Abstract: Toxic chemical substrate management systems for use in a factory having a material management system are disclosed. The toxic chemical substrate management system includes at least a server, a processing unit and a database. The server is coupled to the material management system to receive toxic chemical substrate information, comprising identification to be stored in the database. The server receives an instruction, and the processing unit manages operations of the toxic chemical substrate according to the identification and the instruction. The operations include request, use, storage and return of the toxic chemical substrate. The toxic chemical substrate management system further provides interfaces to query the stock, use volume, operating amount, type of the toxic chemical substrate, and suppliers and operating region thereof.