Patents by Inventor Chia Hsing Wei

Chia Hsing Wei has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20250140532
    Abstract: A plasma processing apparatus including a metallic base material disposed inside a wafer stage and having a cylindrical shape or a circular plate shape; a dielectric film disposed on an upper surface of the base material; a film-shaped heater disposed inside the dielectric film; a refrigerant flow path disposed in a concentric shape or in a spiral shape about a center of the base material in the base material and allowing a refrigerant to flow therethrough; and at least one arc-shaped space multiply disposed about the center in the base material between the refrigerant flow path and the heater and having an inside reduced to a predetermined degree of vacuum and sealed. A region of a portion of the base material between the disposed arc-shaped spaces is projected and overlapped on a region of an intermediate portion of the base material that partitions two of the adjacent refrigerant flow paths.
    Type: Application
    Filed: December 12, 2023
    Publication date: May 1, 2025
    Inventors: Shintaro NAKATANI, Takamasa ICHINO, Chia Hsing WEI, Yuki TANAKA, Tomoaki HYODO
  • Patent number: 11876356
    Abstract: Lockout tagout assemblies, systems, and methods are disclosed. Exemplary lockout tagout assemblies include a base, an arm moveable with respect to the base, and a member extending at an angle from the arm. The member can engage with a circuit breaker in an off position to retain the circuit breaker in the off position.
    Type: Grant
    Filed: March 3, 2021
    Date of Patent: January 16, 2024
    Assignee: ASM IP Holding B.V.
    Inventor: Chia Hsing Wei
  • Publication number: 20210288476
    Abstract: Lockout tagout assemblies, systems, and methods are disclosed. Exemplary lockout tagout assemblies include a base, an arm moveable with respect to the base, and a member extending at an angle from the arm. The member can engage with a circuit breaker in an off position to retain the circuit breaker in the off position.
    Type: Application
    Filed: March 3, 2021
    Publication date: September 16, 2021
    Inventor: Chia Hsing Wei