Patents by Inventor Chih Jui Chin

Chih Jui Chin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20100007869
    Abstract: The present invention provides an apparatus and method for handling a reticle during manufacturing processes of semiconductor devices in the fabrication line. The apparatus includes a holder for the reticle, the holder is configured to securely hold the reticle and a level indicator attached to and operative with the holder to indicate leveling condition of the holder. The apparatus further includes a shaft connected to the holder for holding and a switch connected to the shaft. The method includes providing a reticle and clamping the reticle with a reticle holder including a switch and a leveling indicator operative with the holder to indicate leveling condition of the holder. The method further includes loading the reticle into a reticle pod while maintaining the leveling condition of the holder.
    Type: Application
    Filed: September 26, 2008
    Publication date: January 14, 2010
    Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventors: Xiao Min Xu, Ling Hwee Goh, Chih Jui Chin