Patents by Inventor Chi-Ren Hsieh

Chi-Ren Hsieh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5857590
    Abstract: A flow system that is suitable for controlled dispensing of liquids such as anti-reflection coatings is described. The system is driven by a gas at high pressure from a single dispensing bottle. On emerging from the dispensing bottle the fluid is directed into one of two branches, each such branch being terminated by its own nozzle. By inserting a needle valve in each branch of the flow system, between the branch point and the nozzle, control of the amount of liquid dispensed by each nozzle is separately achieved and a change in flow through one nozzle does not affect the flow through the other nozzle.
    Type: Grant
    Filed: April 7, 1997
    Date of Patent: January 12, 1999
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yao-Hwan Kao, Chi-Ren Hsieh