Patents by Inventor Chidambaram PALANIAPPAN

Chidambaram PALANIAPPAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Feed-through apparatus for a chemical vapour deposition device
    Patent number: 9279185
    Abstract: A feed-through apparatus for a chemical vapor deposition device including: a feed-through main body; a plurality of runner units; and a feed-through device rotatable with respect to the plurality of runner units within the feed-through main body. Each runner unit has a fluid inlet and an elongated runner for receiving the fluid from the fluid inlet wherein the elongated runner extends spirally on a surface of the runner unit. The feed-through device has a plurality of feed-through device orifices for receiving fluids from corresponding elongated runners during rotation of the feed-through device and has outlet-orifices for releasing the fluids into a reactor chamber.
    Type: Grant
    Filed: June 14, 2012
    Date of Patent: March 8, 2016
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Zilan Li, Teng Hock Kuah, Chidambaram Palaniappan, Ravindra Raghavendra
  • FEED-THROUGH APPARATUS FOR A CHEMICAL VAPOUR DEPOSITION DEVICE
    Publication number: 20130333620
    Abstract: A feed-through apparatus for a chemical vapor deposition device including: a feed-through main body; a plurality of runner units; and a feed-through device rotatable with respect to the plurality of runner units within the feed-through main body. Each runner unit has a fluid inlet and an elongated runner for receiving the fluid from the fluid inlet wherein the elongated runner extends spirally on a surface of the runner unit. The feed-through device has a plurality of feed-through device orifices for receiving fluids from corresponding elongated runners during rotation of the feed-through device and has outlet-orifices for releasing the fluids into a reactor chamber.
    Type: Application
    Filed: June 14, 2012
    Publication date: December 19, 2013
    Inventors: Zilan LI, Teng Hock KUAH, Chidambaram PALANIAPPAN, Ravindra RAGHAVENDRA