Patents by Inventor Chia Yao Chen

Chia Yao Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Object table comprising an electrostatic clamp
    Patent number: 12028000
    Abstract: Disclosed is an object table for holding an object, comprising: an electrostatic clamp arranged to clamp the object on the object table; a neutralizer arranged to neutralize a residual charge of the electrostatic clamp; a control unit arranged to control the neutralizer, wherein the residual charge is an electrostatic charge present on the electrostatic clamp when no voltage is applied to the electrostatic clamp.
    Type: Grant
    Filed: April 10, 2023
    Date of Patent: July 2, 2024
    Assignee: ASML Netherlands B.V.
    Inventors: Jan-Gerard Cornelis Van Der Toorn, Jeroen Gertruda Antonius Huinck, Han Willem Hendrik Severt, Allard Eelco Kooiker, Michael Johannes Christiaan Ronde, Arno Maria Wellink, Shibing Liu, Ying Luo, Yixiang Wang, Chia-Yao Chen, Bohang Zhu, Jurgen Van Soest
  • OBJECT TABLE COMPRISING AN ELECTROSTATIC CLAMP
    Publication number: 20230246568
    Abstract: Disclosed is an object table for holding an object, comprising: an electrostatic clamp arranged to clamp the object on the object table; a neutralizer arranged to neutralize a residual charge of the electrostatic clamp; a control unit arranged to control the neutralizer, wherein the residual charge is an electrostatic charge present on the electrostatic clamp when no voltage is applied to the electrostatic clamp.
    Type: Application
    Filed: April 10, 2023
    Publication date: August 3, 2023
    Applicant: ASML Netherlands B.V.
    Inventors: Jan-Gerard Cornelis VAN DER TOORN, Jeroen Gertruda Antonius HUINCK, Han Willem Hendrik SEVERT, Allard Eelco KOOIKER, Michael Johannes Christiaan RONDE, Arno Maria WELLINK, Shibing LIU, Ying LUO, Yixiang WANG, Chia-Yao CHEN, Bohang ZHU, Jurgen VAN SOEST
  • Object table comprising an electrostatic clamp
    Patent number: 11637512
    Abstract: Disclosed is an object table for holding an object, comprising: an electrostatic clamp arranged to clamp the object on the object table; a neutralizer arranged to neutralize a residual charge of the electrostatic clamp; a control unit arranged to control the neutralizer, wherein the residual charge is an electrostatic charge present on the electrostatic clamp when no voltage is applied to the electrostatic clamp.
    Type: Grant
    Filed: June 17, 2021
    Date of Patent: April 25, 2023
    Assignee: ASML Netherlands B.V.
    Inventors: Jan-Gerard Cornelis Van Der Toorn, Jeroen Gertruda Antonius Huinck, Han Willem Hendrik Severt, Allard Eelco Kooiker, Michaël Johannes Christiaan Ronde, Arno Maria Wellink, Shibing Liu, Ying Luo, Yixiang Wang, Chia-Yao Chen, Bohang Zhu, Jurgen Van Soest
  • OBJECT TABLE COMPRISING AN ELECTROSTATIC CLAMP
    Publication number: 20210313908
    Abstract: Disclosed is an object table for holding an object, comprising: an electrostatic clamp arranged to clamp the object on the object table; a neutralizer arranged to neutralize a residual charge of the electrostatic clamp; a control unit arranged to control the neutralizer, wherein the residual charge is an electrostatic charge present on the electrostatic clamp when no voltage is applied to the electrostatic clamp.
    Type: Application
    Filed: June 17, 2021
    Publication date: October 7, 2021
    Inventors: Jan-Gerard Cornelis VAN DER TOORN, Jeroen Gertruda Antonius HUINCK, Han Willem Hendrik SEVERT, Allard Eelco KOOIKER, Michaël Johannes Christiaan RONDE, Arno Maria WELLINK, Shibing LIU, Ying LUO, Yixiang WANG, Chia-Yao CHEN, Bohang ZHU, Jurgen VAN SOEST
  • Two-step GC etch for GC profile and process window improvement
    Patent number: 7049245
    Abstract: A method for manufacturing a semiconductor device that comprises defining a semiconductor substrate, forming a gate oxide on the semiconductor substrate, forming a polycrystalline silicon layer over the gate oxide, forming a tungsten silicide layer over the polycrystalline silicon layer; providing a mask over the tungsten silicide layer, defining the mask to expose at least one portion of the tungsten silicide layer, etching the exposed tungsten silicide layer with a first etchant, wherein some tungsten silicide layer remains, etching the remaining tungsten silicide layer with a second etchant to expose at least one portion of the polycrystalline silicon layer, annealing the tungsten silicide layer, etching the exposed polycrystalline silicon layer, and oxidizing sidewalls of the tungsten silicide layer and the polycrystalline silicon layer.
    Type: Grant
    Filed: September 12, 2003
    Date of Patent: May 23, 2006
    Assignee: ProMOS Technologies, Inc.
    Inventors: Fang-Yu Yeh, Chi Lin, Chia-Yao Chen
  • Two-step GC etch for GC profile and process window improvement
    Publication number: 20050059248
    Abstract: A method for manufacturing a semiconductor device that comprises defining a semiconductor substrate, forming a gate oxide on the semiconductor substrate, forming a polycrystalline silicon layer over the gate oxide, forming a tungsten silicide layer over the polycrystalline silicon layer; providing a mask over the tungsten silicide layer, defining the mask to expose at least one portion of the tungsten silicide layer, etching the exposed tungsten silicide layer with a first etchant, wherein some tungsten silicide layer remains, etching the remaining tungsten silicide layer with a second etchant to expose at least one portion of the polycrystalline silicon layer, annealing the tungsten silicide layer, etching the exposed polycrystalline silicon layer, and oxidizing sidewalls of the tungsten silicide layer and the polycrystalline silicon layer.
    Type: Application
    Filed: September 12, 2003
    Publication date: March 17, 2005
    Inventors: Feng-Yu Yeh, Chi Lin, Chia-Yao Chen
  • Two motor fan
    Patent number: D506002
    Type: Grant
    Filed: October 31, 2003
    Date of Patent: June 7, 2005
    Assignee: Vaxcel International Trading Co. Ltd.
    Inventor: Chia Yao Chen