Patents by Inventor Chien-Wen Chu

Chien-Wen Chu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9691874
    Abstract: A manufacturing method of a semiconductor structure provides a substrate. A well having a first conductive type and a well having a second conductive type are formed in the substrate, respectively. A body region is formed in the well having the second conductive type. A first doped region and a second doped region are formed in the well having the first conductive type and the body region respectively. The first and second doped regions have same polarities, and a dopant concentration of the second doped region is higher than that of the first doped region. A third doped region is formed in the well having the second conductive type and between the first and second doped regions. The third and first doped regions have reverse polarities. A first field plate is formed on a surface region between the second and third doped regions.
    Type: Grant
    Filed: March 9, 2015
    Date of Patent: June 27, 2017
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Chih-Ling Hung, Chien-Wen Chu, Hsin-Liang Chen, Wing-Chor Chan
  • Publication number: 20150179754
    Abstract: A semiconductor structure includes a substrate, a first well having a first conductive type, a second well having a second conductive type, a body region, a first doped region, a second doped region, a third doped region and a field plate. The first and second wells are formed in the substrate. The body region is formed in the second well. The first and second doped regions are formed in the first well and the body region, respectively. The second and first doped regions have the same polarities, and the dopant concentration of the second doped region is higher than that of the first doped region. The third doped region is formed in the second well and located between the first and second doped regions. The third and first doped regions have reverse polarities. The field plate is formed on the surface region between the first and second doped regions.
    Type: Application
    Filed: March 9, 2015
    Publication date: June 25, 2015
    Inventors: Chih-Ling Hung, Chien-Wen Chu, Hsin-Liang Chen, Wing-Chor Chan
  • Patent number: 9064955
    Abstract: A semiconductor device includes a source region, a drain region, and a drift region between the source and drain regions. A split gate is disposed over a portion of the drift region, and between the source and drain regions. The split gate includes first and second gate electrodes separated by a gate oxide layer. A self-aligned RESURF region is disposed within the drift region between the gate and the drain region. PI gate structures including an upper polysilicon layer are disposed near the drain region, such that the upper polysilicon layer can serve as a hard mask for the formation of the double RESURF structure, thereby allowing for self-alignment of the double RESURF structure.
    Type: Grant
    Filed: November 11, 2013
    Date of Patent: June 23, 2015
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Chien-Wen Chu, Wing-Chor Chan, Shyi-Yuan Wu
  • Patent number: 9029952
    Abstract: A semiconductor structure includes a substrate, a first well having a first conductive type, a second well having a second conductive type, a body region, a first doped region, a second doped region, a third doped region and a field plate. The first and second wells are formed in the substrate. The body region is formed in the second well. The first and second doped regions are formed in the first well and the body region, respectively. The second and first doped regions have the same polarities, and the dopant concentration of the second doped region is higher than that of the first doped region. The third doped region is formed in the second well and located between the first and second doped regions. The third and first doped regions have reverse polarities. The field plate is formed on the surface region between the first and second doped regions.
    Type: Grant
    Filed: April 19, 2012
    Date of Patent: May 12, 2015
    Assignee: Macronix International Co., Ltd.
    Inventors: Chih-Ling Hung, Chien-Wen Chu, Hsin-Liang Chen, Wing-Chor Chan
  • Patent number: 9029950
    Abstract: A semiconductor structure and a method for forming the same are provided. The semiconductor structure comprises a substrate, a first source/drain region, a second source/drain region, a first stack structure and a second stack structure. The first source/drain region is formed in the substrate. The second source/drain region is formed in the substrate. The first stack structure is on the substrate between the first source/drain region and the second source/drain region. The first stack structure comprises a first dielectric layer and a first conductive layer on the first dielectric layer. The second stack structure is on the first stack structure. The second stack structure comprises a second dielectric layer and a second conductive layer on the second dielectric layer.
    Type: Grant
    Filed: March 20, 2012
    Date of Patent: May 12, 2015
    Assignee: Macronix International Co., Ltd.
    Inventors: Chien-Wen Chu, Wing-Chor Chan, Shyi-Yuan Wu
  • Patent number: 8716825
    Abstract: A semiconductor structure and a manufacturing method for the same are provided. The semiconductor structure includes a well region, a dielectric structure, a first doped layer, a second doped layer and a first doped region. The dielectric structure is on the well region. The dielectric structure has a first dielectric sidewall and a second dielectric sidewall opposite to each other. The dielectric structure includes a first dielectric portion and a second dielectric portion, between the first dielectric sidewall and the second dielectric sidewall. The first doped layer is on the well region between the first dielectric portion and the second dielectric portion. The second doped layer is on the first doped layer. The first doped region is in the well region on the first dielectric sidewall.
    Type: Grant
    Filed: June 22, 2011
    Date of Patent: May 6, 2014
    Assignee: Macronix International Co., Ltd.
    Inventors: Wing-Chor Chan, Chung-Yu Hung, Chien-Wen Chu
  • Patent number: 8669639
    Abstract: A semiconductor element, a manufacturing method thereof and an operating method thereof are provided. The semiconductor element includes a substrate, a first well, a second well, a third well, a fourth well, a bottom layer, a first heavily doping region, a second heavily doping region, a third heavily doping region and a field plane. The first well, the bottom layer and the second well surround the third well for floating the third well and the substrate. The first, the second and the third heavily doping regions are disposed in the first, the second and the third wells respectively. The field plate is disposed above a junction between the first well and the fourth well.
    Type: Grant
    Filed: June 11, 2012
    Date of Patent: March 11, 2014
    Assignee: Macronix International Co., Ltd.
    Inventors: Chih-Ling Hung, Chien-Wen Chu, Hsin-Liang Chen, Wing-Chor Chan
  • Publication number: 20140061790
    Abstract: A semiconductor device includes a source region, a drain region, and a drift region between the source and drain regions. A split gate is disposed over a portion of the drift region, and between the source and drain regions. The split gate includes first and second gate electrodes separated by a gate oxide layer. A self-aligned RESURF region is disposed within the drift region between the gate and the drain region. PI gate structures including an upper polysilicon layer are disposed near the drain region, such that the upper polysilicon layer can serve as a hard mask for the formation of the double RESURF structure, thereby allowing for self-alignment of the double RESURF structure.
    Type: Application
    Filed: November 11, 2013
    Publication date: March 6, 2014
    Inventors: Chien-Wen CHU, Wing-Chor CHAN, Shyi-Yuan WU
  • Patent number: 8610206
    Abstract: A semiconductor device comprises a source region, a drain region, and a drift region between the source and drain regions. A split gate is disposed over a portion of the drift region, and between the source and drain regions. The split gate includes first and second gate electrodes separated by a gate oxide layer. A self-aligned RESURF region is disposed within the drift region between the gate and the drain region. PI gate structures including an upper polysilicon layer are disposed near the drain region, such that the upper polysilicon layer can serve as a hard mask for the formation of the double RESURF structure, thereby allowing for self-alignment of the double RESURF structure.
    Type: Grant
    Filed: February 18, 2011
    Date of Patent: December 17, 2013
    Assignee: Macronix International Co., Ltd.
    Inventors: Chien-Wen Chu, Wing-Chor Chan, Shyi-Yuan Wu
  • Publication number: 20130328170
    Abstract: A semiconductor element, a manufacturing method thereof and an operating method thereof are provided. The semiconductor element includes a substrate, a first well, a second well, a third well, a fourth well, a bottom layer, a first heavily doping region, a second heavily doping region, a third heavily doping region and a field plane. The first well, the bottom layer and the second well surround the third well for floating the third well and the substrate. The first, the second and the third heavily doping regions are disposed in the first, the second and the third wells respectively. The field plate is disposed above a junction between the first well and the fourth well.
    Type: Application
    Filed: June 11, 2012
    Publication date: December 12, 2013
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Chih-Ling Hung, Chien-Wen Chu, Hsin-Liang Chen, Wing-Chor Chan
  • Publication number: 20130277805
    Abstract: A semiconductor structure includes a substrate, a first well having a first conductive type, a second well having a second conductive type, a body region, a first doped region, a second doped region, a third doped region and a field plate. The first and second wells are formed in the substrate. The body region is formed in the second well. The first and second doped regions are formed in the first well and the body region, respectively. The second and first doped regions have the same polarities, and the dopant concentration of the second doped region is higher than that of the first doped region. The third doped region is formed in the second well and located between the first and second doped regions. The third and first doped regions have reverse polarities. The field plate is formed on the surface region between the first and second doped regions.
    Type: Application
    Filed: April 19, 2012
    Publication date: October 24, 2013
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Chih-Ling Hung, Chien-Wen Chu, Hsin-Liang Chen, Wing-Chor Chan
  • Publication number: 20130249007
    Abstract: A semiconductor structure and a method for forming the same are provided. The semiconductor structure comprises a substrate, a first source/drain region, a second source/drain region, a first stack structure and a second stack structure. The first source/drain region is formed in the substrate. The second source/drain region is formed in the substrate. The first stack structure is on the substrate between the first source/drain region and the second source/drain region. The first stack structure comprises a first dielectric layer and a first conductive layer on the first dielectric layer. The second stack structure is on the first stack structure. The second stack structure comprises a second dielectric layer and a second conductive layer on the second dielectric layer.
    Type: Application
    Filed: March 20, 2012
    Publication date: September 26, 2013
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Chien-Wen Chu, Wing-Chor Chan, Shyi-Yuan Wu
  • Patent number: 8525261
    Abstract: A semiconductor device comprises a source region, a drain region, and a drift region between the source and drain regions. A split gate is disposed over a portion of the drift region, and between the source and drain regions. The split gate includes first and second gate electrodes separated by a gate oxide layer. A super-junction structure is disposed within the drift region between the gate and the drain region.
    Type: Grant
    Filed: November 23, 2010
    Date of Patent: September 3, 2013
    Assignee: Macronix International Co., Ltd.
    Inventors: Shyi-Yuan Wu, Wing Chor Chan, Chien-Wen Chu
  • Patent number: 8482066
    Abstract: A semiconductor device and a manufacturing method for the same are provided. The semiconductor device comprises a first doped region, a second doped region, a dielectric structure and a gate structure. The first doped region has a first type conductivity. The second doped region has a second type conductivity opposite to the first type conductivity and is adjacent to the first doped region. The dielectric structure comprises a first dielectric portion and a second dielectric portion separated from each other. The dielectric structure is formed on the first doped region. The gate structure is on a part of the first doped region or second doped region adjacent to the first dielectric portion.
    Type: Grant
    Filed: September 2, 2011
    Date of Patent: July 9, 2013
    Assignee: Macronix International Co., Ltd.
    Inventors: Chien-Wen Chu, Wing-Chor Chan, Shyi-Yuan Wu
  • Publication number: 20130056824
    Abstract: A semiconductor device and a manufacturing method for the same are provided. The semiconductor device comprises a first doped region, a second doped region, a dielectric structure and a gate structure. The first doped region has a first type conductivity. The second doped region has a second type conductivity opposite to the first type conductivity and is adjacent to the first doped region. The dielectric structure comprises a first dielectric portion and a second dielectric portion separated from each other. The dielectric structure is formed on the first doped region. The gate structure is on a part of the first doped region or second doped region adjacent to the first dielectric portion.
    Type: Application
    Filed: September 2, 2011
    Publication date: March 7, 2013
    Applicant: Macronix International Co., Ltd.
    Inventors: Chien-Wen Chu, Wing-Chor Chan, Shyi-Yuan Wu
  • Patent number: 8362558
    Abstract: A lateral-double diffused MOS device is provided. The device includes: a first well having a first conductive type and a second well having a second conductive type disposed in a substrate and adjacent to each other; a drain and a source regions having the first conductive type disposed in the first and the second wells, respectively; a field oxide layer (FOX) disposed on the first well between the source and the drain regions; a gate conductive layer disposed over the second well between the source and the drain regions extending to the FOX; a gate dielectric layer between the substrate and the gate conductive layer; a doped region having the first conductive type in the first well below a portion of the gate conductive layer and the FOX connecting to the drain region. A channel region is defined in the second well between the doped region and the source region.
    Type: Grant
    Filed: May 4, 2011
    Date of Patent: January 29, 2013
    Assignee: MACRONIX International Co., Ltd.
    Inventors: Hsueh-I Huang, Chien-Wen Chu, Cheng-Chi Lin, Shih-Chin Lien, Chin-Pen Yeh, Shyi-Yuan Wu
  • Publication number: 20120326261
    Abstract: A semiconductor structure and a manufacturing method for the same are provided. The semiconductor structure includes a well region, a dielectric structure, a first doped layer, a second doped layer and a first doped region. The dielectric structure is on the well region. The dielectric structure has a first dielectric sidewall and a second dielectric sidewall opposite to each other. The dielectric structure includes a first dielectric portion and a second dielectric portion, between the first dielectric sidewall and the second dielectric sidewall. The first doped layer is on the well region between the first dielectric portion and the second dielectric portion. The second doped layer is on the first doped layer. The first doped region is in the well region on the first dielectric sidewall.
    Type: Application
    Filed: June 22, 2011
    Publication date: December 27, 2012
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Wing-Chor Chan, Chung-Yu Hung, Chien-Wen Chu
  • Publication number: 20120211832
    Abstract: A semiconductor device comprises a source region, a drain region, and a drift region between the source and drain regions. A split gate is disposed over a portion of the drift region, and between the source and drain regions. The split gate includes first and second gate electrodes separated by a gate oxide layer. A self-aligned RESURF region is disposed within the drift region between the gate and the drain region. PI gate structures including an upper polysilicon layer are disposed near the drain region, such that the upper polysilicon layer can serve as a hard mask for the formation of the double RESURF structure, thereby allowing for self-alignment of the double RESURF structure.
    Type: Application
    Filed: February 18, 2011
    Publication date: August 23, 2012
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Chien-Wen CHU, Wing-Chor CHAN, Shyi-Yuan WU
  • Publication number: 20120126323
    Abstract: A semiconductor device comprises a source region, a drain region, and a drift region between the source and drain regions. A split gate is disposed over a portion of the drift region, and between the source and drain regions. The split gate includes first and second gate electrodes separated by a gate oxide layer. A super-junction structure is disposed within the drift region between the gate and the drain region.
    Type: Application
    Filed: November 23, 2010
    Publication date: May 24, 2012
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Shyi-Yuan Wu, Wing Chor Chan, Chien-Wen Chu
  • Publication number: 20120104492
    Abstract: The present invention relates to a low on-resistance RESURF MOS transistor, comprising: a drift region; two isolation regions formed on the drift region; a first-doping-type layer disposed between the two isolation regions; and a second-doping-type layer disposed below the first-doping-type layer.
    Type: Application
    Filed: October 29, 2010
    Publication date: May 3, 2012
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Chien-Wen CHU, Wing-Chor CHAN, Shyi-Yuan WU