Patents by Inventor Chih-Hsu Tsai

Chih-Hsu Tsai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240136226
    Abstract: An ammonium fluoride gas may be used to form a protection layer for one or more interlayer dielectric layers, one or more insulating caps, and/or one or more source/drain regions of a semiconductor device during a pre-clean etch process. The protection layer can be formed through an oversupply of nitrogen trifluoride during the pre-clean etch process. The oversupply of nitrogen trifluoride causes an increased formation of ammonium fluoride, which coats the interlayer dielectric layer(s), the insulating cap(s), and/or the source/drain region(s) with a thick protection layer. The protection layer protects the interlayer dielectric layer(s), the insulating cap(s), and/or the source/drain region(s) during the pre-clean process from being etched by fluorine ions formed during the pre-clean process.
    Type: Application
    Filed: January 2, 2024
    Publication date: April 25, 2024
    Inventors: Li-Wei CHU, Ying-Chi SU, Yu-Kai CHEN, Wei-Yip LOH, Hung-Hsu CHEN, Chih-Wei CHANG, Ming-Hsing TSAI
  • Publication number: 20240120272
    Abstract: Embodiments of the present disclosure relates to a method for forming a semiconductor device structure. The method includes including forming one or more conductive features in a first interlayer dielectric (ILD), forming an etch stop layer on the first ILD, forming a second ILD over the etch stop layer, forming one or more openings through the second ILD and the etch stop layer to expose a top surface of the one or more first conductive features, wherein the one or more openings are formed by a first etch process in a first process chamber, exposing the one or more openings to a second etch process in a second process chamber so that the shape of the or more openings is elongated, and filling the one or more openings with a conductive material.
    Type: Application
    Filed: January 15, 2023
    Publication date: April 11, 2024
    Inventors: Wei-Hao LIAO, Hsi-Wen TIEN, Chih Wei LU, Yung-Hsu WU, Cherng-Shiaw TSAI, Chia-Wei SU
  • Patent number: 11915976
    Abstract: An ammonium fluoride gas may be used to form a protection layer for one or more interlayer dielectric layers, one or more insulating caps, and/or one or more source/drain regions of a semiconductor device during a pre-clean etch process. The protection layer can be formed through an oversupply of nitrogen trifluoride during the pre-clean etch process. The oversupply of nitrogen trifluoride causes an increased formation of ammonium fluoride, which coats the interlayer dielectric layer(s), the insulating cap(s), and/or the source/drain region(s) with a thick protection layer. The protection layer protects the interlayer dielectric layer(s), the insulating cap(s), and/or the source/drain region(s) during the pre-clean process from being etched by fluorine ions formed during the pre-clean process.
    Type: Grant
    Filed: June 27, 2022
    Date of Patent: February 27, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Li-Wei Chu, Ying-Chi Su, Yu-Kai Chen, Wei-Yip Loh, Hung-Hsu Chen, Chih-Wei Chang, Ming-Hsing Tsai
  • Publication number: 20090218191
    Abstract: A cash receiver installed in an amusement machine for controlling the operation of the machine, including a face panel that has a coin slot, a coin-return slot and a vertical bill slot, a coin receiver unit that is affixed to the rear side of the face panel and has a coin entrance passage connected to the coin slot and a coin-return passage connected to the coin-return slot, and a bill receiver unit that is affixed to the rear side of the face panel and abutted against one side of the coin receiver unit and has a bill passage connected to the vertical bill slot. The client can insert a coin or a bill into the cash receiver to play the amusement machine.
    Type: Application
    Filed: February 28, 2008
    Publication date: September 3, 2009
    Applicant: INTERNATIONAL CURRENCY TECHNOLOGIES CORPORATION
    Inventors: Chih-Hsu Tsai, Chen-Yen Chiu, Hung-Yi Chang, Po-An Chen
  • Patent number: 7530492
    Abstract: The invention discloses a card discriminating system used for identifying whether a card is authentic or not. The card has a surface, and N sensing marks are formed on the surface of the card. The card discriminating system includes a position-based pulse generation module, at least one sensor, and a micro-controller unit. The micro-controller unit is respectively coupled with the position-based pulse generating module and each of the sensors. When the card actuates and passes through the position-based pulse generating module, the position-based pulse generating module will generate a reference position-based pulse. When one of the N sensing marks of the card passes through one of the sensors, the sensor will generate a corresponding sensing position-based pulse. The micro-controller unit is used for comparing the sensing position-based pulse with the reference position-based pulse, so as to identify whether the card is authentic or not.
    Type: Grant
    Filed: August 9, 2006
    Date of Patent: May 12, 2009
    Assignee: International Currency Technologies Corporation
    Inventors: Wei-Jung Lin, Chih-Hsu Tsai, Chih-Ching Liao
  • Publication number: 20080035729
    Abstract: A multiple card reading modules apparatus includes a first card reading module and a second card reading module. The first card reading module includes a card receiving structure. The first card reading module reads a first card signal based on a control signal through the card receiving structure. The second card reading module is combined with the first card reading module through a combination device for sharing the card receiving structure to read a second card signal and generate the control signal based on the content of the second card signal.
    Type: Application
    Filed: August 9, 2006
    Publication date: February 14, 2008
    Inventors: Wei-Jung Lin, Chih-Hsu Tsai, Chih-Ching Liao
  • Publication number: 20080000972
    Abstract: A roller activation apparatus includes a switch, a roller, a light generator and a light receiver. The roller contacts the switch. A wheel of the roller has at least an opening. A wheel surface of the roller is touched to activate the switch by inputting a card. The roller rotates based on a movement of the card. The light generator is disposed at a side of the roller and is for generating a light beam. The light receiver is disposed at another side of the roller and is for receiving the light beam through the opening of the wheel so as to generate a pulse signal. The pulse signal corresponds to the movement of the card.
    Type: Application
    Filed: July 3, 2006
    Publication date: January 3, 2008
    Inventors: Wei-Jung Lin, Chih-Hsu Tsai, Chih-Ching Liao
  • Publication number: 20080000973
    Abstract: A casing structure for a card reader is disclosed. The casing structure is composed of at least an upper casing structure and a lower casing structure. In addition, an elastic hook and a hook notch are disposed on at least a side of the upper casing structure. A protruding cylinder and a support cylinder are disposed on a side of the lower casing structure. After the hook notch covering the support cylinder, the elastic hook can be displaced flexibly for hooking the protruding cylinder. Hence the upper casing structure then covers the lower casing structure tightly.
    Type: Application
    Filed: July 3, 2006
    Publication date: January 3, 2008
    Inventors: Wei-Jung Lin, Chih-Hsu Tsai, Chih-Ching Liao
  • Publication number: 20070246535
    Abstract: The invention discloses a card discriminating system used for identifying whether a card is authentic or not. The card has a surface, and N sensing marks are formed on the surface of the card. The card discriminating system includes a position-based pulse generation module, at least one sensor, and a micro-controller unit. The micro-controller unit is respectively coupled with the position-based pulse generating module and each of the sensors. When the card actuates and passes through the position-based pulse generating module, the position-based pulse generating module will generate a reference position-based pulse. When one of the N sensing marks of the card passes through one of the sensors, the sensor will generate a corresponding sensing position-based pulse. The micro-controller unit is used for comparing the sensing position-based pulse with the reference position-based pulse, so as to identify whether the card is authentic or not.
    Type: Application
    Filed: August 9, 2006
    Publication date: October 25, 2007
    Inventors: Wei-Jung Lin, Chih-Hsu Tsai, Chih-Ching Liao