Patents by Inventor Chian-Sheng Chang

Chian-Sheng Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chuck for a photoresist spin coater
    Publication number: 20080029977
    Abstract: A chuck for a photoresist spin coater has a bracket and a disk. The bracket is electrically conductive. The disk is mounted on the base, holds a glass substrate and is electrically conductive. Therefore, The disk allows static electricity on the disk to discharge to protect the glass substrate from being damaged by the static electricity when the glass substrate removes from the chuck.
    Type: Application
    Filed: August 3, 2006
    Publication date: February 7, 2008
    Inventors: Jui-Chung Cheng, Chian-Sheng Chang