Patents by Inventor Chia-Ling Yeh

Chia-Ling Yeh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230377881
    Abstract: Strain relief trenches may be formed in a substrate prior to growth of an epitaxial layer on the substrate. The trenches may reduce the stresses and strains on the epitaxial layer that occur during the epitaxial growth process due to differences in material properties (e.g., lattice mismatches, differences in thermal expansion coefficients, and/or the like) between the epitaxial layer material and the substrate material. The stress and strain relief provided by the trenches may reduce or eliminate cracks and/or other types of defects in the epitaxial layer and the substrate, may reduce and/or eliminate bowing and warping of the substrate, may reduce breakage of the substrate, and/or the like. This may increase the center-to-edge quality of the epitaxial layer, may permit epitaxial layers to be grown on larger substrates, and/or the like.
    Type: Application
    Filed: July 31, 2023
    Publication date: November 23, 2023
    Inventors: Yi-Chuan LO, Pravanshu MOHANTA, Jiang-He XIE, Ching Yu CHEN, Ming-Tsung CHEN, Chia-Ling YEH
  • Publication number: 20230369063
    Abstract: A method for selectively removing a tungsten-including layer includes: forming a tungsten-including layer which has a first portion and a second portion; performing a treatment on a surface region of the first portion of the tungsten-including layer so as to convert tungsten in the surface region into tungsten oxide; and partially removing the tungsten-including layer using an etchant which has a higher etching selectivity to tungsten than tungsten oxide such that the second portion of the tungsten-including layer is fully removed, and the first portion of the tungsten-including layer, having the tungsten oxide in the surface region, is at least partially retained.
    Type: Application
    Filed: May 12, 2022
    Publication date: November 16, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chia-Ling CHUNG, Chun-Chih CHENG, Ying-Liang CHUANG, Ming-Hsi YEH, Kuo-Bin HUANG
  • Patent number: 11804374
    Abstract: Strain relief trenches may be formed in a substrate prior to growth of an epitaxial layer on the substrate. The trenches may reduce the stresses and strains on the epitaxial layer that occur during the epitaxial growth process due to differences in material properties (e.g., lattice mismatches, differences in thermal expansion coefficients, and/or the like) between the epitaxial layer material and the substrate material. The stress and strain relief provided by the trenches may reduce or eliminate cracks and/or other types of defects in the epitaxial layer and the substrate, may reduce and/or eliminate bowing and warping of the substrate, may reduce breakage of the substrate, and/or the like. This may increase the center-to-edge quality of the epitaxial layer, may permit epitaxial layers to be grown on larger substrates, and/or the like.
    Type: Grant
    Filed: October 27, 2020
    Date of Patent: October 31, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yi-Chuan Lo, Pravanshu Mohanta, Jiang-He Xie, Ching Yu Chen, Ming-Tsung Chen, Chia-Ling Yeh
  • Patent number: 11715792
    Abstract: Various embodiments of the present disclosure are directed toward an integrated chip including an undoped layer overlying a substrate. A first barrier layer overlies the undoped layer. A doped layer overlies the first barrier layer. Further, a second barrier layer overlies the first barrier layer, where the second barrier layer is laterally offset from a perimeter of the doped layer by a non-zero distance. The first and second barrier layers comprise a same III-V semiconductor material. A first atomic percentage of a first element within the first barrier layer is less than a second atomic percentage of the first element within the second barrier layer.
    Type: Grant
    Filed: May 12, 2020
    Date of Patent: August 1, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yun-Hsiang Wang, Chun Lin Tsai, Jiun-Lei Jerry Yu, Po-Chih Chen, Chia-Ling Yeh, Ching Yu Chen
  • Publication number: 20230223328
    Abstract: An organic interposer includes dielectric material layers embedding redistribution interconnect structures, package-side bump structures located on a first side of the dielectric material layers, and die-side bump structures located on a second side of the dielectric material layers. A gap region is present between a first area including first die-side bump structures and a second area including second die-side bump structures. Stress-relief line structures are located on, or within, the dielectric material layers within an area of the gap region in the plan view. Each stress-relief line structures may include straight line segments that laterally extend along a respective horizontal direction and is not electrically connected to the redistribution interconnect structures. The stress-relief line structures may include the same material as, or may include a different material from, a metallic material of the redistribution interconnect structures or bump structures that are located at a same level.
    Type: Application
    Filed: March 14, 2023
    Publication date: July 13, 2023
    Inventors: Li-Ling Liao, Ming-Chih Yew, Chia-Kuei Hsu, Shu-Shen Yeh, Po-Yao Lin, Shin-Puu Jeng
  • Publication number: 20230201279
    Abstract: The invention provides an extracellular vesicle and a nucleotide fragment isolated from Lactobacillus paracasei GM-080 with the deposition number BCRC 910220 and CCTCC M 204012 and use thereof. The invention also relates to a method for modulating immune function comprising administering a composition including the extracellular vesicle and the nucleotide fragment.
    Type: Application
    Filed: March 11, 2022
    Publication date: June 29, 2023
    Inventors: Wan-Hua Tsai, Wen-Wei Chang, Chia-Hsuan Chou, I-Jen Wang, Wen-Ling Yeh, Jhih-Hua Jhong, Tzong-Yi Lee
  • Patent number: 11522067
    Abstract: A high electron mobility transistor (HEMT) device and a method of forming the same are provided. The method includes forming a first III-V compound layer over a substrate. A second III-V compound layer is formed over the first III-V compound layer. The second III-V compound layer has a greater band gap than the first III-V compound layer. A third III-V compound layer is formed over the second III-V compound layer. The third III-V compound layer and the first III-V compound layer comprise a same III-V compound. A passivation layer is formed along a topmost surface and sidewalls of the third III-V compound layer. A fourth III-V compound layer is formed over the second III-V compound layer. The fourth III-V compound layer has a greater band gap than the first III-V compound layer.
    Type: Grant
    Filed: April 8, 2021
    Date of Patent: December 6, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chia-Ling Yeh, Ching Yu Chen
  • Publication number: 20220384630
    Abstract: Disclosed is a semiconductor device and a method for fabricating such semiconductor device, specifically a High Electron Mobility Transistor (HEMT) with a back barrier layer for blocking electron leakage and improve threshold voltage. In one embodiment, a semiconductor device, includes: a Gallium Nitride (GaN) layer; a front barrier layer over the GaN layer; a source electrode, a drain electrode and a gate electrode formed over the front barrier layer; a 2-Dimensional Electron Gas (2-DEG) in the GaN layer at a first interface between the GaN layer and the front barrier layer; and a back barrier layer in the GaN layer, wherein the back barrier layer comprises Aluminum Nitride (AIN).
    Type: Application
    Filed: August 8, 2022
    Publication date: December 1, 2022
    Inventors: Chia-Ling YEH, Pravanshu Mohanta, Ching-Yu Chen, Jiang-He Xie, Yu-Shine Lin
  • Publication number: 20220376086
    Abstract: Various embodiments of the present disclosure are directed toward an integrated chip including an undoped layer overlying a substrate. A first barrier layer overlies the undoped layer. A doped layer overlies the first barrier layer. Further, a second barrier layer overlies the first barrier layer, where the second barrier layer is laterally offset from a perimeter of the doped layer by a non-zero distance. The first and second barrier layers comprise a same III-V semiconductor material. A first atomic percentage of a first element within the first barrier layer is less than a second atomic percentage of the first element within the second barrier layer.
    Type: Application
    Filed: August 5, 2022
    Publication date: November 24, 2022
    Inventors: Yun-Hsiang Wang, Chun Lin Tsai, Jiun-Lei Jerry Yu, Po-Chih Chen, Chia-Ling Yeh, Ching Yu Chen
  • Publication number: 20220140123
    Abstract: Disclosed is a semiconductor device and a method for fabricating such semiconductor device, specifically a High Electron Mobility Transistor (HEMT) with a back barrier layer for blocking electron leakage and improve threshold voltage. In one embodiment, a semiconductor device, includes: a Gallium Nitride (GaN) layer; a front barrier layer over the GaN layer; a source electrode, a drain electrode and a gate electrode formed over the front barrier layer; a 2-Dimensional Electron Gas (2-DEG) in the GaN layer at a first interface between the GaN layer and the front barrier layer; and a back barrier layer in the GaN layer, wherein the back barrier layer comprises Aluminum Nitride (AlN).
    Type: Application
    Filed: October 29, 2020
    Publication date: May 5, 2022
    Inventors: Chia-Ling YEH, Pravanshu MOHANTA, Ching-Yu CHEN, Jiang-He XIE, Yu-Shine LIN
  • Publication number: 20220130670
    Abstract: Strain relief trenches may be formed in a substrate prior to growth of an epitaxial layer on the substrate. The trenches may reduce the stresses and strains on the epitaxial layer that occur during the epitaxial growth process due to differences in material properties (e.g., lattice mismatches, differences in thermal expansion coefficients, and/or the like) between the epitaxial layer material and the substrate material. The stress and strain relief provided by the trenches may reduce or eliminate cracks and/or other types of defects in the epitaxial layer and the substrate, may reduce and/or eliminate bowing and warping of the substrate, may reduce breakage of the substrate, and/or the like. This may increase the center-to-edge quality of the epitaxial layer, may permit epitaxial layers to be grown on larger substrates, and/or the like.
    Type: Application
    Filed: October 27, 2020
    Publication date: April 28, 2022
    Inventors: Yi-Chuan LO, Pravanshu MOHANTA, Jiang-He XIE, Ching Yu CHEN, Ming-Tsung CHEN, Chia-Ling YEH
  • Publication number: 20210242337
    Abstract: Various embodiments of the present disclosure are directed toward an integrated chip including an undoped layer overlying a substrate. A first barrier layer overlies the undoped layer. A doped layer overlies the first barrier layer. Further, a second barrier layer overlies the first barrier layer, where the second barrier layer is laterally offset from a perimeter of the doped layer by a non-zero distance. The first and second barrier layers comprise a same III-V semiconductor material. A first atomic percentage of a first element within the first barrier layer is less than a second atomic percentage of the first element within the second barrier layer.
    Type: Application
    Filed: May 12, 2020
    Publication date: August 5, 2021
    Inventors: Yun-Hsiang Wang, Chun Lin Tsai, Jiun-Lei Jerry Yu, Po-Chih Chen, Chia-Ling Yeh, Ching Yu Chen
  • Publication number: 20210226040
    Abstract: A high electron mobility transistor (HEMT) device and a method of forming the same are provided. The method includes forming a first III-V compound layer over a substrate. A second III-V compound layer is formed over the first III-V compound layer. The second III-V compound layer has a greater band gap than the first III-V compound layer. A third III-V compound layer is formed over the second III-V compound layer. The third III-V compound layer and the first III-V compound layer comprise a same III-V compound. A passivation layer is formed along a topmost surface and sidewalls of the third III-V compound layer. A fourth III-V compound layer is formed over the second III-V compound layer. The fourth III-V compound layer has a greater band gap than the first III-V compound layer.
    Type: Application
    Filed: April 8, 2021
    Publication date: July 22, 2021
    Inventors: Chia-Ling Yeh, Ching Yu Chen
  • Patent number: 11011614
    Abstract: A high electron mobility transistor (HEMT) device and a method of forming the same are provided. The method includes forming a first III-V compound layer over a substrate. A second III-V compound layer is formed over the first III-V compound layer. The second III-V compound layer has a greater band gap than the first III-V compound layer. A third III-V compound layer is formed over the second III-V compound layer. The third III-V compound layer and the first III-V compound layer comprise a same III-V compound. A passivation layer is formed along a topmost surface and sidewalls of the third III-V compound layer. A fourth III-V compound layer is formed over the second III-V compound layer. The fourth III-V compound layer has a greater band gap than the first III-V compound layer.
    Type: Grant
    Filed: May 17, 2019
    Date of Patent: May 18, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Ling Yeh, Ching Yu Chen
  • Publication number: 20200006522
    Abstract: A high electron mobility transistor (HEMT) device and a method of forming the same are provided. The method includes forming a first III-V compound layer over a substrate. A second III-V compound layer is formed over the first III-V compound layer. The second III-V compound layer has a greater band gap than the first III-V compound layer. A third III-V compound layer is formed over the second III-V compound layer. The third III-V compound layer and the first III-V compound layer comprise a same III-V compound. A passivation layer is formed along a topmost surface and sidewalls of the third III-V compound layer. A fourth III-V compound layer is formed over the second III-V compound layer. The fourth III-V compound layer has a greater band gap than the first III-V compound layer.
    Type: Application
    Filed: May 17, 2019
    Publication date: January 2, 2020
    Inventors: Chia-Ling Yeh, Ching Yu Chen
  • Patent number: 10068976
    Abstract: An enhancement mode field-effect transistor (E-FET) for high static performance is provided. A composite barrier layer comprises a lower barrier layer and an upper barrier layer. The upper barrier layer is arranged over the lower barrier layer and has a different polarization than the lower barrier layer. Further, the composite barrier layer comprises a gate opening. A channel layer is arranged under the composite barrier layer, such that a heterojunction is defined at an interface between the channel layer and the composite barrier layer. A gate dielectric layer is arranged over the composite barrier layer and within the gate opening. A gate electrode is arranged over the gate dielectric layer. A method for manufacturing the E-FET is also provided.
    Type: Grant
    Filed: July 21, 2016
    Date of Patent: September 4, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chia-Ling Yeh, Man-Ho Kwan, Kuei-Ming Chen, Jiun-Lei Jerry Yu, Chun Lin Tsai
  • Publication number: 20180026106
    Abstract: An enhancement mode field-effect transistor (E-FET) for high static performance is provided. A composite barrier layer comprises a lower barrier layer and an upper barrier layer. The upper barrier layer is arranged over the lower barrier layer and has a different polarization than the lower barrier layer. Further, the composite barrier layer comprises a gate opening. A channel layer is arranged under the composite barrier layer, such that a heterojunction is defined at an interface between the channel layer and the composite barrier layer. A gate dielectric layer is arranged over the composite barrier layer and within the gate opening. A gate electrode is arranged over the gate dielectric layer. A method for manufacturing the E-FET is also provided.
    Type: Application
    Filed: July 21, 2016
    Publication date: January 25, 2018
    Inventors: Chia-Ling Yeh, Man-Ho Kwan, Kuei-Ming Chen, Jiun-Lei Jerry Yu, Chun Lin Tsai
  • Patent number: 9445176
    Abstract: An earpiece apparatus for in-ear headphones, includes two shells, each having a speaker and an extending sound output hole, wherein at least one mounting hole is positioned on the outer surface of said shells, said mounting hole is not positioned opposite to said sound output hole, a vibrating structure is correspondingly positioned on said mounting hole, said vibrating structure contacts the earlap, said vibrating structure comprises a vibrating diaphragm and a flexible piece, said vibrating diaphragm is fixed on said flexible piece, said vibrating diaphragm is made of thin metal, plastic, or paper etc. membrane material, and said flexible piece is made of a soft material, and when the sound waves produced from said speaker vibrate within said shell, said flexible piece and said vibrating diaphragm vibrate accordingly along with the sound waves passing through.
    Type: Grant
    Filed: April 8, 2015
    Date of Patent: September 13, 2016
    Inventor: Chia-Ling Yeh