Patents by Inventor Chia-Yuan Yu

Chia-Yuan Yu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11955515
    Abstract: A semiconductor device with dual side source/drain (S/D) contact structures and a method of fabricating the same are disclosed. The method includes forming a fin structure on a substrate, forming a superlattice structure on the fin structure, forming first and second S/D regions within the superlattice structure, forming a gate structure between the first and second S/D regions, forming first and second contact structures on first surfaces of the first and second S/D regions, and forming a third contact structure, on a second surface of the first S/D region, with a work function metal (WFM) silicide layer and a dual metal liner. The second surface is opposite to the first surface of the first S/D region and the WFM silicide layer has a work function value closer to a conduction band energy than a valence band energy of a material of the first S/D region.
    Type: Grant
    Filed: July 28, 2022
    Date of Patent: April 9, 2024
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Shih-Chuan Chiu, Chia-Hao Chang, Cheng-Chi Chuang, Chih-Hao Wang, Huan-Chieh Su, Chun-Yuan Chen, Li-Zhen Yu, Yu-Ming Lin
  • Publication number: 20060237389
    Abstract: A method for fabricating an interlayer conducting structure of a circuit board is proposed. The method includes providing a core layer, and a first insulating layer and a second insulating layer formed on the upper and lower surfaces of the core layer successively, forming a through hole penetrating the core layer and the first and second insulating layers, and filling the through hole with a conductive material; removing the second insulating layer, a portion of the conductive material in the through hole at a position corresponding to the second insulating layer, and the first insulating layer; and pressing a metal layer onto the first and second surfaces of the core layer such that the conductive material protruded from the through hole corresponding to the core layer is fully packed in the through hole, so as to form a conductive through hole.
    Type: Application
    Filed: April 25, 2006
    Publication date: October 26, 2006
    Inventors: E-Tung Chou, Chia-Yuan Yu