Patents by Inventor Chia-Chun Tso

Chia-Chun Tso has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus of tool matching for a semiconductor manufacturing process
    Patent number: 6586265
    Abstract: The present invention provides a method of tool matching for a semiconductor manufacturing process having a first and second path completed by serial combinations of tools for processing of wafers. The method comprises the steps of providing a target value, obtaining a first and second test result of the wafers processed through the first and second path respectively, calculating differences between the first and second test result and the target value to obtain a first and second estimate respectively, and selecting one of the first and second paths according to the estimates.
    Type: Grant
    Filed: November 27, 2001
    Date of Patent: July 1, 2003
    Assignee: Promos Technologies Inc.
    Inventors: Hung-Wen Chiou, Chia-Chun Tso
  • Method and apparatus of tool matching for a semiconductor manufacturing process
    Publication number: 20030022399
    Abstract: The present invention provides a method of tool matching for a semiconductor manufacturing process having a first and second path completed by serial combinations of tools for processing of wafers. The method comprises the steps of providing a target value, obtaining a first and second test result of the wafers processed through the first and second path respectively, calculating differences between the first and second test result and the target value to obtain a first and second estimate respectively, and selecting one of the first and second paths according to the estimates.
    Type: Application
    Filed: November 27, 2001
    Publication date: January 30, 2003
    Inventors: Hung-Wen Chiou, Chia-Chun Tso