Abstract: A method of forming a semiconductor device includes forming source/drain regions on opposing sides of a gate structure, where the gate structure is over a fin and surrounded by a first dielectric layer; forming openings in the first dielectric layer to expose the source/drain regions; selectively forming silicide regions in the openings on the source/drain regions using a plasma-enhanced chemical vapor deposition (PECVD) process; and filling the openings with an electrically conductive material.

Abstract: An optical system affixed to an electronic apparatus is provided, including a first optical module, a second optical module, and a third optical module. The first optical module is configured to adjust the moving direction of a first light from a first moving direction to a second moving direction, wherein the first moving direction is not parallel to the second moving direction. The second optical module is configured to receive the first light moving in the second moving direction. The first light reaches the third optical module via the first optical module and the second optical module in sequence. The third optical module includes a first photoelectric converter configured to transform the first light into a first image signal.

Abstract: A spectrometer includes a base, a light input element, a light splitting element, an image sensor and a shading element. The light input element is disposed on the base for receiving an optical signal. The light splitting element is disposed on the base to split the received optical signal into a plurality of spectral components. The image sensor is disposed on the base, and has a sensing surface for receiving the plurality of spectral components. The sensing surface has a virtual central line extending along an arrangement direction of the plurality of spectral components. The shading element is disposed between the light splitting element and the image sensor according to an optical influence factor, and is located on a projection path of a portion of the plurality of spectral components. A shadow generated by the shading element on the sensing surface does not fall on the virtual central line.

Abstract: An optical filtering assembly comprises a first interference film and a second interference film. The first interference film comprises multiple first film layers and multiple second film layers. The first film layers and the second film layers are alternately stacked. The second interference film comprises multiple third film layers and multiple fourth film layers. The third film layers and the fourth film layers are alternately stacked. An optical constant of the first film layers is same as an optical constant of the third film layers, and an optical constant of the second film layers is same as an optical constant of the fourth film layers, and an Optical Path Difference (OPD) produced in the first interference film is different from an OPD produced in the second interference film.

Abstract: A spectrometer module and a fabrication method thereof are provided. The fabrication method includes the steps of: providing at least one substrate; and forming at least one positioning side and at least one optical component of the spectrometer on the at least one substrate by a microelectromechanical systems (MEMS) process. The spectrometer module fabricated by the fabrication method includes a plurality of substrates and at least one optical component. At least one of the substrates has at least one positioning side, and the at least one optical component of the spectrometer is formed on at least one of the substrates. The positioning side and the optical component are fabricated by a MEMS process.

Abstract: A spectrometer includes an input unit for receiving an optical signal, a diffraction grating disposed on the transmission path of the optical signal for dispersing the optical signal into a plurality of spectral rays, an image sensor disposed on the transmission path of at least a portion of the spectral rays, and a waveguide device. A waveguide space is formed between the first and second reflective surfaces of the waveguide device. The optical signal is transmitted from the input unit to the diffraction grating via the waveguide space. The portion of the spectral rays is transmitted to the image sensor via the waveguide space. At least one opening is formed on the waveguide device, and is substantially parallel to the first and/or second reflective surface. A portion of the spectral rays and/or the optical signal diffuses from the opening out of the waveguide space without reaching the image sensor.

Abstract: A spectrometer (100) and an optical input portion (32) thereof are disclosed. The optical input portion (32) comprises an assembly structure (322), and the assembly structure (322) is formed at a hole wall (321) of a through hole (3211) of the optical input portion (32). A light (L1) is incident into a dispersing element (2) of the spectrometer (100) along an optical path (13) after passing through the through hole (3211), and is dispersed by the dispersing element (2). The assembly structure (322) is used to be detachably assembled with an optical element (200). When the optical element (200) is assembled with the assembly structure (322), an optical axis of the optical element (200) is linked to the optical path (13). As a result, the light (L1) passing through the optical element (200) is incident to the dispersing element (2) along the optical axis and the optical path (13).

Abstract: A spectrometer module and a fabrication method thereof are provided. The fabrication method includes the steps of: providing at least one substrate; and forming at least one positioning side and at least one optical component of the spectrometer on the at least one substrate by a microelectromechanical systems (MEMS) process. The spectrometer module fabricated by the fabrication method includes a plurality of substrates and at least one optical component. At least one of the substrates has at least one positioning side, and the at least one optical component of the spectrometer is formed on at least one of the substrates. The positioning side and the optical component are fabricated by a MEMS process.

Abstract: A spectrometer includes an input unit for receiving an optical signal, a diffraction grating disposed on the transmission path of the optical signal for dispersing the optical signal into a plurality of spectral rays, an image sensor disposed on the transmission path of at least a portion of the spectral rays, and a waveguide device. A waveguide space is formed between the first and second reflective surfaces of the waveguide device. The optical signal is transmitted from the input unit to the diffraction grating via the waveguide space. The portion of the spectral rays is transmitted to the image sensor via the waveguide space. At least one opening is formed on the waveguide device, and is substantially parallel to the first and/or second reflective surface. A portion of the spectral rays and/or the optical signal diffuses from the opening out of the waveguide space without reaching the image sensor.

Abstract: A diffraction grating comprise a substrate and a plurality of connected diffraction structures formed on the substrate. Each diffraction structure is in the shape of a column and arranged along a concave cylindrical surface, and an axis of each diffraction structure extends along a generatrix of the concave cylindrical surface. A section contour is obtained by a cross section of the diffraction structures. The cross section is perpendicular to each axis of the diffraction structure. The section contour shows the connecting line of apexes of the diffraction structures as a reference curve having a plurality of first inflection points, wherein the diffraction structures are configured for separating the optical signal into a plurality of spectral components and focusing the spectral components onto a focal surface.

Abstract: A spectrometer module and a fabrication method thereof are provided. The fabrication method includes the steps of: providing at least one substrate; and forming at least one positioning side and at least one optical component of the spectrometer on the at least one substrate by a microelectromechanical systems (MEMS) process. The spectrometer module fabricated by the fabrication method includes a plurality of substrates and at least one optical component. At least one of the substrates has at least one positioning side, and the at least one optical component of the spectrometer is formed on at least one of the substrates. The positioning side and the optical component are fabricated by a MEMS process.

Abstract: An optical calibration method for a spectrum measurement device including a light-input part includes: measuring a plurality of narrow-band rays by the light-input part to obtain a plurality of narrow-band spectrum impulse responses, respectively; establishing a stray light database according to the narrow-band spectrum impulse responses; generating a correction program according to the stray light database; measuring a spectral radiant standard light by the light-input part to obtain measurement spectrum data; and generating a calibration coefficient program based on the measurement spectrum data and spectral radiant standard spectrum data, wherein the calibration coefficient program matches the measurement spectrum data with the spectral radiant standard spectrum data, and the spectral radiant standard spectrum data is obtained by measuring the spectral radiant standard light by a standard spectrum measurement device.

Abstract: An fabrication method of a waveguide sheet for a spectrometer includes the steps of: providing a pattern to be performed by a microelectromechanical (MEM) process; and forming at least one waveguide sheet based on the provided pattern by the MEM process. The pattern includes a shape of a first waveguide sheet. The waveguide sheet includes at least one positioning side and at least one stray light elimination side formed by the MEM process. The positioning side is for a spectral component of the spectrometer to abut against so that the spectral component is positioned at the positioning side, and the stray light elimination side is to be used as a side of a stray light outlet. The structure of the waveguide sheet and the configuration of the spectrometer are also provided.

Abstract: An optical head for receiving an incident light is provided. The optical head comprises a reflective diffuser and a reflector disposed to face the reflective diffuser. The reflective diffuser is disposed in an optical path of the incident light and shields the reflector from the incident light. The reflective diffuser converts the incident light to scattered light having a Lambertian pattern. The reflector has an optical output section that transmits the scattered light and a reflective section that reflects the scattered light to the reflective diffuser and/or the other portions of the reflective sections. An optical system using the optical head is also provided.

Abstract: An optical filtering assembly comprises a first interference film and a second interference film. The first interference film comprises multiple first film layers and multiple second film layers. The first film layers and the second film layers are alternately stacked. The second interference film comprises multiple third film layers and multiple fourth film layers. The third film layers and the fourth film layers are alternately stacked. An optical constant of the first film layers is same as an optical constant of the third film layers, and an optical constant of the second film layers is same as an optical constant of the fourth film layers, and an Optical Path Difference (OPD) produced in the first interference film is different from an OPD produced in the second interference film.

Abstract: An optical calibration method for a spectrum measurement device including a light-input part includes: measuring a plurality of narrow-band rays by the light-input part to obtain a plurality of narrow-band spectrum impulse responses, respectively; establishing a stray light database according to the narrow-band spectrum impulse responses; generating a correction program according to the stray light database; measuring a spectral radiant standard light by the light-input part to obtain measurement spectrum data; and generating a calibration coefficient program based on the measurement spectrum data and spectral radiant standard spectrum data, wherein the calibration coefficient program matches the measurement spectrum data with the spectral radiant standard spectrum data, and the spectral radiant standard spectrum data is obtained by measuring the spectral radiant standard light by a standard spectrum measurement device.

Abstract: A spectrometer module and a fabrication method thereof are provided. The fabrication method includes the steps of: providing at least one substrate; and forming at least one positioning side and at least one optical component of the spectrometer on the at least one substrate by a microelectromechanical systems (MEMS) process. The spectrometer module fabricated by the fabrication method includes a plurality of substrates and at least one optical component. At least one of the substrates has at least one positioning side, and the at least one optical component of the spectrometer is formed on at least one of the substrates. The positioning side and the optical component are fabricated by a MEMS process.

Abstract: A spectrometer includes an input unit for receiving an optical signal, a diffraction grating disposed on the transmission path of the optical signal for dispersing the optical signal into a plurality of spectral rays, an image sensor disposed on the transmission path of at least a portion of the spectral rays, and a waveguide device. A waveguide space is formed between the first and second reflective surfaces of the waveguide device. The optical signal is transmitted from the input unit to the diffraction grating via the waveguide space. The portion of the spectral rays is transmitted to the image sensor via the waveguide space. At least one opening is formed on the waveguide device, and is substantially parallel to the first and/or second reflective surface. A portion of the spectral rays and/or the optical signal diffuses from the opening out of the waveguide space without reaching the image sensor.

Abstract: A spectrometer (100) and an optical input portion (32) thereof are disclosed. The optical input portion (32) comprises an assembly structure (322), and the assembly structure (322) is formed at a hole wall (321) of a through hole (3211) of the optical input portion (32). A light (L1) is incident into a dispersing element (2) of the spectrometer (100) along an optical path (13) after passing through the through hole (3211), and is dispersed by the dispersing element (2). The assembly structure (322) is used to be detachably assembled with an optical element (200). When the optical element (200) is assembled with the assembly structure (322), an optical axis of the optical element (200) is linked to the optical path (13). As a result, the light (L1) passing through the optical element (200) is incident to the dispersing element (2) along the optical axis and the optical path (13).

Abstract: An optical head for receiving an incident light is provided. The optical head comprises a reflective diffuser and a reflector disposed to face the reflective diffuser. The reflective diffuser is disposed in an optical path of the incident light and shields the reflector from the incident light. The reflective diffuser converts the incident light to scattered light having a Lambertian pattern. The reflector has an optical output section that transmits the scattered light and a reflective section that reflects the scattered light to the reflective diffuser and/or the other portions of the reflective sections. An optical system using the optical head is also provided.