Patents by Inventor Chiang Ming-Tsao

Chiang Ming-Tsao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • INTEGRATED APPARATUS TO ASSURE WAFER QUALITY AND MANUFACTURABILITY
    Publication number: 20120051872
    Abstract: The present disclosure provides a system and method for processing a semiconductor substrate wherein a substrate is received at a load lock interface. The substrate is transferred from the load lock interface to a process module using a first module configured for unprocessed substrates. A manufacturing process is performed on the substrate within the process module. Thereafter, the substrate is transferred from the process module to the load lock interface using a second module configured for processed substrates.
    Type: Application
    Filed: August 26, 2010
    Publication date: March 1, 2012
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPAY, LTD.
    Inventors: Shao-Yen Ku, Chi-Ming Yang, Chiang Ming-Tsao, Yu-Fen Tzeng, Chin-Hsiang Lin