Patents by Inventor Chi-Lung Chien

Chi-Lung Chien has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for generating extreme ultraviolet radiation
    Patent number: 12193136
    Abstract: A target droplet source for an extreme ultraviolet (EUV) source includes a droplet generator configured to generate target droplets of a given material. The droplet generator includes a nozzle configured to supply the target droplets in a space enclosed by a chamber. The target droplet source further includes a sleeve disposed in the chamber distal to the nozzle. The sleeve is configured to provide a path for the target droplets in the chamber.
    Type: Grant
    Filed: July 19, 2023
    Date of Patent: January 7, 2025
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Wei-Chih Lai, Han-Lung Chang, Chi Yang, Shang-Chieh Chien, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng
  • PHOTOVOLTAIC PANEL ASSEMBLY WITH HEAT DISSIPATION FUNCTION
    Publication number: 20110272001
    Abstract: A photovoltaic panel assembly includes a photovoltaic panel of two opposite surfaces. A photovoltaic array is disposed on one of the two opposite surfaces. The heat sink is disposed over the other of the two opposite surfaces, wherein the heat sink comprises a wavy cross-section.
    Type: Application
    Filed: May 3, 2011
    Publication date: November 10, 2011
    Applicant: Du Pont Apollo Limited
    Inventors: Szu-Han LI, Yi-Ling Chen, Ching-Yee Chak, Wing-Yan Lai, Hung-Ming Tseng, Chi-Lung Chien