Abstract: An image capture method for capturing an image with a single lens is provided. The method includes: (a) sequentially moving an image capture unit to predetermined positions; (b) sequentially capturing a plurality of frames of images by the image capture unit at the predetermined positions, wherein at least one image distance difference exists among the images; and (c) generating at least one image file by a processing unit according to the images.

Abstract: A method of wet coating for applying an anti-reflective film to a substrate comprises the following steps: (1) providing and cleaning a substrate; (2) preparing a coating solution comprised of a highly volatile solvent and a film-forming compound dissolved in the highly volatile solvent; (3) coating the substrate homogeneously with the above coating solution at normal temperature and confirming complete evaporation of the liquid on the substrate at normal temperature to finish a single layer coating without thermal treatment; and (4) repeating the above coating step as required to obtain a desired number of layers.

Abstract: A method of wet coating for applying an anti-reflective film to a substrate comprises the following steps: (1) providing and cleaning a substrate; (2) preparing a coating solution comprised of a highly volatile solvent and a film-forming compound dissolved in the highly volatile solvent; (3) coating the substrate homogeneously with the above coating solution at normal temperature and confirming complete evaporation of the liquid on the substrate at normal temperature to finish a single layer coating without thermal treatment; and (4) repeating the above coating step as required to obtain a desired number of layers.

Abstract: A method for enhancing the light transmittance of a composite optical assembly includes the steps of: (a) providing a first optical element having a refractive index n1; (b) providing a second optical element having a refractive index n2; (c) forming a first optical thin film on a surface of the second optical element that faces the first optical element, the first optical thin film having a refractive index n3; (d) coating an adhesive layer on a surface of the first optical thin film or on a surface of the first optical element, the adhesive layer having a refractive index n4, and the refractive index n3 of the first optical thin film being an intermediate value between the refractive index n4 of the adhesive layer and the refractive index n2 of the second optical element; and (e) bonding the first and second optical elements together by the adhesive layer.

Abstract: A sleeve means is described. The sleeve means comprises a round plane and ring-shaped side adjacent to the round plane. The round plane has a central hole and six periphery holes thereon. The central hole and six peripheral holes respectively correspond to a central opening and six screw holes of a heater adapter flange used in Gasonics L3510 (trademark) etcher. The sleeve means could be jacketed onto the heater adapter flange for dispersing the stress on and reducing deformation of the heater adapter flange when the heater adapter flange is mounted on the chamber of the etcher.

Abstract: The present invention discloses a piping system for etch equipment including an exhaust gas tube connected with an etching chamber for conveying exhaust gas out of the chamber. A cooling gas tube connected to the etching chamber allows cooling gas to flow around a back side of the wafer placed in the chamber for cooling the wafer's temperature. A cooling gas bypass tube connected between the cooling gas tube and the exhaust gas tube is used for regulating a gas flow in the cooling gas tube. Moreover, a plurality of heaters are set out of conjunctions of the cooling gas tube and cooling gas bypass tube with the exhaust gas tube so as to retard particle accumulation in the conjunctions of these tubes.