Abstract: Disclosed herewith are a lift pin assembly, a substrate support assembly having the lift pin assembly, and a method of handling a substrate. The lift pin assembly includes a pin head detachably coupled with a pin body. The elongated pin body includes a first material, and the pin head includes a second material different from the first material. The second material is softer than the first material and may have a thermal conductivity about four (4) to eight (8) times of the first material. The second material has a melting point or a sublimation point of at least 600° C.

Abstract: A package assembly includes a package substrate, an interposer module on the package substrate, and a package lid on the interposer module and attached to the package substrate. The package lid includes an outer lid including an outer lid material and including an outer lid plate portion. The package lid further includes an inner lid including an inner lid material different than the outer lid material and including an inner lid plate portion attached to a bottom surface of the outer lid plate portion.

Abstract: The present disclosure relates to lift pins that include an opening, and related components and chamber kits, for disposition in processing chambers for semiconductor manufacturing. In one or more embodiments, a processing chamber applicable for use in semiconductor manufacturing includes a chamber body and a window. The processing chamber includes one or more heat sources, a substrate support, and a plurality of lift pins disposed in a processing volume. The plurality of lift pins respectively include a shaft section having a first outer dimension, a head section having a second outer dimension, and an opening formed in the shaft section. The opening has a dimension that is a first ratio that is at least 0.3 of the first outer dimension of the shaft section. The dimension of the opening is a second ratio that is at least 0.2 of the second outer dimension of the head section.

Abstract: Disclosed herein are a gas delivery module, a processing chamber, and a method for depositing a film on a substrate. In one example, a gas delivery module is provided that includes a deposition precision flow device (PFD) flow controller, a carrier PFD flow controller, and a plurality of mass flow controllers (MFCs). The deposition PFD flow controller is configured to control a flow of a deposition gas through a plurality of outlets. The carrier PFD flow controller is configured to control a flow of a carrier gas through a plurality of outlets. The first MFC of the plurality of MFCs includes a first inlet and an outlet. The first inlet of the first MFC is fluidly coupled to a first outlet of the plurality of outlets of the deposition PFD and to a first outlet of the plurality of outlets of the carrier PFD. The second MFC of the plurality of MFCs includes a second inlet and an outlet.

Abstract: A portable nebulizer and a shutdown method of the portable nebulizer are provided. The portable nebulizer includes a medicine storage device, a sensing device, a nebulization device, a driving device and a processing device. The medicine storage device is configured to contain predetermined medical fluid. The sensing device is located in the medicine storage device. The nebulization device is configured to nebulize the predetermined medical fluid and simultaneously transmit a sensing signal to the sensing device. The driving device is electrically connected to the nebulization device and transmits a driving signal to the nebulization device. The processing device is electrically connected to the sensing device and the driving device, and collects electrical information of the sensing signal and electrical information of the driving signal to calculate medical fluid volume indication information.

Abstract: A nebulizer includes a host, a cup body, a nozzle assembly, a nebulizing module, and an optical sensing module. The host has a detection hole. The cup body is disposed on a top of the host. The nozzle assembly is disposed on the cup body. The nozzle assembly has a nozzle. The nebulizing module is disposed on the cup body. The optical sensing module includes an optical sensor and a membrane structure. The optical sensor is disposed inside the host. The membrane structure is disposed in the detection hole, and the membrane structure blocks between the nozzle and the optical sensor. When a user inhales against the nozzle, the membrane structure is deformed by a pressure difference generated inside the nozzle, and the optical sensor is used to detect a deformation amount of the membrane structure.

Abstract: An aerosol amount detection method and a nebulizer are provided. The aerosol amount detection method includes: continuously emitting, by a light detection circuit, a plurality of light signals to an aerosol path of the nebulizer for obtaining a plurality of light intensity values; calculating, by a control circuit, an aerosol amount index of the aerosol path according to the plurality of light intensity values; and outputting, by the control circuit, a warning signal when the aerosol amount index continues to be less than a stop threshold for a first check time.

Abstract: A nebulizer including a host having a head portion, a cup body having a nebulizing module disposed on a bottom thereof, an engaging member, a mouthpiece having a first opening, a second opening, and a tongue plate, and a sensor element is provided. The engaging member includes a first, a second, and a third engaging opening communicated with one another. The cup body is coupled to the engaging member through the first engaging opening. The engaging member, inside which a first partition wall is disposed, is coupled to the host through having the third engaging opening engaged with the head portion. The mouthpiece is coupled to the engaging member through having the second opening engaged with the second engaging opening. The tongue plate, disposed inside the mouthpiece and abuts against the first partition wall, divides an inner space of the mouthpiece into a first and a second channel.

Abstract: An atomization device and a method of predicting atomization time for the same are provided. The atomization device includes a control module, an atomization module and a breathing sensing module. The method includes: configuring the breath sensing module to detect inhalations of a user using the atomization device, so as to generate initial breath data correspondingly; and configuring the control module to perform: comparing inhalation data of the initial breath data with a valid inhalation standard to obtain valid inhalation data and filter noise; statistically analyzing the valid inhalation data to generate a predicted value of inhalation time; calculating an atomization time according to the predicted value of the inhalation time; and generating a driving signal to drive the atomization module to perform atomization according to the atomization time.

Abstract: A method of moving a susceptor in a processing system, suitable for use in semiconductor processing, is provided. The method includes: moving a first susceptor from an interior volume of a first enclosure to an interior volume of a process chamber during a first time period; and positioning, during a second time period, a first substrate on the first susceptor when the first susceptor is in the process chamber, wherein the interior volume of the first enclosure and interior volume of the process chamber are maintained at a non-atmospheric pressure from the beginning of the first time period until the end of the second time period.

Abstract: A cleaning process monitoring system, comprising: a cleaning container comprising an inlet for receiving a cleaning solution and an outlet for draining a waste solution; a particle detector coupled to the outlet and configured to measure a plurality of particle parameters associated with the waste solution so as to provide a real-time monitoring of the cleaning process; a pump coupled to the cleaning container and configured to provide suction force to draw solution through the cleaning system; a controller coupled to the pump and the particle detector and configured to receive the plurality of particle parameters from the particle detector and to provide control to the cleaning system; and a host computer coupled to the controller and configured to provide at least one control parameter to the controller.

Abstract: A package assembly includes a package substrate, an interposer module on the package substrate, and a package lid on the interposer module and attached to the package substrate. The package lid includes an outer lid including an outer lid material and including an outer lid plate portion. The package lid further includes an inner lid including an inner lid material different than the outer lid material and including an inner lid plate portion attached to a bottom surface of the outer lid plate portion.

Abstract: A portable nebulizer and a vertical-type medicine containing and nebulizing assembly thereof are provided. The vertical-type medicine containing and nebulizing assembly includes a medicine storage module, a nebulizing module and an induction module. The nebulizing module includes a nebulizing device and a first conductive structure. The induction module includes a metal induction element disposed in the medicine storage module and a second conductive structure electrically connected to the metal induction element. The medicine storage casing has an inner surrounding area located in the medicine storage space. The metal induction element has an exposed induction portion exposed on the inner surrounding area for receiving a signal generated by the nebulizing device. Therefore, when a predetermined medicinal liquid contained in the medicine storage space is nebulized through the nebulizing device, the signal generated by the nebulizing device can be transmitted to a microprocessor through the induction module.

Abstract: A nebulizer including a host having a head portion, a cup body having a nebulizing module disposed on a bottom thereof, an engaging member, a mouthpiece having a first opening, a second opening, and a tongue plate, and a sensor element is provided. The engaging member includes a first, a second, and a third engaging opening communicated with one another. The cup body is coupled to the engaging member through the first engaging opening. The engaging member, inside which a first partition wall is disposed, is coupled to the host through having the third engaging opening engaged with the head portion. The mouthpiece is coupled to the engaging member through having the second opening engaged with the second engaging opening. The tongue plate, disposed inside the mouthpiece and abuts against the first partition wall, divides an inner space of the mouthpiece into a first and a second channel.

Abstract: A cleaning process monitoring system, comprising: a cleaning container comprising an inlet for receiving a cleaning solution and an outlet for draining a waste solution; a particle detector coupled to the outlet and configured to measure a plurality of particle parameters associated with the waste solution so as to provide a real-time monitoring of the cleaning process; a pump coupled to the cleaning container and configured to provide suction force to draw solution through the cleaning system; a controller coupled to the pump and the particle detector and configured to receive the plurality of particle parameters from the particle detector and to provide control to the cleaning system; and a host computer coupled to the controller and configured to provide at least one control parameter to the controller.

Abstract: A cleaning process monitoring system, comprising: a cleaning container comprising an inlet for receiving a cleaning solution and an outlet for draining a waste solution; a particle detector coupled to the outlet and configured to measure a plurality of particle parameters associated with the waste solution so as to provide a real-time monitoring of the cleaning process; a pump coupled to the cleaning container and configured to provide suction force to draw solution through the cleaning system; a controller coupled to the pump and the particle detector and configured to receive the plurality of particle parameters from the particle detector and to provide control to the cleaning system; and a host computer coupled to the controller and configured to provide at least one control parameter to the controller.

Abstract: An atomizing system and device having a double authentication mechanism are provided. The system includes at least one atomizing drug container, an atomizing device and a user device. The at least one atomized medicine container associates with an authentication code carrier and contains the atomized medicine. The atomizing device includes an atomizing module, a power module, a control unit, a first communication module. The second communication module of the user device is configured to be paired with the first communication module and connected with a cloud server through the network, and the authentication module of the user device is configured to perform an authentication operation associated with the authentication code carrier to determine the authenticity of the at least one atomized medicine container or the atomized medicine through the cloud server and generate an authentication result signal correspondingly.

Abstract: A nebulizer utilizing a nozzle assembly includes a main conduit and an air pressure duct. The main conduit is disposed on the nebulizer and has an inner surface and an outer surface. The main conduit has an atomizing opening. The air pressure duct is disposed on one of the inner surface and the outer surface of the main conduit, and has a connecting opening connected to the sensor and a detecting opening that is exposed and adjacent to the atomizing opening. The sensor is disposed inside the nebulizer and determines a pressure change of the atomizing opening by detecting the pressure of the detecting opening. The nebulizer includes an atomizing module and a controlling module electrically connected to the atomizing module and the sensor, and the controlling module determines whether the atomizing module should be turned on based on the pressure change of the atomizing opening detected by the sensor.

Abstract: The present invention provides an atomizing method having an authentication mechanism, including the following steps: placing an atomized medicine contained in at least one atomized medicine container into an accommodating portion of an atomizing device; configuring an authentication module of an atomizing device to perform an authentication operation related to the authentication code carrier associated with the at least one atomized medicine container to determine the authenticity of the at least one atomized medicine container, and generate the authentication result signal correspondingly; and configuring the control unit of the atomization device to determine to determine whether to control the first power module connected to the atomization module to output a first driving voltage according to the authentication result signal.

Abstract: The present invention provides an atomizing system and device having a single authentication mechanism. The system includes at least one atomizing drug container and an atomizing device. The at least one atomized medicine container associates with an authentication code carrier and contains the atomized medicine. The atomizing device includes an atomizing module, a first power module, a control unit, an antenna module and an authentication module. The authentication module is configured to perform an authentication operation associated with the authentication code carrier to determine the authenticity of the at least one atomized medicine container or the atomized medicine and to generate an authentication result signal correspondingly.