (f) processing the vector of syntactic features, the vector of rhetorical features, the first score feature, and the second score feature to generate a score for the essay.

Abstract: A system for carrying out a content-based process for automatically scoring essays is disclosed. The system includes a computer; a data storage device; a parse tree file stored in the data storage device, the parse tree file being representative of an essay in a parse tree format; a morphology stripping program; a concept extraction program for creating, on the basis of a morphology-stripped parse tree file, a phrasal node file; and a rule matching scoring program for scoring the essay on the basis of the phrasal node file.