Patents by Inventor Chien-Cheng He

Chien-Cheng He has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Compensating chemical mechanical wafer polishing apparatus and method
    Patent number: 6685543
    Abstract: A compensating chemical mechanical wafer polishing apparatus and its related polishing method, which makes end point detection easy, minimizes slurry consumption, and requires less installation space and, in which a main polishing head of diameter smaller than the wafer and a compensating polishing head are used to polish the wafer, which is upwardly disposed in contact with the polishing heads. By means of the operation of the compensating polishing head to polish the wafer over the area where the main polishing head cannot effectively evenly polish, satisfactory polishing effect is achieved.
    Type: Grant
    Filed: April 8, 2002
    Date of Patent: February 3, 2004
    Assignee: Chung Shan Institute of Science & Technology
    Inventors: Jer-Shyong Lai, Wen-Chueh Pan, Yang-Jiann Fann, Yih-Hsing Wang, Chien-Cheng He, Chaug-Liang Hsu
  • Compensating chemical mechanical wafer polishing apparatus and method
    Publication number: 20030100196
    Abstract: A compensating chemical mechanical wafer polishing apparatus and its related polishing method, which makes end point detection easy, minimizes slurry consumption, and requires less installation space and, in which a main polishing head of diameter smaller than the wafer and a compensating polishing head are used to polish the wafer, which is upwardly disposed in contact with the polishing heads. By means of the operation of the compensating polishing head to polish the wafer over the area where the main polishing head cannot effectively evenly polish, satisfactory polishing effect is achieved.
    Type: Application
    Filed: April 8, 2002
    Publication date: May 29, 2003
    Applicant: CHUNG SHAN INSTITUTE OF SCIENCE & TECHNOLOGY
    Inventors: Jer-Shyong Lai, Wen-Chueh Pan, Yang-Jiann Fann, Yih-Hsing Wang, Chien-Cheng He, Chaug-Liang Hsu