Patents by Inventor Chi Tsang

Chi Tsang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method to trim and smooth high index contrast waveguide structures
    Publication number: 20070090089
    Abstract: Formation, through etching, of structures whose minimum width is less than can be achieved by optical means alone has been achieved by inserting a layer of sandwiching material between the photoresist (or hard mask if used) and the structure. By adjustment of the relative etch rates of this layer and the structure, a uniform lateral width reduction and surface smoothing of the structure is achieved.
    Type: Application
    Filed: December 4, 2006
    Publication date: April 26, 2007
    Inventors: Chang Chang, Chi Tsang, My Doan, Ramana Badam, Vladimir Bliznetsov
  • Method to trim and smooth high index contrast waveguide structures
    Publication number: 20060037364
    Abstract: Formation, through etching, of structures whose minimum width is less than can be achieved by optical means alone has been achieved by inserting a layer of sandwiching material between the photoresist (or hard mask if used) and the structure. By adjustment of the relative etch rates of this layer and the structure, a uniform lateral width reduction and surface smoothing of the structure is achieved.
    Type: Application
    Filed: August 20, 2004
    Publication date: February 23, 2006
    Inventors: Chang Chang, Chi Tsang, My Doan, Ramana Badam, Vladimir Bliznetsov