Abstract: An Equipment Front End Module (EFEM) having a Front Opening Unified Pod (FOUP) dock and a tool access port, includes a robotic wafer handling system configured to transfer silicon wafers between a FOUP coupled to the FOUP dock and a process tool positioned for access via the tool access port. An air curtain system inside the EFEM is positioned to produce an air curtain across the tool access port while the port is open, acting to isolate the interior of the EFEM from the tool environment, and prevent passage of airborne contaminants into the EFEM via the access port.

Abstract: An Equipment Front End Module (EFEM) having a Front Opening Unified Pod (FOUP) dock and a tool access port, includes a robotic wafer handling system configured to transfer silicon wafers between a FOUP coupled to the FOUP dock and a process tool positioned for access via the tool access port. An air curtain system inside the EFEM is positioned to produce an air curtain across the tool access port while the port is open, acting to isolate the interior of the EFEM from the tool environment, and prevent passage of airborne contaminants into the EFEM via the access port.

Abstract: A showerhead is configured to be mounted inside a processing chamber and provide a processing gas onto a semiconductor wafer inside the processing chamber. The showerhead includes a supply plenum, a faceplate, and an electrode plate assembly. The faceplate is disposed at a side of the supply plenum. The electrode plate assembly is disposed between a gas source and the supply plenum. The electrode plate assembly includes a first plate having a unitary construction and having a plurality of first gas holes, and a second plate having a unitary construction and having a plurality of second gas holes. The second plate is located between the first plate and the supply plenum and separated from the first plate. The plurality of second gas holes are partially overlapped but misaligned with the plurality of first gas holes. A semiconductor apparatus having the same and a semiconductor process are also provided.

Abstract: A showerhead is configured to be mounted inside a processing chamber and provide a processing gas onto a semiconductor wafer inside the processing chamber. The showerhead includes a supply plenum, a faceplate, and an electrode plate assembly. The faceplate is disposed at a side of the supply plenum. The electrode plate assembly is disposed between a gas source and the supply plenum. The electrode plate assembly includes a first plate having a unitary construction and having a plurality of first gas holes, and a second plate having a unitary construction and having a plurality of second gas holes. The second plate is located between the first plate and the supply plenum and separated from the first plate. The plurality of second gas holes are partially overlapped but misaligned with the plurality of first gas holes. A semiconductor apparatus having the same and a semiconductor process are also provided.

Abstract: A calibration system for a display device is provided. The calibration system includes an image signal source, a user-motion sensing module, a control module, and a calibration interface. The image source drives the display device to display a reference image and an indication icon included in the reference image. The user-motion sensing module detects a user motion and generating a corresponding sensing result. The control module controls the image signal source to move the indication icon according to the sensing result. After selecting a region to be calibrated in the reference image by the indication icon through the user-motion sensing module, a user can adjust an image characteristic parameter of the display device that corresponds to the region to be calibrated through the calibration interface.

Abstract: A power supply system for an information handling system is provided. The information processing system is electrically coupled to an AC power source and includes at least one computer unit. The power supply system includes: at least one AC power supply unit electrically coupled to the at least one computer unit and the AC power source; at least one DC power supply unit electrically coupled to the at least one computer unit; and a backup power unit electrically coupled to the at least one DC power supply unit. In response to the at least one AC power supply unit not supplying power, the at least one DC power supply unit supplies power to the at least one computer unit. A data center having the power supply system is further provided.

Abstract: A calibration system for a display device is provided. The calibration system includes an image signal source, a user-motion sensing module, a control module, and a calibration interface. The image source drives the display device to display a reference image and an indication icon included in the reference image. The user-motion sensing module detects a user motion and generating a corresponding sensing result. The control module controls the image signal source to move the indication icon according to the sensing result. After selecting a region to be calibrated in the reference image by the indication icon through the user-motion sensing module, a user can adjust an image characteristic parameter of the display device that corresponds to the region to be calibrated through the calibration interface.

Abstract: A measuring device for measuring a response speed of a display panel is provided. The measuring device includes a microcontroller and at least one photo sensor. The microcontroller provides a control command, according to which a display controller of the display panel provides test pattern to the display panel. The photo sensor senses a test frame displayed corresponding to the test pattern by the display panel, and provides a corresponding sensing signal associated with brightness and a response signal. According to the response signal, the response speed of the display panel is calculated.

Abstract: A power supply system for an information handling system is provided. The information processing system is electrically coupled to an AC power source and includes at least one computer unit. The power supply system includes: at least one AC power supply unit electrically coupled to the at least one computer unit and the AC power source; at least one DC power supply unit electrically coupled to the at least one computer unit; and a backup power unit electrically coupled to the at least one DC power supply unit. In response to the at least one AC power supply unit not supplying power, the at least one DC power supply unit supplies power to the at least one computer unit. A data center having the power supply system is further provided.

Abstract: A measuring device for measuring a response speed of a display panel is provided. The measuring device includes a microcontroller and at least one photo sensor. The microcontroller provides a control command, according to which a display controller of the display panel provides test pattern to the display panel. The photo sensor senses a test frame displayed corresponding to the test pattern by the display panel, and provides a corresponding sensing signal associated with brightness and a response signal. According to the response signal, the response speed of the display panel is calculated.

Abstract: The present invention provides an apparatus for updating the function of a monitor and the method thereof. The method comprises: coupling a scale controller and a memory device of at least a monitor to a microcontroller; controlling the microcontroller to send a programming activation signal in a first signal format to the scale controller such that the scale controller enters a state of updating program; and controlling the microcontroller to access the memory device through a signal in a second signal format to update the program codes stored in the memory device, so as to update the function of the monitor.

Abstract: The present invention provides an apparatus for programming functions of a display. The apparatus comprises a memory, a programming device, and a program code checking unit. The memory is for storing a program code. The programming device coupled to the memory is for reading the program code with a predetermined length from the memory. The program code with the predetermined length is part of the program code. The program code checking unit coupled to the programming device is for checking whether the program code with the predetermined length is consistent with a predetermined state, and for selectively generating a control signal. Under control of the control signal, the programming device determines whether to write the program code with the predetermined length into a memory of the display.

Abstract: The present invention provides an apparatus for programming functions of a display. The apparatus comprises a memory, a programming device, and a program code checking unit. The memory is for storing a program code. The programming device coupled to the memory is for reading the program code with a predetermined length from the memory. The program code with the predetermined length is part of the program code. The program code checking unit coupled to the programming device is for checking whether the program code with the predetermined length is consistent with a predetermined state, and for selectively generating a control signal. Under control of the control signal, the programming device determines whether to write the program code with the predetermined length into a memory of the display.

Abstract: The present invention provides an apparatus for updating the function of a monitor and the method thereof. The method comprises: coupling a scale controller and a memory device of at least a monitor to a microcontroller; controlling the microcontroller to send a programming activation signal in a first signal format to the scale controller such that the scale controller enters a state of updating program; and controlling the microcontroller to access the memory device through a signal in a second signal format to update the program codes stored in the memory device, so as to update the function of the monitor.