Abstract: An atomic layer deposition apparatus for depositing a plurality of ultra-thin layers onto an epitaxial substrate comprises first and second chambers each having an inlet for a gas to be adsorbed on an epitaxial substrate, a transport chamber disposed between the first and second chambers, a loading chamber connected to the transport chamber for storing, loading and unloading epitaxial substrates, an outer chamber enclosing the first, second and transport chambers and at least partially enclosing said loading chamber, and means for individually heating the chambers and evacuating the chambers to ultra high vacuum pressures.

Abstract: A mammography method images breast tissue with an end window X-ray transmission tube to detect the presence of neovascular micro-vessels as defining vascular structure associated with a suspect tumorous mass. A kit therefor has a high-efficiency, end window X-ray transmission tube and a supply of a contrast agent.

Abstract: The invention relates to targets for an X-ray transmission tube (9); to a high efficiency, high excitation energy X-ray transmission tube; to combinations of the targets and high efficiency X-ray transmission tubes; and applications for utilizing such X-ray tubes. The target comprises two or more different thin foils (1) or at least two foils of the same material but different foil thickness on separate areas of a substantially planar substrate which is substantially transparent to X-rays. The target may also comprise at least two different foils (2, 3) layered sequentially one of the other, wherein X-rays are produced when an electron beam impinges the foil closest to the source fo the electron beam; wherein the energy of the electron beam is selectively changed to produce X-rays of a least one preselected energy characteristic of at least one of the foils.

Abstract: A method of treating living mammals including humans uses x-rays to disrupt DNA in malfunctioning cells such as cancerous or tumorous cells. A compound comprising a pre-selected element is administered to the mammal so that the compound associates with DNA. Then a localized region of cells which contains the malfunctioning cells is irradiated with line emission x-rays of an energy selected to cause emission of Auger electrons from the pre-selected element of the compound to disrupt DNA proximate to the irradiated pre-selected element. A kit useful for the treatment comprises an x-ray tube capable of emitting monochromatic line emission x-rays and a compound which associates with DNA and has an element which when irradiated emits said Auger electrons.

Abstract: A method of treating cancer in a human uses x-rays to disrupt a linkage in a complex of a chemotherapeutic agent and a carrier compound comprising a pre-selected element. The complex is administered to the human and then a localized region of cells which contains the cancerous cells is irradiated with line emission x-rays of an energy selected to cause emission of Auger electrons from the pre-selected element of the carrier compound to disrupt the linkage and release the chemotherapeutic agent near the cancer cells. A kit useful for the treatment comprises an x-ray tube capable of emitting monochromatic line emission x-rays and the complex compound. A transfer compound useful in the method comprises a chemotherapeutic agent linked to a carrier compound.

Abstract: A Si/C superlattice useful for semiconductor devices comprises a plurality of epitaxially grown silicon layers alternating with carbon layers respectively adsorbed on surfaces of said silicon layers. Structures and devices comprising the superlattice and methods are described.

Abstract: A method for producing an insulating or barrier layer, useful for semiconductor devices, comprises depositing a layer of silicon and at least one additional element on said silicon substrate whereby said deposited layer is substantially free of defects such that epitaxial silicon substantially free of defects can be deposited on said deposited layer. Alternatively, a monolayer of one or more elements, preferably comprising oxygen, is absorbed on a silicon substrate. A plurality of insulating layers sandwiched between epitaxial silicon forms a barrier composite. Semiconductor devices are disclosed which comprise said barrier composite.

Abstract: A method of assaying genetic sequences comprises introducing double stranded DNA to be assayed into an aqueous buffer medium containing complexes of an anchor DNA strand anchored to a support matrix and hybridized with a reporter DNA strand having a detectable label. A portion of the anchor strand or the reporter strand consists of a selected sequence of bases capable of forming a triple helix or triple strand structure with a portion of particular double stranded DNA. The reporter strand is displaced from the complex upon formation of a triple helix or triple strand structure, and displaced reporter strands are detected to determine the presence of the particular double stranded DNA. Gene probes, anchor/reporter hybrids, selected gene sequences and kits, useful in the assay method, are provided.

Abstract: A compact x-ray tube assembly comprises an evacuated chamber enclosed by a ceramic tubular envelope, an attached power supply at one end connected to an emitter inside the chamber, electrostatic means for focusing a beam of electrons on a metal foil target, an end window at the other end comprising said target, the thickness and composition of the metal foil target and the e-beam energy being selected to generate a microfocused bright beam of x rays of a preselected energy. The compact assembly is useful in a method for aligning or positioning layers used in the production of microelectronics components.

Abstract: A method of investigating materials, especially biological specimens, utilizes a focused accelerated beam of electrons within an evacuated chamber, striking a metal foil within the chamber and exposing a specimen outside the evacuated chamber to x-rays generated in the metal foil. The apparatus of the invention functions as an x-ray microscope and in a preferred embodiment, as a scanning x-ray microscope.

Abstract: Viruses are detected by means of an immunoassay method in which an extended solid phase coated with antiviral antibody is employed to bind and remove virions from a specimen by forming an immuno-complex with antigens of said virions, a mobile solid phase comprising a dispersion of microspheres coated with the antiviral antibody is used to bind said microspheres to antigens associated with said immuno-complex, and the presence of bound microspheres is detected. The detection sensitivity is amplified by the ability to more readily detect the microspheres, which may be dyed or labelled. The extended solid phase advantageously may be in the form of a dipstick which can be easily contacted with the specimen. A virus detection kit provides the extended solid phase and mobile solid phases, each coated with antiviral antibodies.

Abstract: An immunoassay method for measurement of the content of a target antigen or antibody in a fluid or tissue specimen comprises reacting the target with reagent antibody or antigen which forms a complex with the target and is carried by small tagged mobile units having tagging elements or compounds which are unassociated chemically with said reagent and are protected against reaction with the target and the biological and chemical environment of the assay. The tagged mobile units bearing formed complexes are measured by spectroscopic detection. Preferably the small, tagged mobile units, such as latex particles, are of a size smaller than 0.8 .mu.m. The tagged complexes which are formed may be measured by spectrophotometric detection or by mass spectrometry. Different target antigens or antibodies can be assayed simultaneously by employing different tagged mobile units, and the mobile units with the tagging elements can be recovered for disposal or for reuse.

Abstract: An immunoassay method for measurement of the content of a target antigen or antibody in a fluid or tissue specimen comprises reacting the target with reagent antibody or antigen which forms a complex with the target and is tagged with tagging elements which are unassociated chemically with said reagent and are protected against reaction with the target and the biological and chemical environment of the assay. Preferably the reagent antibody or antigen is carried by small, tagged mobile units, such as latex particles of a size smaller than 0.8 .mu.m, having tagging elements embedded therein. The tagged complexes which are formed may be measured by X-ray fluorescence or by detection of radioactive decay. Different target antigens or antibodies can be assayed simultaneously by employing different tagged mobile units, and the mobile units with the tagging elements can be recovered for disposal or for reuse.

Abstract: An Auger microlithography process wherein a beam of substantially monochromatic X-rays is passed through a photomask to induce Auger electrons from a selected atomic element within a photosensitive layer which Auger electrons act on a material in that layer to cause a physicochemical change thereof and form a latent image. The X-rays used are selected to be substantially monochromatic such that the range of wave lengths falls largely or almost totally within the Auger window, as defined, determined by the particular electron shell of the atomic element to be activated to produce the Auger electrons.

Abstract: A method and apparatus for detecting, in a specimen, atoms, of an element having an atomic number of at least 20, comprising irradiating the specimen with monochromatic X-rays having a wavelength capable of inducing an inner shell ionization of the atoms with subsequent auger cascade and recording the emission of the auger electrons emitted by the cascade.

Abstract: Relatively monochromatic soft X-rays at 4.5 m.mu. is used to induce auger electrons from the silver-halide crystal to sensitize the photosensitive grain, and the exposed crystal is developed into a fine silver grain. The pattern of the silver grains with sizes of about 0.02.mu. can be used as a photoresist with a resolution of about 0.1.mu.. The silver grains can also be used to initiate certain organic compounds for the resist, also with a resolution of the order of 0.1.mu..

Abstract: A scanning X-ray microscope including an X-ray source capable of emitting a beam of X-rays, a collimator positioned to receive the beam of X-rays and, to collimate this beam, a focusing cone means to focus the beam of X-rays, directed by the collimator, onto a focal plane, a specimen mount for supporting a specimen in the focal plane to receive the focused beam of X-rays, and X-ray beam scanning means to relatively move the specimen and the focusing cone means and collimator to scan the focused X-ray beam across the specimen, a detector disposed adjacent the specimen to detect flourescent photons emitted by the specimen upon exposure to the focused beam of X-rays to provide an electrical output representative of this detection, means for displaying and/or recording the information provided by the output from the detector, means for providing information to the recording and/or display means representative of the scan rate and position of the focused X-ray beam relative to the specimen whereby the recording an

Abstract: Turbo-separative methods and apparatus for separation of mixtures of gaseous materials having different molecular weights, particularly gaseous isotope mixtures such as mixtures of UF.sub.6, in which differential sedimentation velocities of the components to be separated are established in a laminar boundary layer of the gas adjacent a hydraulically smooth, porous blade surface, and in which a predetermined amount of the boundary layer flow is conducted through the porous surface to stabilize the boundary layer and to provide a higher density gas fraction. The velocity of the gas conducted through the porous blade surface should not exceed the sedimentation velocity of the gas species to be separated.

Abstract: Turbo-separative methods and apparatus for separation of mixtures of gaseous materials having different molecular weights, particularly gaseous isotope mixtures such as mixtures of UF.sub.6, in which differential sedimentation velocities of the components to be separated are established in a laminar boundary layer of the gas adjacent a hydraulically smooth, porous blade surface, and in which a predetermined amount of the boundary layer flow is conducted through the porous surface to stabilize the boundary layer and to provide a higher density gas fraction. The velocity of the gas conducted through the porous blade surface should not exceed the sedimentation velocity of the gas species to be separated.

Abstract: An apparatus and process for separating gaseous mixtures of molecules of different mass in which a rotating means is caused to eject a contiguous plurality of successsive groups of molecules into an evacuated space to form a continuous stream of said mixture; the molecules of each said group of molecules are allowed to move in accordance with their thermal velocities for a predetermined period of time following ejection, thereby to allow each said group of molecules to form a generally spherical configuration the outer radius of which will be enriched, in molecules of lighter mass, relative to lesser radii, a deflector means co-rotating with said rotating means is used to deflect molecules, which have been allowed to move for said predetermined period of time in accordance with their thermal velocities, from at least one desired portion of said stream and a stationary collector means disposed to receive said deflected molecules.