Patents by Inventor Chia Kuo

Chia Kuo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20250248163
    Abstract: The present disclosure describes a semiconductor device that includes a first die bonded to a second die with interconnect structures in the first die. The first die includes a photodiode having first and second electrodes on a first side of a first dielectric layer, and first, second, and third interconnect structures in the first dielectric layer. The first and second interconnect structures are connected to the first and second electrodes, respectively. The second electrode has a polarity opposite to the first electrode. The second and third interconnect structures extend to a second side opposite to the first side of the first dielectric layer. The second die includes a second dielectric layer and a fourth interconnect structure in the second dielectric layer. The second dielectric layer is bonded to the second side of the first dielectric layer. The fourth interconnect structure connects the second and third interconnect structures.
    Type: Application
    Filed: March 10, 2025
    Publication date: July 31, 2025
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuo-Chin HUANG, Tzu-Jui WANG, Hua-Mao CHEN, Chin-Chia KUO, Yuichiro YAMASHITA
  • Publication number: 20250218940
    Abstract: A method of fabricating a semiconductor structure provided herein includes providing a thick-metal density range for a model structure, wherein the model structure includes a wafer substrate, and layers of metal patterns stacking on the wafer substrate; modifying the thick-metal density range to constrain a warpage range of the model structure toward a target range of warpage; and fabricating the semiconductor structure by forming the layers of metal patterns on the wafer substrate, wherein a thick-metal layer among the layers of metal patterns is formed based on the modified thick-metal density range, and a thickness of the thick-metal layer is twice or more of a thickness of one of the layers of metal patterns next to the thick-metal layer. A semiconductor structure fabricating by using the above method is further provided.
    Type: Application
    Filed: December 27, 2023
    Publication date: July 3, 2025
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wen-Ling Chang, Cheng-Hsien WU, Man-Yun WU, Yu-Bey Wu, Wen-Chiung Tu, Chen-Chiu Huang, Dian-Hau Chen, Chung-Yi Lin, Ching-Feng Sung, Hsiu-Chia Kuo
  • Patent number: 12336208
    Abstract: A fabricating method of a middle voltage transistor includes providing a substrate. A gate predetermined region is defined on the substrate. Next, a mask layer is formed to cover only part of the gate predetermined region. Then, a first ion implantation process is performed to implant dopants into the substrate at two sides of the mask layer to form two first lightly doping regions. After removing the mask layer, a gate is formed to overlap the entirety gate predetermined region. Subsequently, two second lightly doping regions respectively formed within one of the first lightly doping regions. Next, two source/drain doping regions are respectively formed within one of the second lightly doping regions. Finally, two silicide layers are formed to respectively cover one of the source/drain doping regions.
    Type: Grant
    Filed: March 15, 2022
    Date of Patent: June 17, 2025
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Wei-Hsuan Chang, Hao-Ping Yan, Ming-Hua Tsai, Chin-Chia Kuo
  • Patent number: 12278253
    Abstract: The present disclosure describes a semiconductor device that includes a first die bonded to a second die with interconnect structures in the first die. The first die includes a photodiode having first and second electrodes on a first side of a first dielectric layer, and first, second, and third interconnect structures in the first dielectric layer. The first and second interconnect structures are connected to the first and second electrodes, respectively. The second electrode has a polarity opposite to the first electrode. The second and third interconnect structures extend to a second side opposite to the first side of the first dielectric layer. The second die includes a second dielectric layer and a fourth interconnect structure in the second dielectric layer. The second dielectric layer is bonded to the second side of the first dielectric layer. The fourth interconnect structure connects the second and third interconnect structures.
    Type: Grant
    Filed: December 30, 2021
    Date of Patent: April 15, 2025
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Kuo-Chin Huang, Tzu-Jui Wang, Hua-Mao Chen, Chin-Chia Kuo, Yuichiro Yamashita
  • Publication number: 20250056868
    Abstract: A method of fabricating a semiconductor device is provided. Recesses are formed in a substrate. A first gate dielectric material is formed on the substrate and filled in the recesses. The first gate dielectric material on the substrate between the recesses is at least partially removed to form a trench. A second gate dielectric material is formed in the trench. A gate conductive layer is formed on the second gate dielectric material. Spacers are formed on sidewalls of the gate conductive layer. A portion of the first gate dielectric material is removed. The remaining first gate dielectric material and the second gate dielectric layer form a gate dielectric layer. The gate dielectric layer includes a body part and a first hump part at a first edge of the body part. The first hump part is thicker than the body part. Doped regions are formed in the substrate beside the spacers.
    Type: Application
    Filed: September 4, 2023
    Publication date: February 13, 2025
    Applicant: United Microelectronics Corp.
    Inventors: Ming-Hua Tsai, Wei Hsuan Chang, Chin-Chia Kuo
  • Publication number: 20250015161
    Abstract: A semiconductor device includes a substrate; a channel region disposed in the substrate; and a diffusion region disposed in the substrate on a side of the channel region. The diffusion region comprises a LDD region and a heavily doped region within the LDD region. A gate electrode is disposed over the channel region. The gate electrode partially overlaps with the LDD region. A spacer is disposed on a sidewall of the gate electrode. A gate oxide layer is disposed between the gate electrode and the channel region, between the gate electrode and the LDD region, and between the spacer and the LDD region. A silicide layer is disposed on the heavily doped region and is spaced apart from the edge of the spacer.
    Type: Application
    Filed: August 24, 2023
    Publication date: January 9, 2025
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Wei-Hsuan Chang, Ming-Hua Tsai, Chin-Chia Kuo
  • Publication number: 20250013286
    Abstract: An idle time prediction method for a system includes obtaining n idle durations corresponding to n time points, determining if the n idle durations are of a normal distribution, generating a probability according to m idle states corresponding to m idle durations of the n idle durations if the n idle durations are not normally distributed, selecting a predicted idle state according to the probability, and controlling the system to enter the predicted idle state, where n and m are integers larger than one, and m?n.
    Type: Application
    Filed: July 4, 2024
    Publication date: January 9, 2025
    Applicant: MEDIATEK INC.
    Inventors: Chih-Wei Chiu, Chu-Chia Kuo, Kuan-Hsian Hsieh, Chih-Chieh Chang
  • Publication number: 20240379692
    Abstract: The present disclosure relates to an integrated chip. The integrated chip includes a sensor semiconductor layer. The sensor semiconductor layer is doped with a first dopant. A photodetector is along a frontside of the sensor semiconductor layer. A backside semiconductor layer is along a backside of the sensor semiconductor layer, opposite the frontside. The backside semiconductor layer is doped with a second dopant. A diffusion barrier structure is between the sensor semiconductor layer and the backside semiconductor layer. The diffusion barrier structure includes a third dopant different from the first dopant and the second dopant.
    Type: Application
    Filed: July 22, 2024
    Publication date: November 14, 2024
    Inventors: Yu-Hung Cheng, Ching I Li, Chen-Hao Chiang, Eugene I-Chun Chen, Chin-Chia Kuo
  • Publication number: 20240371900
    Abstract: The present disclosure relates to a semiconductor device including a semiconductor substrate. A grid structure extends from a first side of the semiconductor substrate to within the semiconductor substrate. An image sensing element is disposed within the semiconductor substrate and is laterally surrounded by the grid structure. A plurality of protrusions are arranged along the first side of the semiconductor substrate. The plurality of protrusions are disposed over the image sensing element and are laterally surrounded by the grid structure. The plurality of protrusions are substantially identical to one another and have a characteristic dimension. An inner surface of the grid structure facing the image sensing element is spaced apart from a point of one of the plurality of protrusions by a predetermined reflective length that is based on the characteristic dimension of the plurality of protrusions.
    Type: Application
    Filed: July 19, 2024
    Publication date: November 7, 2024
    Inventors: Chin-Chia Kuo, Jhy-Jyi Sze, Tung-Ting Wu, Yimin Huang
  • Patent number: 12136638
    Abstract: The present disclosure relates to a semiconductor device including a semiconductor substrate. A grid structure extends from a first side of the semiconductor substrate to within the semiconductor substrate. An image sensing element is disposed within the semiconductor substrate and is laterally surrounded by the grid structure. A plurality of protrusions are arranged along the first side of the semiconductor substrate. The plurality of protrusions are disposed over the image sensing element and are laterally surrounded by the grid structure. The plurality of protrusions are substantially identical to one another and have a characteristic dimension. An inner surface of the grid structure facing the image sensing element is spaced apart from a point of one of the plurality of protrusions by a predetermined reflective length that is based on the characteristic dimension of the plurality of protrusions.
    Type: Grant
    Filed: July 20, 2021
    Date of Patent: November 5, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chin-Chia Kuo, Jhy-Jyi Sze, Tung-Ting Wu, Yimin Huang
  • Publication number: 20240353635
    Abstract: A pluggable optical packaging structure is provided, including: a substrate, a carrier ring, at least one optical connection assembly and a cover plate; the substrate includes at least one electronic integrated circuit (EIC) and at least one photonic integrated circuit (PIC); the carrier ring is located on the substrate, and the EIC and PIC are enclosed by the carrier ring; the optical connection assembly includes at least one socket, at least one connector, a plurality of optical fibers and at least one optical fiber array connector, the socket is located in a partial section of the carrier ring, the connector is in the socket, the optical fibers has one end coupled to the connector, the other end coupled to the fiber array connector, and is coupled to the PIC through the fiber array connector; the cover plate is located on the carrier ring and extends inwardly to above the PIC.
    Type: Application
    Filed: June 8, 2023
    Publication date: October 24, 2024
    Inventors: Ting-Ta Hu, Po-Yi Wu, Chieh-Yu Fang, Ting-Yan Lin, Chia-Kuo Chen
  • Publication number: 20240355764
    Abstract: Various embodiments of the present disclosure are directed towards an integrated chip including a plurality of semiconductor devices arranged on a substrate and within a device region. A first isolation structure is arranged in the device region and laterally between adjacent semiconductor devices in the plurality of semiconductor devices. An interconnect structure underlies the substrate and includes a topmost conductive interconnect element adjacent to the substrate. A second isolation structure is disposed in the substrate and around the device region. A bottom surface of the second isolation structure is above a lower surface of the topmost conductive interconnect element.
    Type: Application
    Filed: July 3, 2024
    Publication date: October 24, 2024
    Inventors: Tung-Ting Wu, Chen-Jong Wang, Jen-Cheng Liu, Yimin Huang, Chin-Chia Kuo
  • Publication number: 20240347311
    Abstract: Apparatuses and systems for stabilizing electron sources in charged particle beam inspection systems are provided. In some embodiments, a system may include an electron source comprising an emitting tip electrically connected to two electrodes and configured to emit an electron; and a base coupled to the emitting tip, wherein the base is configured to stabilize the emitting tip via the coupling.
    Type: Application
    Filed: June 23, 2022
    Publication date: October 17, 2024
    Applicant: ASML Netherlands B.V.
    Inventors: Bruno LA FONTAINE, Juying DOU, Zhidong DU, Che-Chia KUO
  • Publication number: 20240266435
    Abstract: A transistor with an embedded insulating structure set includes a substrate. A gate is disposed on the substrate. A first lightly doped region is disposed at one side of the gate. A second lightly doped region is disposed at another side of the gate. The first lightly doped region and the second lightly doped region have the same conductive type. The first lightly doped region is symmetrical to the second lightly doped region. A first source/drain doped region is disposed within the first lightly doped region. A second source/drain doped region is disposed within the second lightly doped region. A first insulating structure set is disposed within the first lightly doped region and the first source/drain doped region. The first insulating structure set includes an insulating block embedded within the substrate. A sidewall of the insulating block contacts the gate dielectric layer.
    Type: Application
    Filed: March 13, 2023
    Publication date: August 8, 2024
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Ming-Hua Tsai, Chin-Chia Kuo, Wei-Hsuan Chang
  • Patent number: 12057412
    Abstract: Various embodiments of the present disclosure are directed towards a method for forming a semiconductor device, the method including forming a plurality of photodetectors in a substrate. A device isolation structure is formed within the substrate. The device isolation structure laterally wraps around the plurality of photodetectors. An outer isolation structure is formed within the substrate. The device isolation structure is spaced between sidewalls of the outer isolation structure. The device isolation structure and the outer isolation structure comprise a dielectric material.
    Type: Grant
    Filed: April 21, 2022
    Date of Patent: August 6, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tung-Ting Wu, Chen-Jong Wang, Jen-Cheng Liu, Yimin Huang, Chin-Chia Kuo
  • Publication number: 20240234572
    Abstract: An extended drain metal oxide semiconductor transistor includes a substrate. A gate is disposed on the substrate. A source doped region is disposed in the substrate at one side of the gate. A drain doped region is disposed in the substrate at another side of the gate. A thin gate dielectric layer is disposed under the gate. A thick gate dielectric layer is disposed under the gate. The thick gate dielectric layer extends from the bottom of the gate to contact the drain doped region. A second conductive type first well is disposed in the substrate and surrounds the source doped region and the drain doped region. A deep well is disposed within the substrate and surrounds the second conductive type first well.
    Type: Application
    Filed: February 10, 2023
    Publication date: July 11, 2024
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Liang-An Huang, Ming-Hua Tsai, Wen-Fang Lee, Chin-Chia Kuo, Jung Han, Chun-Lin Chen, Ching-Chung Yang, Nien-Chung Li
  • Publication number: 20240222455
    Abstract: A high-voltage transistor includes a well region disposed in a semiconductor substrate, a gate structure disposed above the well region, a gate oxide layer disposed between the gate structure and the well region, a first drift region, and a second drift region. A first portion of the gate oxide layer is thicker than a second portion of the gate oxide layer. A thickness of the second portion is greater than or equal to one eighth of a thickness of the first portion. The first drift region and the second drift region are disposed in the well region, at least partially located at two opposite sides of the gate structure, respectively, and disposed adjacent to the first portion and the second portion, respectively. A conductivity type of the first drift region is identical to that of the second drift region. A level-up shifting circuit includes the high-voltage transistor described above.
    Type: Application
    Filed: February 9, 2023
    Publication date: July 4, 2024
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Wei-Hsuan Chang, Ming-Hua Tsai, Chin-Chia Kuo
  • Publication number: 20240038684
    Abstract: A semiconductor structure including a substrate and protection structures is provided. The substrate includes a die region. The die region includes corner regions. The protection structures are located in the corner region. Each of the protection structures has a square top-view pattern. The square top-view patterns located in the same corner region have various sizes.
    Type: Application
    Filed: August 16, 2022
    Publication date: February 1, 2024
    Applicant: United Microelectronics Corp.
    Inventors: Ming-Hua Tsai, Hao Ping Yan, Chin-Chia Kuo, Wei Hsuan Chang
  • Publication number: 20240021644
    Abstract: Various embodiments of the present disclosure are directed towards an image sensor, and a method for forming the image sensor, in which an inter-pixel trench isolation structure is defined by a low-transmission layer. In some embodiments, the image sensor comprises an array of pixels and the inter-pixel trench isolation structure. The array of pixels is on a substrate, and the pixels of the array comprise individual photodetectors in the substrate. The inter-pixel trench isolation structure is in the substrate. Further, the inter-pixel trench isolation structure extends along boundaries of the pixels, and individually surrounds the photodetectors, to separate the photodetectors from each other. The inter-pixel trench isolation structure is defined by a low-transmission layer with low transmission for incident radiation, such that the inter-pixel trench isolation structure has low transmission for incident radiation.
    Type: Application
    Filed: August 8, 2023
    Publication date: January 18, 2024
    Inventors: Cheng Yu Huang, Chun-Hao Chuang, Keng-Yu Chou, Wei-Chieh Chiang, Chin-Chia Kuo, Wen-Hau Wu, Hua-Mao Chen, Chih-Kung Chang
  • Patent number: 11862654
    Abstract: Various embodiments of the present disclosure are directed towards an image sensor, and a method for forming the image sensor, in which an inter-pixel trench isolation structure is defined by a low-transmission layer. In some embodiments, the image sensor comprises an array of pixels and the inter-pixel trench isolation structure. The array of pixels is on a substrate, and the pixels of the array comprise individual photodetectors in the substrate. The inter-pixel trench isolation structure is in the substrate. Further, the inter-pixel trench isolation structure extends along boundaries of the pixels, and individually surrounds the photodetectors, to separate the photodetectors from each other. The inter-pixel trench isolation structure is defined by a low-transmission layer with low transmission for incident radiation, such that the inter-pixel trench isolation structure has low transmission for incident radiation.
    Type: Grant
    Filed: January 15, 2021
    Date of Patent: January 2, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Cheng Yu Huang, Chun-Hao Chuang, Keng-Yu Chou, Wei-Chieh Chiang, Chin-Chia Kuo, Wen-Hau Wu, Hua-Mao Chen, Chih-Kung Chang