Patents by Inventor Chih-Hui Shen

Chih-Hui Shen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20120205045
    Abstract: A semiconductor machine and a cleaning process are provided. The semiconductor machine includes a chamber and a cleaning module. The cleaning process includes the following steps. Firstly, the semiconductor machine is used to perform a semiconductor manufacturing process, wherein a titanium-based material is etched in the semiconductor manufacturing process. Then, a cleaning task is activated to clean the semiconductor machine by using a cleaning agent including a gas mixture of a fluoride compound and oxygen.
    Type: Application
    Filed: February 11, 2011
    Publication date: August 16, 2012
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Li-Hsun HO, Ching-Shing Huang, Chih-Hui Shen, Tao-Min Chang
  • Patent number: D586816
    Type: Grant
    Filed: October 29, 2007
    Date of Patent: February 17, 2009
    Assignee: Top Victory Investments Ltd.
    Inventors: Chih-Hui Shen, Sung-Cheng Lin
  • Patent number: D619136
    Type: Grant
    Filed: October 1, 2009
    Date of Patent: July 6, 2010
    Assignee: Top Victory Investments Ltd.
    Inventors: Chin-Jen Lin, Chih-Hui Shen
  • Patent number: D620008
    Type: Grant
    Filed: October 1, 2009
    Date of Patent: July 20, 2010
    Assignee: Top Victory Investments Ltd.
    Inventors: Chin-Jen Lin, Chih-Hui Shen
  • Patent number: D634746
    Type: Grant
    Filed: April 13, 2010
    Date of Patent: March 22, 2011
    Assignee: Top Victory Investments Ltd.
    Inventors: Yao-Hsing Tsai, Chih-Hui Shen, Zhao-Rong Zhuz
  • Patent number: D635138
    Type: Grant
    Filed: April 13, 2010
    Date of Patent: March 29, 2011
    Assignee: Top Victory Investments Ltd.
    Inventors: Yao-Hsing Tsai, Chih-Hui Shen, Zhao-Rong Zhuz
  • Patent number: D635139
    Type: Grant
    Filed: April 13, 2010
    Date of Patent: March 29, 2011
    Assignee: Top Victory Investments Ltd.
    Inventors: Yao-Hsing Tsai, Chih-Hui Shen, Zhao-Rong Zhuz
  • Patent number: D635140
    Type: Grant
    Filed: April 13, 2010
    Date of Patent: March 29, 2011
    Assignee: Top Victory Investments Ltd.
    Inventors: Yao-Hsing Tsai, Chih-Hui Shen, Zhao-Rong Zhuz
  • Patent number: D635141
    Type: Grant
    Filed: April 13, 2010
    Date of Patent: March 29, 2011
    Assignee: Top Victory Investments Ltd.
    Inventors: Yao-Hsing Tsai, Chih-Hui Shen, Zhao-Rong Zhuz