Abstract: EUV masks and methods of fabrication thereof are described herein. An exemplary method includes receiving an EUV mask having a multilayer structure, a capping layer disposed over the multilayer structure, a patterned absorber layer disposed over the capping layer, and a patterned hard mask disposed over the patterned absorber layer. The method further includes removing the patterned hard mask by performing a first etching process to partially remove the patterned hard mask and performing a second etching process to remove a remainder of the patterned hard mask. The first etching process uses a first etchant, and the second etching process uses a second etchant. The second etchant is different than the first etchant. In some embodiments, the first etchant is a halogen-based plasma (e.g., a Cl2 plasma), and the second etchant is a halogen-and-oxygen-based plasma (e.g., a Cl2+O2 plasma).

Abstract: A gas compression system is provided. The gas compression system includes a compressor, an adsorption device, and a fluid control device. The compressor includes a first port and a second port. The adsorption device is adapted to output the high pressure hydrogen gas to the first port and absorb the low pressure hydrogen gas from the second port. The adsportion includes a first container connected to the first port or the second port, and a second container connected to the first port or the second port. The first container and the second container includes a hydrogen adsorption material adapted to release the high pressure hydrogen gas when heated, and absorb the low pressure hydrogen gas when cooled. A method of using the gas compression system is also provided.

Abstract: A leak hydrogen absorbing device is provided and includes an absorbing tank, having a gas inlet and a gas outlet; a spacer, disposed inside the absorbing tank, and partitioning an interior of the absorbing tank into multiple spaces; a hydrogen absorbing material, disposed in the spaces; a connecting tube, disposed on the spacer, and connecting the spaces; a pump, pumping a hydrogen-containing gas leaked in a closed environment to the absorbing tank through the gas inlet to be flowed through the spaces inside the absorbing tank, so that the hydrogen gas contained in the hydrogen-containing gas is absorbed by the hydrogen absorbing material; and a depressurizing portion, disposed at a terminal end of the absorbing tank, and storing a hydrogen-free gas passed through the hydrogen absorbing material. The hydrogen-free gas is discharged through the gas outlet when reaching a predetermined pressure.

Abstract: An adsorption material is provided, which includes a graphene scroll of a graphene sheet wrapping along an axis. The graphene scroll has a spiral shape at a cross-section perpendicular to the axis. A modifier is grafted on an interlayer and outside of the graphene scroll, and the modifier has a hydrophilic group.

Abstract: A gas compression system is provided. The gas compression system includes a compressor, an adsorption device, and a fluid control device. The compressor includes a first port and a second port. The adsorption device is adapted to output the high pressure hydrogen gas to the first port and absorb the low pressure hydrogen gas from the second port. The adsportion includes a first container connected to the first port or the second port, and a second container connected to the first port or the second port. The first container and the second container includes a hydrogen adsorption material adapted to release the high pressure hydrogen gas when heated, and absorb the low pressure hydrogen gas when cooled. A method of using the gas compression system is also provided.

Abstract: A leak hydrogen absorbing device is provided and includes an absorbing tank, having a gas inlet and a gas outlet; a spacer, disposed inside the absorbing tank, and partitioning an interior of the absorbing tank into multiple spaces; a hydrogen absorbing material, disposed in the spaces; a connecting tube, disposed on the spacer, and connecting the spaces; a pump, pumping a hydrogen-containing gas leaked in a closed environment to the absorbing tank through the gas inlet to be flowed through the spaces inside the absorbing tank, so that the hydrogen gas contained in the hydrogen-containing gas is absorbed by the hydrogen absorbing material; and a depressurizing portion, disposed at a terminal end of the absorbing tank, and storing a hydrogen-free gas passed through the hydrogen absorbing material. The hydrogen-free gas is discharged through the gas outlet when reaching a predetermined pressure.

Abstract: Disclosed is a method of forming a hydrogen storage composite, including uniformly covering catalyst particles on the surface of a support to form a hybrid catalyst, and embedding the hybrid catalyst on the surface of a hydrogen storage material to form a hydrogen storage composite. Furthermore, the disclosed also provides a method for manufacturing the same.

Abstract: A hydrogen storage composite and a method of forming the same are provided. The hydrogen storage composite includes a catalyst mixed with a hydrogen storage base material and a transition metal for catalyzing hydrogen desorption embedded on the surfaces of the hydrogen storage base material and the catalyst. The method includes providing at least one active metal and performing a lengthy time ball mill process to form a catalyst, providing a hydrogen storage base material to mix with the catalyst and performing a lengthy time ball mill process to form a hydrogen storage alloy material, and providing a transition metal for catalyzing hydrogen desorption to mix with the hydrogen storage alloy material and performing a shortened time ball mill process to form a hydrogen storage composite.

Abstract: Disclosed is a method of forming a hydrogen storage composite, including uniformly covering catalyst particles on the surface of a support to form a hybrid catalyst, and embedding the hybrid catalyst on the surface of a hydrogen storage material to form a hydrogen storage composite. Furthermore, the disclosed also provides a method for manufacturing the same.