Abstract: The present disclosure describes a method for forming metallization layers that include a ruthenium metal liner and a cobalt metal fill. The method includes depositing a first dielectric on a substrate having a gate structure and source/drain (S/D) structures, forming an opening in the first dielectric to expose the S/D structures, and depositing a ruthenium metal on bottom and sidewall surfaces of the opening. The method further includes depositing a cobalt metal on the ruthenium metal to fill the opening, reflowing the cobalt metal, and planarizing the cobalt and ruthenium metals to form S/D conductive structures with a top surface coplanar with a top surface of the first dielectric.

Abstract: Embodiments of the technology developed are a non-contact air esthesiometer used for measuring corneal sensitivity. In certain embodiments, the apparatus takes the OKI DX-255 Basic Digital Fluid Dispenser and modifies it for use to produce a 2-second stream of room-temperature air directed at the center of a patient's cornea. The input to the device is a compressed air tank, IN which can be easily changed, connected to an inline filter. The output is a hose line connected to a valve that permits finer adjustments in airflow rate to a disposable 200-microliter-filter pipette tip. This outlet tip is secured with self-setting rubber and housed in a metal stand with horizontal and vertical travel that can be directly mounted to a standard slit lamp. Four red LED lights were placed around the air outflow that can be used for patient fixation and alignment on the central cornea.