Abstract: Some embodiments of the present disclosure relate to a processing tool. The tool includes a housing enclosing a processing chamber, and an input/output port configured to pass a wafer through the housing into and out of the processing chamber. A back-side macro-inspection system is arranged within the processing chamber and is configured to image a back side of the wafer. A front-side macro-inspection system is arranged within the processing chamber and is configured to image a front side of the wafer according to a first image resolution. A front-side micro-inspection system is arranged within the processing chamber and is configured to image the front side of the wafer according to a second image resolution which is higher than the first image resolution.

Abstract: A swinging decoration of wind exit, including: a main body having a wind passage. A fan rotatably connected with the main body and disposed in the wind passage thereof. At least one swinging member pivotally mounted on the main body, the swinging member having a driven section. A driving cam plate fitted on a rotary shaft of the fan and rotatable along with the fan. The driving cam plate serves to drive the driven section of the swinging member and swing the swinging member to simulate swinging movement of an insect's wings.

Abstract: A swinging decoration of wind exit, includes a fan unit including a housing formed with an axial wind-guiding passage. A fan being pivotally mounted in the wind-guiding passage. A swinging member pivotally connected to an outer circumference of the housing. A driving mechanism installed between a rotary shaft of the fan and the swinging member and drivable by the fan to drive the swinging member to reciprocally swing up and down. The swinging member has a projecting fixing plate formed with fixing pins. The fixing pins can be inserted in corresponding pinholes of a pressboard. A decorative plate is tightly replaceably clamped and sandwiched between the fixing plate and the pressboard. The swinging decoration can present various configurations such as flying butterfly, bee, bird, etc.