Abstract: A plug unlocking structure of an optical transceiver module includes a main body, a linkage assembly, and a pull handle. The linkage assembly is pivotally coupled to the main body. The linkage assembly includes a locking arm and at least one linking arm extended from the locking arm. The extending directions of the locking arm and the linking arm are different, and an elastic element is installed between the linking arm and the main body. The pull handle is linked to the linking arm. The linkage assembly is pivotally coupled to the main body through the pivoting point of the locking arm, and the locking arm has a latching pin. The position of the pivoting point of the locking arm is between the latching pin and the linking arm.

Abstract: A plug unlocking structure of an optical transceiver module includes a main body, a linkage assembly, and a pull handle. The linkage assembly is pivotally coupled to the main body. The linkage assembly includes a locking arm and at least one linking arm extended from the locking arm. The extending directions of the locking arm and the linking arm are different, and an elastic element is installed between the linking arm and the main body. The pull handle is linked to the linking arm. The linkage assembly is pivotally coupled to the main body through the pivoting point of the locking arm, and the locking arm has a latching pin. The position of the pivoting point of the locking arm is between the latching pin and the linking arm.

Abstract: Shower tubing which enhances the spray uniformity of deionized water or other rinsing fluid on multiple semiconductor wafers in a wet bench to improve uniformity in the particle-removing capability of the wet bench. Each of a pair of parallel shower tubes in a wet bench cleaning bath is fitted with multiple, closely-adjacent shower nozzles which provide a substantially uniform spray of deionized water or other cleansing or rinsing chemical to all of multiple substrates in the bath.

Abstract: An apparatus for drying semiconductor wafers in a solvent drying chamber and a method for drying are disclosed. The apparatus is equipped with an alarm/interlocking system such that when a flow of the solvent vapor into the drying chamber is stopped, the alarm is triggered and the interlocking system is activated to stop the further loading of wafers into the drying chamber and thus preventing the outputting of undried wafers from the chamber. The apparatus is used to prevent any malfunction in the flow control valves or in any other flow control system that stops the flow of solvent vapor into the drying chamber.