Patents by Inventor Chiaki Terasawa
Chiaki Terasawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20100103394Abstract: A reflection projection optical system projects a pattern positioned on an object plane onto an image plane via a mirror. The system has bilateral telecentricity on a side of the object plane and a side of the image plane, and has the object plane and the image plane positioned to be tilted with respect to a plane perpendicular to an optical axis of the system so as to satisfy a Scheimpflug condition.Type: ApplicationFiled: October 27, 2009Publication date: April 29, 2010Applicant: CANON KABUSHIKI KAISHAInventor: Chiaki Terasawa
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Patent number: 7317571Abstract: A catadioptric projection optical for forming an image of the intermediate image onto a second object, the catadioptric projection optical system include, a first dioptric group including a first lens group that has a positive refractive power and a second lens group that has a positive refractive power, a catadioptric group including a concave mirror and a third lens group that an incidence light and reflected light from the concave mirror pass, and a second dioptric group. A first deflective reflector is arranged between the first lens group and the second lens group. A second deflective reflector is arranged between the second lens group and the third lens group or between the third lens group and the second dioptric group. A first intermediate image is formed between the second lens group and the concave mirror. A second intermediate image is formed between the concave mirror and the second dioptric group.Type: GrantFiled: August 2, 2005Date of Patent: January 8, 2008Assignee: Canon Kabushiki KaishaInventors: Takashi Kato, Chiaki Terasawa, Hirohiko Shinonaga
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Patent number: 7283294Abstract: A catadioptric optical system comprising a first imaging optical system including a concave mirror and forming an intermediate image of a first object, said first imaging optical system forming a reciprocating optical system that an incidence light and reflected light pass, a second imaging optical system for forming an image of the intermediate image onto a second object, and a first optical path deflective member, provided between the concave mirror and the intermediate image, for introducing a light from the first imaging optical system to the second imaging optical system, wherein said first optical path deflective member deflects a light in such a direction that a forward path of the first imaging optical system intersects a return path of the first imaging optical system, and wherein said intermediate image is formed without an optical element after a deflection.Type: GrantFiled: October 24, 2005Date of Patent: October 16, 2007Assignee: Canon Kabushiki KaishaInventors: Yuji Katashiba, Chiaki Terasawa, Hideki Morishima
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Patent number: 7268952Abstract: A catadioptric projection system for forming an intermediate image of a first object plural times, and images the intermediate image onto a second object includes at least two deflective reflectors, a lens unit arranged in an optical path between the two deflective reflectors, the lens unit having a negative refractive power, and not forming a reciprocating optical system that passes incident light and reflected light.Type: GrantFiled: November 10, 2005Date of Patent: September 11, 2007Assignee: Canon Kabushiki KaishaInventors: Takashi Kato, Chiaki Terasawa
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Patent number: 7253971Abstract: A catadioptric projection optical system for forming plural intermediate images of a first object and for imaging the image of the first object onto a second object, said catadioptric projection optical system includes at least one concave mirror, a first deflective reflector, and a second deflective reflector, wherein a light reflected by the first deflective reflector is directly led to the second deflective reflector.Type: GrantFiled: October 20, 2005Date of Patent: August 7, 2007Assignee: Canon Kabushiki KaishaInventors: Takashi Kato, Chiaki Terasawa
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Patent number: 7239453Abstract: A catadioptric projection optical system includes a first optical system, for receiving light from an object, a second optical system, for forming an image of the object on an image plane, and a third optical system disposed optically between the first optical system and the second optical system. The first, second and third optical systems have a common straight optical axis. The image of the object is projected onto the image plane through a plurality of real intermediate image formations, and a pupil plane of the catadioptric projection optical system is free of a void area.Type: GrantFiled: June 23, 2006Date of Patent: July 3, 2007Assignee: Canon Kabushiki KaishaInventors: Chiaki Terasawa, Hiroyuki Ishii, Takashi Kato
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Patent number: 7232233Abstract: A catoptric reduction projection optical system that uses light of light with a wavelength of 200 nm or less includes six light-reflecting mirrors arranged from an object side to an image side such that said mirrors basically form a coaxial system, wherein a third mirror in said six mirrors is located at a pupil position of said optical system.Type: GrantFiled: July 29, 2002Date of Patent: June 19, 2007Assignee: Canon Kabushiki KaishaInventors: Masayuki Suzuki, Chiaki Terasawa
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Patent number: 7130018Abstract: A catoptric projection optical system for projecting a reduced size of a pattern on an object surface onto an image surface includes eight mirrors and forms an intermediate image between the sixth mirror and the seventh mirror on an optical path, wherein a position in a height direction of a principal ray from an optical axis at each mirror displaces, and a displacement direction from the first mirror to the fourth mirror is reverse to that from the fifth mirror to the eight mirror, wherein the second mirror to the fifth mirror are a concave mirror, a convex mirror, a concave mirror and a concave mirror, and the seventh mirror to the eighth are a convex mirror and a concave mirror, and wherein the second mirror of the eight mirrors is located closest to the object surface side.Type: GrantFiled: December 24, 2003Date of Patent: October 31, 2006Assignee: Canon Kabushiki KaishaInventor: Chiaki Terasawa
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Publication number: 20060238883Abstract: Disclosed is a projection optical system for projecting an image of an object onto an image plane, which includes a first imaging optical system for forming an image of the object, a second imaging optical system for re-imaging the image upon the image plane, wherein the first and second imaging optical systems are disposed in an order from the object side and are disposed along a common straight optical axis, wherein the first imaging optical system includes a first mirror for reflecting and collecting abaxial light from the object, wherein one of the first and second imaging optical systems includes a second mirror for reflecting light from the first mirror to the image plane side, and wherein, with the second mirror, the abaxial light is caused to pass an outside of an effective diameter of the first mirror.Type: ApplicationFiled: June 23, 2006Publication date: October 26, 2006Applicant: CANON KABUSHIKI KAISHAInventors: Chiaki Terasawa, Hiroyuki Ishii, Takashi Kato
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Patent number: 7092168Abstract: A catadioptric projection optical system for projecting an image of an object onto an image plane through two intermediate image formations. The catadioptric projection optical system includes a first optical system, for receiving light from the object, including a plurality of lenses, a second optical system, for forming the image of the object on the image plane, including a plurality of lenses, and a third optical system disposed optically between the first optical system and the second optical system. The third optical system includes a first concave mirror and a second concave mirror. The light is reflected by the first concave mirror then by the second concave mirror to be directed to the second optical system along a z-shaped optical path, and the first, second and third optical systems have a common straight optical axis.Type: GrantFiled: November 8, 2005Date of Patent: August 15, 2006Assignee: Canon Kabushiki KaishaInventors: Chiaki Terasawa, Hiroyuki Ishii, Takashi Kato
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Patent number: 7075726Abstract: A projection optical system projects an image of an object onto an image plane, and includes a first imaging optical system for forming an image of the object, and a second imaging optical system for re-imaging the image upon the image plane, wherein the first and second imaging optical systems are disposed in an order from the object side and are disposed along a common straight optical axis. The first imaging optical system includes a first mirror for reflecting and collecting abaxial light from the object, wherein one of the first and second imaging optical systems includes a second mirror for reflecting light from the first mirror to the image plane side, and wherein, with the second mirror, the abaxial light is caused to pass an outside of an effective diameter of the first mirror.Type: GrantFiled: February 16, 2001Date of Patent: July 11, 2006Assignee: Canon Kabushiki KaishaInventors: Chiaki Terasawa, Hiroyuki Ishii, Takashi Kato
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Patent number: 7053986Abstract: A projection optical system projects an image of a first object onto a second object. A first imaging optical system forms a first intermediate image of the first object, and is a refractive optical system. A second imaging optical system forms a second intermediate image of the first object, and includes two mirrors, one of the two being concave. A third imaging optical system forms an image of the first object onto the second object, and includes a lens. The first, second and third imaging optical systems are arranged along an optical path from the first object in this order. The system satisfies the expression 0.80<|?1·?2<2.0 where ?1 and ?2 are paraxial magnifications of the first and second imaging optical systems, respectively. The first imaging optical system and the concave mirror have a common straight optical axis.Type: GrantFiled: November 3, 2005Date of Patent: May 30, 2006Assignee: Canon Kabushiki KaishaInventors: Takashi Kato, Chiaki Terasawa
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Publication number: 20060098298Abstract: A catadioptric projection system for forming an intermediate image of a first object plural times, and images the intermediate image onto a second object includes at least two deflective reflectors, a lens unit arranged in an optical path between the two deflective reflectors, the lens unit having a negative refractive power, and not forming a reciprocating optical system that passes incident light and reflected light.Type: ApplicationFiled: November 10, 2005Publication date: May 11, 2006Inventors: Takashi Kato, Chiaki Terasawa
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Publication number: 20060088320Abstract: A catadioptric optical system comprising a first imaging optical system including a concave mirror and forming an intermediate image of a first object, said first imaging optical system forming a reciprocating optical system that an incidence light and reflected light pass, a second imaging optical system for forming an image of the intermediate image onto a second object, and a first optical path deflective member, provided between the concave mirror and the intermediate image, for introducing a light from the first imaging optical system to the second imaging optical system, wherein said first optical path deflective member deflects a light in such a direction that a forward path of the first imaging optical system intersects a return path of the first imaging optical system, and wherein said intermediate image is formed without an optical element after a deflection.Type: ApplicationFiled: October 24, 2005Publication date: April 27, 2006Inventors: Yuji Katashiba, Chiaki Terasawa, Hideki Morishima
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Publication number: 20060082904Abstract: A catadioptric projection optical system for forming plural intermediate images of a first object and for imaging the image of the first object onto a second object, said catadioptric projection optical system includes at least one concave mirror, a first deflective reflector, and a second deflective reflector, wherein a light reflected by the first deflective reflector is directly led to the second deflective reflector.Type: ApplicationFiled: October 20, 2005Publication date: April 20, 2006Inventors: Takashi Kato, Chiaki Terasawa
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Publication number: 20060061879Abstract: A catadioptric projection optical system for projecting an image of an object onto an image plane through two intermediate image formations. The catadioptric projection optical system includes a first optical system, for receiving light from the object, including a plurality of lenses, a second optical system, for forming the image of the object on the image plane, including a plurality of lenses, and a third optical system disposed optically between the first optical system and the second optical system. The third optical system includes a first concave mirror and a second concave mirror. The light is reflected by the first concave mirror then by the second concave mirror to be directed to the second optical system along a z-shaped optical path, and the first, second and third optical systems have a common straight optical axis.Type: ApplicationFiled: November 8, 2005Publication date: March 23, 2006Applicant: CANON KABUSHIKI KAISHAInventors: Chiaki Terasawa, Hiroyuki Ishii, Takashi Kato
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Publication number: 20060055907Abstract: A projection optical system for projecting an image of a first object onto a second object includes a first imaging optical system that forms a first intermediate image of the first object, and includes a lens, a second imaging optical system that forms a second intermediate image of the first object, and includes a lens and a concave mirror, and a third imaging optical system that forms an image of the first object onto the second object, and includes a lens, wherein the first, second and third imaging optical systems are arranged along an optical path from the first object in this order, and 0.7<|l?1·?2|<3.0 is met where ?1 is a paraxial magnification of the first imaging optical system, and ?2 is a paraxial magnification of the second imaging optical system.Type: ApplicationFiled: November 3, 2005Publication date: March 16, 2006Inventors: Takashi Kato, Chiaki Terasawa
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Publication number: 20060028715Abstract: A catadioptric projection optical system for forming an intermediate image of a first object twice and for forming an image of the intermediate image onto a second object, said catadioptric projection optical system comprising, in order from the first object side and along an optical axis of said catadioptric projection optical system, a first dioptric group that does not form a reciprocating optical system (double-pass optical system) that an incidence light and reflected light pass, said first dioptric group including a first lens group that has a positive refractive power and a second lens group that has a positive refractive power, a catadioptric group that forms the reciprocating optical system (double-pass optical system), said catadioptric group including a third lens group that forms the reciprocating optical system (double-pass optical system), a second dioptric group that does not form the reciprocating optical system (double-pass optical system), a first deflective reflector that arranges between tType: ApplicationFiled: August 2, 2005Publication date: February 9, 2006Inventors: Takashi Kato, Chiaki Terasawa, Hirohiko Shinonaga
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Patent number: 6995918Abstract: A projection optical system for projecting an image of an object onto an image plane. The projection optical system includes a first imaging optical system for forming an image of the object in which the first imaging optical system includes a first mirror for reflecting and collecting abaxial light from the object, a second imaging optical system for re-imaging the image upon the image plane, a second mirror for reflecting light from the first mirror to the image plane side, whereby the abaxial light is caused to pass outside of an effective diameter of the first mirror, and a field optical system including three lenses each having a positive refractive power. The abaxial light passed through the outside of the effective diameter of the first mirror is refracted by the three lenses toward a direction nearing an optical axis of the three lenses.Type: GrantFiled: November 22, 2004Date of Patent: February 7, 2006Assignee: Canon Kabushiki KaishaInventors: Chiaki Terasawa, Hiroyuki Ishii, Takashi Kato
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Patent number: 6995833Abstract: A projection optical system for projecting an image of a first object onto a second object includes a first imaging optical system that forms a first intermediate image of the first object, and includes a lens, a second imaging optical system that forms a second intermediate image of the first object, and includes a lens and a concave mirror, and a third imaging optical system that forms an image of the first object onto the second object, and includes a lens, wherein the first, second and third imaging optical systems are arranged along an optical path from the first object in this order, and 0.7<|?1·?2|<3.0 is met where ?1 is a paraxial magnification of the first imaging optical system, and ?2 is a paraxial magnification of the second imaging optical system.Type: GrantFiled: May 21, 2004Date of Patent: February 7, 2006Assignee: Canon Kabushiki KaishaInventors: Takashi Kato, Chiaki Terasawa