Patents by Inventor Chih-Cheng Tsai

Chih-Cheng Tsai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20250142955
    Abstract: A method for fabricating a semiconductor device includes providing a fin in a first region of a substrate. The fin includes a plurality of a first type of epitaxial layers and a plurality of a second type of epitaxial layers. A portion of a layer of the second type of epitaxial layers in a channel region of the first fin is removed to form a first gap between a first layer of the first type of epitaxial layers and a second layer of the first type of epitaxial layers. A first portion of a first gate structure is formed within the first gap and extending from a first surface of the first layer of the first type of epitaxial layers to a second surface of the second layer of the first type of epitaxial layers. A first source/drain feature is formed abutting the first portion of the first gate structure.
    Type: Application
    Filed: January 6, 2025
    Publication date: May 1, 2025
    Inventors: Kuo-Cheng CHING, Ching-Wei TSAI, Kuan-Lun CHENG, Chih-Hao WANG
  • Publication number: 20250142883
    Abstract: A semiconductor device includes two source/drain regions, two isolation elements, a channel feature, at least one semiconductor layer and a gate feature. The source/drain regions are spaced apart from each other, and are respectively disposed above the isolation elements. The channel feature includes at least one effective channel layer and at least one dummy channel layer that are spaced apart from each other. Each of the at least one effective channel layer extends between the source/drain regions. Each of the at least one dummy channel layer extends between the isolation elements. The at least one semiconductor layer at least covers a lower surface of a bottommost one of the at least one dummy channel layer. The gate feature is disposed around the at least one effective channel layer, such that two opposite surfaces of each of the at least one effective channel layer are adjacent to the gate feature.
    Type: Application
    Filed: November 1, 2023
    Publication date: May 1, 2025
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Jung-Hung CHANG, Tsung-Han CHUANG, Fu-Cheng CHANG, Shih-Cheng CHEN, Chia-Cheng TSAI, Kuo-Cheng CHIANG, Chih-Hao WANG
  • Publication number: 20250138409
    Abstract: An extreme ultraviolet mask including a substrate, a reflective multilayer stack on the substrate and patterned absorber layer on the reflective multilayer stack is provided with a pellicle membrane frame attached to the substrate. In some embodiments, the pellicle membrane frame is attached to the substrate using an adhesive between the pellicle membrane frame and the substrate. In some embodiments, the pellicle membrane frame is located in a trench formed in the reflective multilayer stack and patterned absorber layer. In other embodiments, the pellicle membrane frame not located in a trench formed in the reflective multilayer stack and patterned absorber layer.
    Type: Application
    Filed: February 29, 2024
    Publication date: May 1, 2025
    Inventors: Kun-Lung HSIEH, Hao-En LUO, Shang-Cheng TSAI, Chih-Wei WEN
  • Publication number: 20250138188
    Abstract: An unmanned vehicle processing system includes a controller, a laser source, a galvanometer module and a receiving device. The controller provides a laser trigger signal. The laser source is connected electrically to the controller, receives the laser trigger signal and further emits accordingly a laser beam. The galvanometer module includes a scanning galvanometer for reflecting and converting the laser beam into a processing beam. The receiving device is connected electrically to the controller, receives a processing reflected beam reflected from the object and further emits correspondingly a reflected reception signal to the controller. The controller obtains a processing distance between the unmanned vehicle and the object according to the reflected reception signal and the laser trigger signal, the reflected reception signal has a reflected-signal intensity, and the controller detects a processed state of the object according to the reflected-signal intensity.
    Type: Application
    Filed: December 6, 2023
    Publication date: May 1, 2025
    Inventors: CHIH-CHUN CHEN, CHIEN-HUNG LU, CHIH-YU TSAI, YU-CHENG SONG
  • Publication number: 20250142954
    Abstract: A semiconductor device includes a semiconductor channel region, a source/drain region, and a contact structure. The semiconductor channel region is over a substrate. The source/drain region is adjacent the semiconductor channel region. The source/drain region has a notched corner. The contact structure has a portion inlaid in the notched corner in the source/drain region.
    Type: Application
    Filed: December 31, 2024
    Publication date: May 1, 2025
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Kuo-Cheng CHING, Ching-Wei TSAI, Kuan-Lun CHENG, Chih-Hao WANG
  • Publication number: 20250133808
    Abstract: Aspects of the disclosure provide a method for forming a fin field effect transistor (FinFET) incorporating a fin top hardmask on top of a channel region of a fin. Because of the presence of the fin top hardmask, a gate height of the FinFET can be reduced without affecting proper operations of vertical gate channels on sidewalls of the fin. Consequently, parasitic capacitance between a gate stack and source/drain contacts of the FinFET can be reduced by lowering the gate height of the FinFET.
    Type: Application
    Filed: December 19, 2024
    Publication date: April 24, 2025
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Kuo-Cheng CHING, Kai-Chieh YANG, Ching-Wei TSAI, Kuan-Lun CHENG, Chih-Hao WANG
  • Patent number: 12278208
    Abstract: A method of fabricating a semiconductor structure includes the following steps. A semiconductor wafer is provided. A plurality of first surface mount components and a plurality of second surface mount components are bonded onto the semiconductor wafer, wherein a first portion of each of the second surface mount components is overhanging a periphery of the semiconductor wafer. A first barrier structure is formed in between the second surface mount components and the semiconductor wafer. An underfill structure is formed under a second portion of each of the second surface mount components, wherein the first barrier structure blocks the spreading of the underfill structure from the second portion to the first portion.
    Type: Grant
    Filed: November 1, 2023
    Date of Patent: April 15, 2025
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Mao-Yen Chang, Chih-Wei Lin, Hao-Yi Tsai, Kuo-Lung Pan, Chun-Cheng Lin, Tin-Hao Kuo, Yu-Chia Lai, Chih-Hsuan Tai
  • Publication number: 20250120166
    Abstract: Semiconductor device and the manufacturing method thereof are disclosed. An exemplary method comprises forming a first stack structure and a second stack structure in a first area over a substrate, wherein each of the stack structures includes semiconductor layers separated and stacked up; depositing a first interfacial layer around each of the semiconductor layers of the stack structures; depositing a gate dielectric layer around the first interfacial layer; forming a dipole oxide layer around the gate dielectric layer; removing the dipole oxide layer around the gate dielectric layer of the second stack structure; performing an annealing process to form a dipole gate dielectric layer for the first stack structure and a non-dipole gate dielectric layer for the second stack structure; and depositing a first gate electrode around the dipole gate dielectric layer of the first stack structure and the non-dipole gate dielectric layer of the second stack structure.
    Type: Application
    Filed: December 16, 2024
    Publication date: April 10, 2025
    Inventors: Chung-Wei Hsu, Kuo-Cheng Chiang, Kuan-Lun Cheng, Hou-Yu Chen, Ching-Wei Tsai, Chih-Hao Wang, Lung-Kun Chu, Mao-Lin Huang, Jia-Ni Yu
  • Patent number: 12260321
    Abstract: A data feature augmentation system and method for a low-precision neural network are provided. The data feature augmentation system includes a first time difference unit. The first time difference unit includes a first sample-and-hold circuit and a subtractor. The first sample-and-hold circuit is used for receiving an input signal and obtaining a first signal according to the input signal. The first signal is related to a first leakage rate of the first sample-and-hold circuit and the first signal is the signal generated by delaying the input signal by one time unit. The subtractor is used for performing subtraction on the input signal and the first signal to obtain a time difference signal. The input signal and the time difference signal are inputted to the low-precision neural network.
    Type: Grant
    Filed: July 26, 2021
    Date of Patent: March 25, 2025
    Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Fu-Cheng Tsai, Yi-Ching Kuo, Chih-Sheng Lin, Shyh-Shyuan Sheu, Tay-Jyi Lin, Shih-Chieh Chang
  • Publication number: 20250096153
    Abstract: An electronic package and a manufacturing method thereof are provided, in which an electronic component is disposed on a substrate and covered with an encapsulation layer, and a frame body is embedded in the encapsulation layer and protrudes from the substrate. Therefore, the frame body can disperse thermal stress, thereby preventing warping from occurring to the electronic package.
    Type: Application
    Filed: January 30, 2024
    Publication date: March 20, 2025
    Inventors: Chih-Hsien CHIU, Wen-Jung TSAI, Chien-Cheng LIN, Chun-Chong CHIEN, Shih-Shiung KUO
  • Publication number: 20250098219
    Abstract: A device includes: a substrate having a semiconductor fin; a stack of semiconductor channels on the substrate and positioned over the fin; a gate structure wrapping around the semiconductor channels; a source/drain abutting the semiconductor channels; an inner spacer positioned between the stack of semiconductor channels and the fin; an undoped semiconductor layer vertically adjacent the source/drain and laterally adjacent the fin; and an isolation structure that laterally surrounds the undoped semiconductor layer, the isolation structure being between the source/drain and the inner spacer.
    Type: Application
    Filed: February 15, 2024
    Publication date: March 20, 2025
    Inventors: Jung-Hung CHANG, Shih-Cheng CHEN, Tsung-Han CHUANG, Fu-Cheng CHANG, Wen-Ting LAN, Chia-Cheng TSAI, Kuo-Cheng CHIANG, Chih-Hao WANG, Wang-Chun Huang, Shi-Syuan Huang
  • Publication number: 20250098237
    Abstract: Semiconductor structures and methods of forming the same are provided. In an embodiment, an exemplary semiconductor structure includes a first transistor. The first transistor includes a first gate structure wrapping around a plurality of first nanostructures disposed over a substrate, a first source/drain feature electrically coupled to a topmost nanostructure of the plurality of first nanostructures and isolated from a bottommost nanostructure of the plurality of first nanostructures by a first dielectric layer, and a first semiconductor layer disposed between the substrate and the first source/drain feature, wherein the first source/drain feature is in direct contact with a top surface of the first semiconductor layer.
    Type: Application
    Filed: January 4, 2024
    Publication date: March 20, 2025
    Inventors: Jung-Hung Chang, Shih-Cheng Chen, Tsung-Han Chuang, Wen-Ting Lan, Chia-Cheng Tsai, Kuo-Cheng Chiang, Chih-Hao Wang
  • Patent number: 12255144
    Abstract: A graphene liner deposited between at least one liner material (e.g., barrier layer, ruthenium liner, and/or cobalt liner) and a copper conductive structure reduces surface scattering at an interface between the at least one liner material and the copper conductive structure. Additionally, or alternatively, the carbon-based liner reduces contact resistance at an interface between the at least one liner material and the copper conductive structure. A carbon-based cap may additionally or alternatively be deposited on a metal cap, over the copper conductive structure, to reduce surface scattering at an interface between the metal cap and an additional copper conductive structure deposited over the metal cap.
    Type: Grant
    Filed: January 11, 2022
    Date of Patent: March 18, 2025
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shu-Cheng Chin, Chih-Yi Chang, Chih-Chien Chi, Ming-Hsing Tsai
  • Publication number: 20250087533
    Abstract: A method of forming a semiconductor device includes: forming a via in a first dielectric layer disposed over a substrate; forming a second dielectric layer over the first dielectric layer; forming an opening in the second dielectric layer, where the opening exposes an upper surface of the via; selectively forming a capping layer over the upper surface of the via, where the capping layer has a curved upper surface that extends above a first upper surface of the first dielectric layer distal from the substrate; after forming the capping layer, forming a barrier layer in the opening over the capping layer and along sidewalls of the second dielectric layer exposed by the opening; and filling the opening by forming an electrically conductive material over the barrier layer.
    Type: Application
    Filed: March 28, 2024
    Publication date: March 13, 2025
    Inventors: Ming-Hsing Tsai, Ya-Lien Lee, Chih-Han Tseng, Kuei-Wen Huang, Kuan-Hung Ho, Ming-Uei Hung, Chih-Cheng Kuo, Yi-An Lai, Wei-Ting Chen
  • Publication number: 20250089140
    Abstract: An LED driving apparatus, a microcontroller, and a control method for an LED module are provided. The LED driving apparatus includes a power supply module, a switch module, and a control module. The power supply module is configured to supply power to the LED module, in which the power supply module determines whether to trigger an overcurrent protection based on whether an output current exceeds a threshold current. The control module is configured to receive an overcurrent detection signal to control a conduction state of the switch module, so as to affect the current amount of the LED module. When the overcurrent detection signal indicates the output current exceeds the threshold current, the control module outputs a first control signal based on the overcurrent detection signal to control the switch module, to prevent the overcurrent protection from being triggered.
    Type: Application
    Filed: January 8, 2024
    Publication date: March 13, 2025
    Inventors: Chun-Yi WU, Lian-Cheng TSAI, Chih-Wei TSAI
  • Publication number: 20250079414
    Abstract: An electronic package module and a method for fabrication of the same are provided. The method includes providing an electronic component assembly and a circuit substrate. The electronic component assembly includes two electronic components and a conductive structure. The electronic components are connected to each other through a conductive adhesive material, while the electronic components are connected to the conductive structure through another conductive adhesive material. A soldering material is formed on the circuit substrate, and the electronic component assembly is disposed on the soldering material. The melting points of the conductive adhesive materials are higher than the melting point of the soldering material. As a result, the conductive adhesive materials are prevented from failure during the soldering process, and thus the process yield is improved.
    Type: Application
    Filed: January 16, 2024
    Publication date: March 6, 2025
    Inventors: KUO-HSIEN LIAO, LI-CHENG SHEN, HUNG-YI TSAI, CHAO-HSUAN WANG, CHUN-MING CHEN, TAI-LIN WU, CHIH-SHIEN CHEN, PING-CHI HUNG
  • Publication number: 20250081594
    Abstract: A semiconductor device structure, along with methods of forming such, are described. The structure includes a first and second gate electrode layers, and a dielectric feature disposed between the first and second gate electrode layers. The dielectric feature has a first surface. The structure further includes a first conductive layer disposed on the first gate electrode layer. The first conductive layer has a second surface. The structure further includes a second conductive layer disposed on the second gate electrode layer. The second conductive layer has a third surface, and the first, second, and third surfaces are coplanar. The structure further includes a third conductive layer disposed over the first conductive layer, a fourth conductive layer disposed over the second conductive layer, and a dielectric layer disposed on the first surface of the dielectric feature. The dielectric layer is disposed between the third conductive layer and the fourth conductive layer.
    Type: Application
    Filed: November 20, 2024
    Publication date: March 6, 2025
    Inventors: Kuan-Ting PAN, Kuo-Cheng CHIANG, Shang-Wen CHANG, Ching-Wei TSAI, Kuan-Lun CHENG, Chih-Hao WANG
  • Publication number: 20250072065
    Abstract: A device includes: a substrate; a stack of semiconductor channels on the substrate; a gate structure wrapping around the semiconductor channels; a source/drain region abutting the semiconductor channels; and a hybrid structure between the source/drain region and the substrate. The hybrid structure includes: a first semiconductor layer under the source/drain region; and an isolation region extending vertically from an upper surface of the first semiconductor layer to a level above a bottom surface of the first semiconductor layer.
    Type: Application
    Filed: January 5, 2024
    Publication date: February 27, 2025
    Inventors: Jung-Hung CHANG, Shih-Cheng CHEN, Chia-Hao YU, Chia-Cheng TSAI, Kuo-Cheng CHIANG, Chih-Hao WANG
  • Patent number: 12224348
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a plurality of nanowire structures over a channel region of a semiconductor fin structure, a source/drain feature on a source/drain region of the semiconductor fin structure, and a dielectric fin structure spaced apart from the source/drain feature and the semiconductor fin structure. A top surface of the dielectric fin structure is higher than a top surface of a bottommost one of the nanowire structures, and a bottom surface of the dielectric fin structure is lower than a bottom surface of the source/drain feature.
    Type: Grant
    Filed: April 15, 2024
    Date of Patent: February 11, 2025
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Kuo-Cheng Chiang, Shi-Ning Ju, Ching-Wei Tsai, Kuan-Lun Cheng, Chih-Hao Wang
  • Publication number: 20250044157
    Abstract: An electronic device includes an outer case, a circuit substrate, a thermopile sensor chip, a filter structure, and a waterproof structure. The outer case has an opening. The circuit substrate is disposed inside the outer case. The thermopile sensor chip is disposed on the circuit substrate. The filter structure is disposed above the thermopile sensor chip. The waterproof structure is surroundingly connected between the filter structure and the outer case, wherein the waterproof structure has a through hole for exposing the filter structure and communicated with the opening of the outer case.
    Type: Application
    Filed: October 22, 2024
    Publication date: February 6, 2025
    Inventors: MING-HAN TSAI, CHIH-MING SUN, JIAN-CHENG LIAO