Abstract: Some embodiments of the present disclosure relate to a processing tool. The tool includes a housing enclosing a processing chamber, and an input/output port configured to pass a wafer through the housing into and out of the processing chamber. A back-side macro-inspection system is arranged within the processing chamber and is configured to image a back side of the wafer. A front-side macro-inspection system is arranged within the processing chamber and is configured to image a front side of the wafer according to a first image resolution. A front-side micro-inspection system is arranged within the processing chamber and is configured to image the front side of the wafer according to a second image resolution which is higher than the first image resolution.

Abstract: A high performance and integrated nosocomial infection control surveillance and detection system includes a patient database having a patient information, a clinical database having a patient clinical information, a nosocomial infection surveillance model with capability to detect suspected cases, an infection monitoring dashboard presenting an integrated view of a patient information and infection conditions in the clinical database for each patient. The patient database, clinical database, nosocomial infection surveillance model and the infection monitoring dashboard are built in different network servers or a network server to meet the optimum efficiency for a user to conduct infection control and early detection of infected cases through his/her account.