Patents by Inventor Chia-Chung Yin

Chia-Chung Yin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer holder
    Publication number: 20030205905
    Abstract: A wafer holder in a robot blade. A holder plate having a front end is provided. At least one sensor is disposed at the front end of the holder plate. A sensing circuit is connected to the sensor, wherein the sensing circuit determines the presence or absence of an obstruction positioned immediately ahead of the holder plate. Thus, the wafer holder is capable of avoiding contact with obstructions, thereby preventing system crash during semiconductor manufacturing process.
    Type: Application
    Filed: March 10, 2003
    Publication date: November 6, 2003
    Applicant: Nanya Technology Corporation
    Inventors: Chih-Kun Chen, Shan-Chang Wang, Jiun-Bo Wang, Chia-Chung Yin