Patents by Inventor Chia-He Cheng

Chia-He Cheng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing apparatus equipped with substrate scanner
    Patent number: 11551955
    Abstract: A substrate processing apparatus includes a process station for processing a substrate; a cassette station integrated with the process station; a substrate carriage equipped for transferring the substrate between said process station and the cassette station through a passage located at an interface between the process station and said cassette station; and a substrate scanner equipped at said interface between the process station and the cassette station for capturing surface image data during transportation of the substrate that passes through the passage.
    Type: Grant
    Filed: March 26, 2020
    Date of Patent: January 10, 2023
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Ming-Che Lai, Hua-Wei Peng, Chia-He Cheng, Ming-Tso Chen, Chao-Chi Lu, Hsin-Hsu Lin, Kuo-Tsai Lo, Kao-Hua Wu, Huan-Hsin Yeh
  • SUBSTRATE PROCESSING APPARATUS EQUIPPED WITH SUBSTRATE SCANNER
    Publication number: 20210280444
    Abstract: A substrate processing apparatus includes a process station for processing a substrate; a cassette station integrated with the process station; a substrate carriage equipped for transferring the substrate between said process station and the cassette station through a passage located at an interface between the process station and said cassette station; and a substrate scanner equipped at said interface between the process station and the cassette station for capturing surface image data during transportation of the substrate that passes through the passage.
    Type: Application
    Filed: March 26, 2020
    Publication date: September 9, 2021
    Inventors: Ming-Che Lai, Hua-Wei Peng, Chia-He Cheng, Ming-Tso Chen, Chao-Chi Lu, Hsin-Hsu Lin, Kuo-Tsai Lo, Kao-Hua Wu, Huan-Hsin Yeh
  • Robot arm plate
    Publication number: 20110193361
    Abstract: A robot arm plate is provided. The robot arm plate includes a supporting structure and at least a block. The supporting structure includes a first surface to support an object, a second surface and a third surface, wherein the second surface is lower than the first surface, and the third surface is disposed between the first surface and the second surface. The block is disposed on the second surface. The block includes a lateral wall which contacts against the third surface.
    Type: Application
    Filed: February 8, 2010
    Publication date: August 11, 2011
    Inventors: Chia-He Cheng, Ming-Tso Chen, Mao-Sheng Hsu, Wei-Yen Liu