Patents by Inventor Chiara Helena Catherina Giammanco MACPHERSON

Chiara Helena Catherina Giammanco MACPHERSON has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MOVEABLE EDGE RINGS WITH REDUCED CAPACITANCE VARIATION FOR SUBSTRATE PROCESSING SYSTEMS
    Publication number: 20220270863
    Abstract: A moveable edge ring system for a plasma processing system includes a top edge ring and a first edge ring arranged below the top edge ring. A second edge ring is made of conductive material and includes an upper portion, a middle portion and a lower portion. The top edge ring and the second edge ring are configured to move in a vertical direction relative to a substrate support and the first edge ring when biased upwardly by a lift pin. The second edge ring is arranged below the top edge ring and radially outside of the first edge ring.
    Type: Application
    Filed: February 14, 2022
    Publication date: August 25, 2022
    Inventors: Christopher Kimball, Hema Swaroop Mopidevi, Saravanapriyan Sriraman, Tom A. Kamp, Darrell Ehrlich, Anthony Contreras, Chiara Helena Catherina Giammanco Macpherson
  • METHOD FOR CONDITIONING A PLASMA PROCESSING CHAMBER
    Publication number: 20210340668
    Abstract: A method for conditioning a plasma processing chamber including a chuck is provided. The method comprises a plurality of cycles, wherein each cycle comprises cleaning an interior of the plasma processing chamber and the chuck and forming a silicon oxide based coating on the interior of the plasma processing chamber and the chuck. The silicon oxide based coating has a first layer and a second layer.
    Type: Application
    Filed: September 16, 2019
    Publication date: November 4, 2021
    Inventors: Chiara Helena Catherina Giammanco MACPHERSON, Eric PAPE