Abstract: A plasma etching system generates a plasma above a wafer in a plasma etching chamber. The wafer is surrounded by a focus ring. The plasma etching system straightens a plasma sheath above the focus ring by generating a supplemental electric field above the focus ring.

Abstract: A light-emitting diode epitaxial structure and a light-emitting diode are provided. The light-emitting diode epitaxial structure is provided with an Mg modulation layer disposed between a multi-quantum well light-emitting layer and a first hole injection layer. The average impurity doping concentration of the Mg modulation layer is A, the average impurity doping concentration of the first hole injection layer is B, and the average impurity doping concentration of an electron blocking layer is C, where B>A>C.

Abstract: A method for processing a semiconductor wafer is provided. The method includes placing a first semiconductor wafer on a wafer chuck in a process chamber. The method further includes adjusting a distance between a gas dispenser positioned above the wafer chuck and an upper edge ring surrounding the wafer chuck. The method also includes producing a plasma for processing the first semiconductor wafer by exciting a gas dispenser from the gas dispenser after the adjustment. In addition, the method includes removing the first semiconductor wafer from the process chamber.

Abstract: A trolley and a folding method thereof. The trolley includes a main bracket, a connecting mechanism, an upper bracket, a sliding mechanism, first to fourth connecting rods and a rear wheel. The main bracket has first and second ends. The upper bracket is connected to the first end through the connecting mechanism slidably arranged on the main bracket. Both ends of the first connecting rod are respectively connected to the sliding mechanism and the upper bracket. The second and third connecting rods are parallel to each other and connected to the sliding mechanism and the rear wheel. The fourth connecting rod has third and fourth ends and a bending portion. The third end is connected to the second connecting rod and located between the sliding mechanism and the rear wheel. The fourth end is connected to the connecting mechanism, at a middle section of which the bending portion is arranged.

Abstract: A plasma etching system generates a plasma above a wafer in a plasma etching chamber. The wafer is surrounded by a focus ring. The plasma etching system straightens a plasma sheath above the focus ring by generating a supplemental electric field above the focus ring.

Abstract: In a method of controlling a plasma beam of a plasma etcher a flow rate controller of the plasma etcher is set to generate one or more flow rates of an etching gas corresponding to one or more plasma beams of the plasma etcher. The emitted light generated by plasma discharge corresponding to the one or more plasma beams of the plasma etcher is monitored. The flow rate controller is calibrated based on the one or more flow rates and a corresponding emitted light of the plasma discharge.

Abstract: In a method of controlling a plasma beam of a plasma etcher a flow rate controller of the plasma etcher is set to generate one or more flow rates of an etching gas corresponding to one or more plasma beams of the plasma etcher. The emitted light generated by plasma discharge corresponding to the one or more plasma beams of the plasma etcher is monitored. The flow rate controller is calibrated based on the one or more flow rates and a corresponding emitted light of the plasma discharge.

Abstract: An unlocking device with a pause function comprises a first moving member having a first protruding portion, a second moving member having a second protruding portion, and a third moving member having a third end portion and a fourth end portion. The second moving member is disposed corresponding to the first moving member. The second protruding portion is disposed cooperated with the first protruding portion. The third end portion is connected to the second moving member. When the fourth end portion of the third moving member contacts a carry body, and a first end portion of a releasing member moves along a first direction towards the housing, the releasing member drives the first moving member to move in the first direction, so the second moving member holds the position of the releasing member by the second protruding portion and the first protruding portion.

Abstract: A movable carrier includes a bottom frame assembly, a first support member, a link assembly, a position mechanism, and a first unlock member. The first support member has a first end portion pivotally connected to the bottom frame assembly. The link assembly includes a link member and a first connect member. The link member is disposed at a second end portion of the first support member. The first connect member is pivotally connected to the link member and connected to the second end portion through the link member. The position mechanism is disposed on the link assembly and corresponds to the first connect member. The first unlock member is disposed on the link assembly and connected to the position mechanism. When the first unlock member contacts the bottom frame assembly, it carries the position mechanism to move to change the position of the first connect member.

Abstract: Provided are a light-emitting diode and a semiconductor device.

Abstract: A plasma etching system generates a plasma above a wafer in a plasma etching chamber. The wafer is surrounded by a focus ring. The plasma etching system straightens a plasma sheath above the focus ring by generating a supplemental electric field above the focus ring.

Abstract: A pedaling sensing device of an electric bicycle is configured to connect to a motor and includes a crank axle, a first gearwheel, a second gearwheel, an assisting unit and a sensing unit. The crank axle extends along an axial direction and has a plurality of first helical teeth connected to each other and arranged continuously. The first gearwheel is disposed around the crank axle and comprises a first inner annulus surface and a first outer annulus surface. The first inner annulus surface is formed with a plurality of second helical teeth matching the first helical teeth. The second helical teeth are connected to each other and arranged continuously. The second gearwheel is disposed around the first gearwheel and has a second inner annulus surface. The second inner annulus surface is formed with a second transmission structure matching the first transmission structure.

Abstract: In a method of controlling a plasma beam of a plasma etcher a flow rate controller of the plasma etcher is set to generate one or more flow rates of an etching gas corresponding to one or more plasma beams of the plasma etcher. The emitted light generated by plasma discharge corresponding to the one or more plasma beams of the plasma etcher is monitored. The flow rate controller is calibrated based on the one or more flow rates and a corresponding emitted light of the plasma discharge.

Abstract: A method for processing a semiconductor wafer is provided. The method includes placing a first semiconductor wafer on a wafer chuck in a process chamber. The method further includes adjusting a distance between a gas dispenser positioned above the wafer chuck and an upper edge ring surrounding the wafer chuck. The method also includes producing a plasma for processing the first semiconductor wafer by exciting a gas dispenser from the gas dispenser after the adjustment. In addition, the method includes removing the first semiconductor wafer from the process chamber.

Abstract: A movable carrier includes a bottom frame assembly, a first support member, a link assembly, a position mechanism, and a first unlock member. The first support member has a first end portion pivotally connected to the bottom frame assembly. The link assembly includes a link member and a first connect member. The link member is disposed at a second end portion of the first support member. The first connect member is pivotally connected to the link member and connected to the second end portion through the link member. The position mechanism is disposed on the link assembly and corresponds to the first connect member. The first unlock member is disposed on the link assembly and connected to the position mechanism. When the first unlock member contacts the bottom frame assembly, it carries the position mechanism to move to change the position of the first connect member.

Abstract: A moving carrier comprises a bottom frame assembly, a first support member and a link assembly. A first end portion of the first support member is connected with the bottom frame assembly. The link assembly includes a link member, a first connect member, a second connect member, and two adapter members. The link member is disposed at a second end portion of the first support member. The first connect member and the second connect member are disposed on the link member and connected to the second end portion through the link member. The adapter members are disposed corresponding to ends of the first connect member and the second connect member, and each adapter member has an adapter portion. In the process of changing positions of the first connect member and the second connect member relative to the link member, the adapter portions are oriented to the same direction.

Abstract: An unlocking device with a pause function comprises a first moving member having a first protruding portion, a second moving member having a second protruding portion, and a third moving member having a third end portion and a fourth end portion. The second moving member is disposed corresponding to the first moving member. The second protruding portion is disposed cooperated with the first protruding portion. The third end portion is connected to the second moving member. When the fourth end portion of the third moving member contacts a carry body, and a first end portion of a releasing member moves along a first direction towards the housing, the releasing member drives the first moving member to move in the first direction, so the second moving member holds the position of the releasing member by the second protruding portion and the first protruding portion.

Abstract: A pedaling sensing device of an electric bicycle is configured to connect to a motor and includes a crank axle, a first gearwheel disposed around the crank axle, a second gearwheel disposed around the first gearwheel, a sensing unit, an assisting unit, and a chain wheel. The crank axle has first bevel teeth, and the first gearwheel has a first transmission structure and second bevel teeth matching the first bevel teeth. The second gearwheel has a second transmission structure matching the first transmission structure. When the crank axle is driven by a force to rotate, the first gearwheel, second gearwheel and chain wheel are carried to rotate. The first gearwheel also moves with respect to the crank axle along the axial direction, so the sensing unit can sense the applied force. Then, the motor drives the assisting gearwheel and chain wheel to rotate, thereby achieving assisting riding effect.

Abstract: A plasma processing apparatus is provided. The apparatus includes a lower sheltering module. The apparatus further includes an upper sheltering module arranged adjacent to the lower sheltering module. The apparatus includes an upper plate and an upper PEZ ring positioned around the upper plate. The apparatus also includes a shadowing unit that includes a number of engaging parts in the form of arcs detachably positioned on the upper PEZ ring. In addition, the apparatus includes a plasma generation module for generating plasma in the peripheral region of the lower sheltering module and the upper sheltering module.

Abstract: A drivetrain of an electric bike is provided. The drivetrain includes an outer rotor type motor, a shaft gear, a crankshaft and a single-stage velocity-reduction driving assembly. The outer rotor type motor includes a stator assembly, a rotor assembly and a housing. The rotor assembly is disposed to the housing. The shaft gear includes a joint portion and a gear portion. The joint portion is disposed to the housing. The single-stage velocity-reduction driving assembly is configured around the crankshaft and includes a driving gear. A central axis of the shaft gear and a central axis of the crankshaft are substantially parallel to each other and non-coaxial, and the driving gear directly meshes with the gear portion. Accordingly, the drivetrain of the electric bike of the present invention has the advantages of easier assembly and having lower cost.