Patents by Inventor Chih-Hsuan TSAI

Chih-Hsuan TSAI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12255070
    Abstract: In a semiconductor structure, a first conductive feature is formed in a trench by PVD and a glue layer is then deposited on the first conductive feature in the trench before CVD deposition of a second conductive feature there-over. The first conductive feature acts as a protection layer to keep silicide from being damaged by later deposition of metal or a precursor by CVD. The glue layer extends along the extent of the sidewall to enhance the adhesion of the second conductive features to the surrounding dielectric layer.
    Type: Grant
    Filed: September 30, 2021
    Date of Patent: March 18, 2025
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Min-Hsuan Lu, Kan-Ju Lin, Lin-Yu Huang, Sheng-Tsung Wang, Hung-Yi Huang, Chih-Wei Chang, Ming-Hsing Tsai, Chih-Hao Wang
  • Publication number: 20250079414
    Abstract: An electronic package module and a method for fabrication of the same are provided. The method includes providing an electronic component assembly and a circuit substrate. The electronic component assembly includes two electronic components and a conductive structure. The electronic components are connected to each other through a conductive adhesive material, while the electronic components are connected to the conductive structure through another conductive adhesive material. A soldering material is formed on the circuit substrate, and the electronic component assembly is disposed on the soldering material. The melting points of the conductive adhesive materials are higher than the melting point of the soldering material. As a result, the conductive adhesive materials are prevented from failure during the soldering process, and thus the process yield is improved.
    Type: Application
    Filed: January 16, 2024
    Publication date: March 6, 2025
    Inventors: KUO-HSIEN LIAO, LI-CHENG SHEN, HUNG-YI TSAI, CHAO-HSUAN WANG, CHUN-MING CHEN, TAI-LIN WU, CHIH-SHIEN CHEN, PING-CHI HUNG
  • Publication number: 20250066899
    Abstract: A method includes: positioning a wafer on an electrostatic chuck of a physical vapor deposition apparatus, the wafer including an opening exposing a conductive feature; setting a temperature of the wafer to a room temperature; forming a tungsten thin film in the opening by the physical vapor deposition apparatus, the tungsten thin film including a bottom portion that is on an upper surface of the conductive feature exposed by the opening, a top portion that is on an upper surface of a dielectric layer through which the opening extends and a sidewall portion that is on a sidewall of the dielectric layer exposed by the opening; removing the top portion and the sidewall portion of the tungsten thin film from over the opening; and forming a tungsten plug in the opening on the bottom portion by selectively depositing tungsten by a chemical vapor deposition operation.
    Type: Application
    Filed: August 23, 2023
    Publication date: February 27, 2025
    Inventors: Chun-Yen LIAO, I. LEE, Shu-Lan CHANG, Sheng-Hsuan LIN, Feng-Yu CHANG, Wei-Jung LIN, Chun-I TSAI, Chih-Chien CHI, Ming-Hsing TSAI, Pei Shan CHANG, Chih-Wei CHANG
  • Publication number: 20250063783
    Abstract: A device includes a fin extending from a semiconductor substrate, a gate stack over and along a sidewall of the fin, an isolation region surrounding the gate stack, an epitaxial source/drain region in the fin and adjacent the gate stack, and a source/drain contact extending through the isolation region, including a first silicide region in the epitaxial source/drain region, the first silicide region including NiSi2, a second silicide region on the first silicide region, the second silicide region including TiSix, and a conductive material on the second silicide region.
    Type: Application
    Filed: November 5, 2024
    Publication date: February 20, 2025
    Inventors: Yan-Ming Tsai, Chih-Wei Chang, Ming-Hsing Tsai, Sheng-Hsuan Lin, Hung-Hsu Chen, Wei-Yip Loh
  • Patent number: 12222545
    Abstract: An integrated circuit package and a method of forming the same are provided. The integrated circuit package includes a photonic integrated circuit die. The photonic integrated circuit die includes an optical coupler. The integrated circuit package further includes an encapsulant encapsulating the photonic integrated circuit die, a first redistribution structure over the photonic integrated circuit die and the encapsulant, and an opening extending through the first redistribution structure and exposing the optical coupler.
    Type: Grant
    Filed: April 18, 2023
    Date of Patent: February 11, 2025
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chih-Hsuan Tai, Chung-Ming Weng, Hung-Yi Kuo, Cheng-Chieh Hsieh, Hao-Yi Tsai, Chung-Shi Liu, Chen-Hua Yu
  • Patent number: 12218012
    Abstract: A semiconductor device with multiple silicide regions is provided. In embodiments a first silicide precursor and a second silicide precursor are deposited on a source/drain region. A first silicide with a first phase is formed, and the second silicide precursor is insoluble within the first phase of the first silicide. The first phase of the first silicide is modified to a second phase of the first silicide, and the second silicide precursor being soluble within the second phase of the first silicide. A second silicide is formed with the second silicide precursor and the second phase of the first silicide.
    Type: Grant
    Filed: July 27, 2023
    Date of Patent: February 4, 2025
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Wei-Yip Loh, Yan-Ming Tsai, Hung-Hsu Chen, Chih-Wei Chang, Sheng-Hsuan Lin
  • Publication number: 20230160892
    Abstract: Disclosed herein are recombinant viruses and/or insect cells suitable for detecting the infection of a pathogen in a biological sample of a test subject. The information derived from the detection may also be used to render a diagnosis on whether the test subject is infected with the pathogen or not, so that proper course of treatment may be assigned to the subject. Also disclosed herein is a vaccine for the prophylaxis and/or treatment of infection caused by said pathogen.
    Type: Application
    Filed: March 22, 2021
    Publication date: May 25, 2023
    Applicant: Academia Sinica
    Inventors: Yu-Chan CHAO, Sung-Chan WEI, Huei-Ru LO, Chih-Hsuan TSAI, Yu-Wen LO, Wei-Ting HSU, Chuan-Yu LIAO
  • Publication number: 20220267382
    Abstract: Provided is a chimeric hemagglutinin (HA) protein including an HA1 subunit and an HA2 subunit, in which the HA1 subunit is composed of a first domain derived from a parental HA1 subunit of a first subtype influenza virus and a second domain derived from a parental HA1 subunit of a second subtype influenza virus. The chimeric HA protein has improved thermal stability and can be used in a vaccine composition for preventing influenza virus infection. Also provided is a method of inducing an immune response against an influenza virus in a subject in need thereof that includes administering the chimeric HA protein to the subject, thereby conferring protection against the influenza virus infection on the subject.
    Type: Application
    Filed: September 18, 2020
    Publication date: August 25, 2022
    Applicant: ACADEMIA SINICA
    Inventors: Yu-Chan CHAO, Chih-Hsuan TSAI, Chia-Jung CHANG, Sung-Chan WEI, Lin-Li LIAO, Huei-Ru LO
  • Publication number: 20210371899
    Abstract: This disclosure provides a method and a kit for pesticide detection. By expressing acetylcholinesterases on cell surface, rapid pesticide screening, identification and quantification of pesticides or insecticides may be achieved.
    Type: Application
    Filed: October 17, 2019
    Publication date: December 2, 2021
    Applicant: ACADEMIA SINICA
    Inventors: Yu-Chan CHAO, Lin-Li LIAO, Chuan-yu LIAO, Chih-Hsuan TSAI, Paul Wei-che HSU