Abstract: Color-selective waveguides, methods for fabricating color-selective waveguides, and augmented reality (AR)/mixed reality (MR) applications including color-selective waveguides are described. The color-selective waveguides can advantageously reduce or block stray light entering a waveguide (e.g., red, green, or blue waveguide), thereby reducing or eliminating back-reflection or back-scattering into the eyepiece.

Abstract: Fabrication of augmented reality (AR) and mixed reality (MR) polymer eyepiece assemblies and the resulting AR/MR polymer eyepiece assemblies may include one or more features, separately or in any appropriate combination, to compensate for expected deformation and to maintain substantially uniform gaps between polymer layers. Such features include fabricating polymer eyepiece assemblies with components having coefficients of thermal expansion (CTE) that are substantially the same; modifying the surface chemistry or structure of one or more polymer layers to increase hydrophobicity or omniphobicity of the polymer layer; disposing adhesive between adjacent polymer layers in continuous and/or extended configurations; and disposing microspheres of different sizes at selected locations between polymer layers.

Abstract: A head-mounted, near-eye display system comprises a stack of waveguides having integral spacers separating the waveguides. The waveguides may each include diffractive optical elements that are formed simultaneously with the spacers by imprinting or casting. The spacers are disposed on one or more major surfaces of the waveguides and define a distance between immediately adjacent waveguides. Adjacent waveguides may be bonded using adhesives on the spacers. The spacers may fit within indentations of overlying waveguides. In some cases, the spacers may form one or more walls of material substantially around a perimeter of an associated waveguide. Vent holes may be provided in the walls to allow gas flow into and out from an interior volume defined by the spacers. Debris trapping structures may be provided between two walls of spacers to trap and prevent debris from entering into the interior volume.

Abstract: A method of forming a semiconductor device includes mounting a bottom wafer on a bottom chuck and mounting a top wafer on a top chuck, wherein one of the bottom chuck and the top chuck has a gasket. The top chuck is moved towards the bottom chuck. The gasket forms a sealed region between the bottom chuck and the top chuck around the top wafer and the bottom wafer. An ambient pressure in the sealed region is adjusted. The top wafer is bonded to the bottom wafer.

Abstract: Fabrication of augmented reality (AR) and mixed reality (MR) polymer eyepiece assemblies and the resulting AR/MR polymer eyepiece assemblies may include one or more features, separately or in any appropriate combination, to compensate for expected deformation and to maintain substantially uniform gaps between polymer layers. Such features include fabricating polymer eyepiece assemblies with components having coefficients of thermal expansion (CTE) that are substantially the same; modifying the surface chemistry or structure of one or more polymer layers to increase hydrophobicity or omniphobicity of the polymer layer; disposing adhesive between adjacent polymer layers in continuous and/or extended configurations; and disposing microspheres of different sizes at selected locations between polymer layers.

Abstract: A method of forming a semiconductor device includes mounting a bottom wafer on a bottom chuck and mounting a top wafer on a top chuck, wherein one of the bottom chuck and the top chuck has a gasket. The top chuck is moved towards the bottom chuck. The gasket forms a sealed region between the bottom chuck and the top chuck around the top wafer and the bottom wafer. An ambient pressure in the sealed region is adjusted. The top wafer is bonded to the bottom wafer.

Abstract: A head-mounted, near-eye display system comprises a stack of waveguides having integral spacers separating the waveguides. The waveguides may each include diffractive optical elements that are formed simultaneously with the spacers by imprinting or casting. The spacers are disposed on one or more major surfaces of the waveguides and define a distance between immediately adjacent waveguides. Adjacent waveguides may be bonded using adhesives on the spacers. The spacers may fit within indentations of overlying waveguides. In some cases, the spacers may form one or more walls of material substantially around a perimeter of an associated waveguide. Vent holes may be provided in the walls to allow gas flow into and out from an interior volume defined by the spacers. Debris trapping structures may be provided between two walls of spacers to trap and prevent debris from entering into the interior volume.

Abstract: There are provided a light guide plate, an image display device, and a method of manufacturing a light guide plate that suppress deterioration of the image quality even when the amount of a resin material cannot be strictly controlled. Provided is a light guide plate including: a diffraction grating that diffracts light; a layer thickness adjustment unit formed adjacent to the diffraction grating; and a substrate that totally internally reflects and guides light, in which the layer thickness adjustment unit includes an uneven region having a predetermined pitch or a blank region having a predetermined layer thickness, or both of the uneven region and the blank region.

Abstract: A method, includes providing a wafer including a first surface grating extending over a first area of a surface of the wafer and a second surface grating extending over a second area of the surface of the wafer; de-functionalizing a portion of the surface grating in at least one of the first surface grating area and the second surface grating area; and singulating an eyepiece from the wafer, the eyepiece including a portion of the first surface grating area and a portion of the second surface grating area. The first surface grating in the eyepiece corresponds to an input coupling grating for a head-mounted display and the second surface grating corresponds to a pupil expander grating for the head-mounted display.

Abstract: A method includes mounting a first wafer on a first wafer chuck and mounting a second wafer on a second wafer chuck. The second wafer is brought into physical contact with the first wafer. A relative distance between the first wafer and the second wafer is monitored using a distance sensor. A pressure of a vacuum zone on the second wafer chuck is controlled using feedback from the distance sensor. The bonded first wafer and second wafer are removed from the first wafer chuck.

Abstract: A method of forming a semiconductor device includes mounting a bottom wafer on a bottom chuck and mounting a top wafer on a top chuck, wherein one of the bottom chuck and the top chuck has a gasket. The top chuck is moved towards the bottom chuck. The gasket forms a sealed region between the bottom chuck and the top chuck around the top wafer and the bottom wafer. An ambient pressure in the sealed region is adjusted. The top wafer is bonded to the bottom wafer.

Abstract: A foveated display for projecting an image to an eye of a viewer is provided. The foveated display includes a first projector and a dynamic eyepiece optically coupled to the first projector. The dynamic eyepiece comprises a waveguide having a variable surface profile. The foveated display also includes a second projector and a fixed depth plane eyepiece optically coupled to the second projector.

Abstract: In an example method of forming a waveguide part having a predetermined shape, a photocurable material is dispensed into a space between a first mold portion and a second mold portion opposite the first mold portion. A relative separation between a surface of the first mold portion with respect to a surface of the second mold portion opposing the surface of the first mold portion is adjusted to fill the space between the first and second mold portions. The photocurable material in the space is irradiated with radiation suitable for photocuring the photocurable material to form a cured waveguide film so that different portions of the cured waveguide film have different rigidity. The cured waveguide film is separated from the first and second mold portions. The waveguide part is singulated from the cured waveguide film. The waveguide part corresponds to portions of the cured waveguide film having a higher rigidity than other portions of the cured waveguide film.

Abstract: In some embodiments, a head-mounted augmented reality display system comprises one or more hybrid waveguides configured to display images by directing modulated light containing image information into the eyes of a viewer. Each hybrid waveguide is formed of two or more layers of different materials. A first (e.g., thicker) layer is a highly optically transparent core layer, and a second (e.g., thinner) auxiliary layer includes a pattern of protrusions and indentations, e.g., to form a diffractive optical element. The pattern may be formed by imprinting. The hybrid waveguide may include additional layers, e.g., forming a plurality of alternating core layers and thinner patterned layers. Multiple waveguides may be stacked to form an integrated eyepiece, with each waveguide configured to receive and output light of a different component color.

Abstract: A diffractive waveguide stack includes first, second, and third diffractive waveguides for guiding light in first, second, and third visible wavelength ranges, respectively. The first diffractive waveguide includes a first material having first refractive index at a selected wavelength and a first target refractive index at a midpoint of the first visible wavelength range. The second diffractive waveguide includes a second material having a second refractive index at the selected wavelength and a second target refractive index at a midpoint of the second visible wavelength range. The third diffractive waveguide includes a third material having a third refractive index at the selected wavelength and a third target refractive index at a midpoint of the third visible wavelength range. A difference between any two of the first target refractive index, the second target refractive index, and the third target refractive index is less than 0.005 at the selected wavelength.

Abstract: A method of operating a dynamic eyepiece in an augmented reality headset includes producing first virtual content associated with a first depth plane, coupling the first virtual content into the dynamic eyepiece, and projecting the first virtual content through one or more waveguide layers of the dynamic eyepiece to an eye of a viewer. The one or more waveguide layers are characterized by a first surface profile. The method also includes modifying the one or more waveguide layers to be characterized by a second surface profile different from the first surface profile, producing second virtual content associated with a second depth plane, coupling the second virtual content into the dynamic eyepiece, and projecting the second virtual content through the one or more waveguide layers of the dynamic eyepiece to the eye of the viewer.

Abstract: A method of forming a semiconductor device includes mounting a bottom wafer on a bottom chuck and mounting a top wafer on a top chuck, wherein one of the bottom chuck and the top chuck has a gasket. The top chuck is moved towards the bottom chuck. The gasket forms a sealed region between the bottom chuck and the top chuck around the top wafer and the bottom wafer. An ambient pressure in the sealed region is adjusted. The top wafer is bonded to the bottom wafer.

Abstract: In some embodiments, a head-mounted augmented reality display system comprises one or more hybrid waveguides configured to display images by directing modulated light containing image information into the eyes of a viewer. Each hybrid waveguide is formed of two or more layers of different materials. The thicker of the layers is a highly optically transparent “core” layer, and the thinner layer comprises a pattern of protrusions and indentations to form, e.g., a diffractive optical element. The pattern may be formed by imprinting. The hybrid waveguide may include additional layers, e.g., forming a plurality of alternating core layers and thinner patterned layers. Multiple waveguides may be stacked to form an integrated eyepiece, with each waveguide configured to receive and output light of a different component color.

Abstract: A diffractive waveguide stack includes first, second, and third diffractive waveguides for guiding light in first, second, and third visible wavelength ranges, respectively. The first diffractive waveguide includes a first material having first refractive index at a selected wavelength and a first target refractive index at a midpoint of the first visible wavelength range. The second diffractive waveguide includes a second material having a second refractive index at the selected wavelength and a second target refractive index at a midpoint of the second visible wavelength range. The third diffractive waveguide includes a third material having a third refractive index at the selected wavelength and a third target refractive index at a midpoint of the third visible wavelength range. A difference between any two of the first target refractive index, the second target refractive index, and the third target refractive index is less than 0.005 at the selected wavelength.

Abstract: A method of forming a semiconductor device includes mounting a first wafer on a first wafer chuck and mounting a second wafer on a second wafer chuck. A push pin is extended through the first wafer chuck to distort the first wafer. A surface profile distortion of the first wafer is measured with a first surface profiler. A vacuum pressure of a vacuum zone on the first wafer chuck is adjusted using a measurement of the surface profile distortion. The first wafer chuck is moved towards the second wafer chuck so that the first wafer physically contacts the second wafer, and the first wafer is bonded to the second wafer.