Abstract: The present disclosure provides a semiconductor structure. The structure includes a semiconductor substrate, a gate stack over a first portion of a top surface of the semiconductor substrate; and a laminated dielectric layer over at least a portion of a top surface of the gate stack. The laminated dielectric layer includes at least a first sublayer and a second sublayer. The first sublayer is formed of a material having a dielectric constant lower than a dielectric constant of a material used to form the second sublayer and the material used to form the second sublayer has an etch selectivity higher than an etch selectivity of the material used to form the first sublayer.

Abstract: Semiconductor devices and methods of forming the same are provided. A semiconductor device according to one embodiment includes an active region including a channel region and a source/drain region adjacent the channel region, a gate structure over the channel region of the active region, a source/drain contact over the source/drain region, a dielectric feature over the gate structure and including a lower portion adjacent the gate structure and an upper portion away from the gate structure, and an air gap disposed between the gate structure and the source/drain contact. A first width of the upper portion of the dielectric feature along a first direction is greater than a second width of the lower portion of the dielectric feature along the first direction. The air gap is disposed below the upper portion of the dielectric feature.

Abstract: A method for ingredient analysis includes the steps of: providing a database, which stores a plurality of standard ingredient data; analyzing a sample to obtain a plurality of inspection data via a high performance liquid chromatography (HPLC) method; and respectively comparing the inspection data with the corresponding standard ingredient data to analyze all ingredients contained in the sample simultaneously. The method may be applied to a device for ingredient analysis. Thus, by cooperating the database with the HPLC method, all ingredients contained in the sample can be analyzed via at least one analysis procedure so that the procedures for ingredient analysis are simpler and quicker and the accuracy of the analysis result can be enhanced.

Abstract: A method for ingredient analysis includes the steps of: providing a database, which stores a plurality of standard ingredient data; analyzing a sample to obtain a plurality of inspection data via a high performance liquid chromatography (HPLC) method; and respectively comparing the inspection data with the corresponding standard ingredient data to analyze all ingredients contained in the sample simultaneously. The method may be applied to a device for ingredient analysis. Thus, by cooperating the database with the HPLC method, all ingredients contained in the sample can be analyzed via at least one analysis procedure so that the procedures for ingredient analysis are simpler and quicker and the accuracy of the analysis result can be enhanced.