Patents by Inventor Chia-Hsing LlAO

Chia-Hsing LlAO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SYSTEM AND METHOD FOR CONTROLLING ION IMPLANTER
    Publication number: 20150162166
    Abstract: A system, a method, and a non-transitory computer readable storage medium for controlling an ion implanter are disclosed herein. The system includes a sample module and a control module. The sample module is configured to generate a summarized value from process data of the ion implanter, and the process data correspond to a control parameter. The control module is configured to tune a control parameter, and the control module performs an ion implantation by releasing tools of the ion implanter in accordance with the control parameter when the summarized value meets a predetermined stability requirement.
    Type: Application
    Filed: December 6, 2013
    Publication date: June 11, 2015
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Po-Feng TSAI, Chia-Tong HO, Chia-Hsing LlAO, Sheng-Wei LEE, Jo-Fei WANG, Jong-I MOU