Abstract: An electronic device is provided. The electronic device includes a base and a conductive layer that is disposed on the base and patterned by a plurality of processes. The plurality of processes include providing a mask substrate. The mask substrate includes a first substrate and a patterned substrate. In the cross-sectional view, the width of the first substrate is greater than or equal to the width of the patterned substrate. The plurality of processes include arranging the mask substrate and the base correspondingly. The plurality of processes also include performing exposure and development processes on the conductive layer for patterning the conductive layer, and removing the mask substrate.

Abstract: An antenna module includes a first antenna radiator including a feeding terminal, a second antenna radiator, a first ground radiator, a second ground radiator and a capacitive element. The second antenna radiator is disposed on one side of the first antenna radiator, and a first gap is formed between a main portion of the second antenna radiator and the first antenna radiator. The first ground radiator is disposed on another side of the first antenna radiator, and a second gap is formed between the first antenna radiator and the first antenna radiator. The second ground radiator is disposed between the second antenna radiator and the first ground radiator, and a third gap is formed between the second ground radiator and a first branch of the second antenna radiator. The capacitive element is disposed on the third gap and connects the second antenna radiator and the second ground radiator.

Abstract: A method for making a novel structure having borderless and self-aligned polysilicon and metal contact landing plugs for multilevel interconnections on integrated circuits is achieved. An etch-stop layer and a planar insulating layer are formed over the devices on a substrate. Contact openings are etched in the insulating layer to the etch-stop layer and the etch-stop layer is removed over the N− contact areas. An N+ doped polysilicon layer is deposited, and second contact openings are etched in the polysilicon and insulating layers over N+ and P+ contacts on the substrate to the etch-stop layer. The etch-stop layer is selectively removed and a conducting barrier layer and a metal layer are deposited having a second etch-stop layer on the surface. The layers are patterned to form interconnecting lines and concurrently to form polysilicon landing plugs to the N− contacts, while forming metal landing plugs to the N+ and P+ contacts.

Abstract: A method for fabricating self-aligned contacts using elevated trench isolation, selective contact plug deposition and planarization starting at the device level. The process begins by successively forming a gate oxide layer and a first gate electrode layer on a silicon substrate. Next, fully planarized trench isolation regions are formed using sacrificial oxide and nitride layers and selective etching. A sacrificial pad oxide layer and a first sacrificial nitride layer are formed. The first sacrificial nitride layer, the sacrificial pad oxide layer, the first gate electrode layer, the gate oxide layer, and the silicon substrate are patterned to form trenches. A fill oxide layer is deposited in the trenches and over the first sacrificial nitride layer. An oxide etch is performed which recesses the fill oxide layer in the trenches below the level of the top of the first nitride layer. A second sacrificial nitride layer is formed on the fill oxide layer and over the first sacrificial nitride layer.

Abstract: A method for making a novel structure having borderless and self-aligned polysilicon and metal contact landing plugs for multilevel interconnections on integrated circuits is achieved. An etch-stop layer and a planar insulating layer are formed over the devices on a substrate. Contact openings are etched in the insulating layer to the etch-stop layer and the etch-stop layer is removed over the N.sup.- contact areas. An N.sup.+ doped polysilicon layer is deposited, and second contact openings are etched in the polysilicon and insulating layers over N.sup.+ and P.sup.+ contacts on the substrate to the etch-stop layer. The etch-stop layer is selectively removed and a conducting barrier layer and a metal layer are deposited having a second etch-stop layer on the surface. The layers are patterned to form interconnecting lines and concurrently to form polysilicon landing plugs to the N.sup.- contacts, while forming metal landing plugs to the N.sup.+ and P.sup.+ contacts.