Patents by Inventor Chih Lu Chang

Chih Lu Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11978669
    Abstract: The present disclosure provides a semiconductor structure. The structure includes a semiconductor substrate, a gate stack over a first portion of a top surface of the semiconductor substrate; and a laminated dielectric layer over at least a portion of a top surface of the gate stack. The laminated dielectric layer includes at least a first sublayer and a second sublayer. The first sublayer is formed of a material having a dielectric constant lower than a dielectric constant of a material used to form the second sublayer and the material used to form the second sublayer has an etch selectivity higher than an etch selectivity of the material used to form the first sublayer.
    Type: Grant
    Filed: January 4, 2022
    Date of Patent: May 7, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Lin Chuang, Chia-Hao Chang, Sheng-Tsung Wang, Lin-Yu Huang, Tien-Lu Lin, Yu-Ming Lin, Chih-Hao Wang
  • Publication number: 20240096961
    Abstract: A contact stack of a semiconductor device includes a source/drain feature, a silicide layer wrapping around the source/drain feature, a seed metal layer in direct contact with the silicide layer, and a conductor in contact with the seed metal layer. The contact stack excludes a metal nitride layer in direct contact with the silicide layer.
    Type: Application
    Filed: November 28, 2023
    Publication date: March 21, 2024
    Inventors: Shih-Chuan CHIU, Tien-Lu LIN, Yu-Ming LIN, Chia-Hao CHANG, Chih-Hao WANG, Jia-Chuan YOU
  • Patent number: 11155411
    Abstract: A storage and transportation system for automated warehouse and positioning control method thereof are disclosed. The system includes: a plurality of three-dimensional storage cabinets, a plurality of guiding rail assemblies, a plurality of automatic conveying modules, at least an automatic positioning module, at least a reading module, at least an automatic gripping module, and a central control processing module. The positioning control method includes: a conveying step, a mechanical positioning step, a sensing reading step, an optical positioning step, a computation processing step, a transmission step, and an operation step.
    Type: Grant
    Filed: July 22, 2019
    Date of Patent: October 26, 2021
    Inventor: Chih Lu Chang
  • Publication number: 20200048003
    Abstract: A storage and transportation system for automated warehouse and positioning control method thereof are disclosed. The system includes: a plurality of three-dimensional storage cabinets, a plurality of guiding rail assemblies, a plurality of automatic conveying modules, at least an automatic positioning module, at least a reading module, at least an automatic gripping module, and a central control processing module. The positioning control method includes: a conveying step, a mechanical positioning step, a sensing reading step, an optical positioning step, a computation processing step, a transmission step, and an operation step.
    Type: Application
    Filed: July 22, 2019
    Publication date: February 13, 2020
    Inventor: Chih Lu Chang
  • Patent number: 10472171
    Abstract: A storage frame structure for an automatic depot includes: several space limiting units, each having a plug-in surface formed with vertical slots and two opposite ends, at least one of the opposite ends being formed with an insert hole; several fixing rods abutting with the limiting units respectively; two side plates connected to the fixing rods in such a manner that the fixing rods extend parallel to one another between the side plates; and two positioning plates, each having two opposite insert ends extending into the vertical slots of an adjacent pair of the limiting units, thereby defining a reception chamber therebetween to retain a material tray stably in the chamber. The storage frame structure has simple construction and is applicable in automation industry (like SMT electronic industry) for material storing and sorting.
    Type: Grant
    Filed: August 21, 2018
    Date of Patent: November 12, 2019
    Inventor: Chih Lu Chang
  • Publication number: 20190084761
    Abstract: A storage frame structure for an automatic depot includes: several space limiting units, each having a plug-in surface formed with vertical slots and two opposite ends, at least one of the opposite ends being formed with an insert hole; several fixing rods abutting with the limiting units respectively; two side plates connected to the fixing rods in such a manner that the fixing rods extend parallel to one another between the side plates; and two positioning plates, each having two opposite insert ends extending into the vertical slots of an adjacent pair of the limiting units, thereby defining a reception chamber therebetween to retain a material tray stably in the chamber. The storage frame structure has simple construction and is applicable in automation industry (like SMT electronic industry) for material storing and sorting.
    Type: Application
    Filed: August 21, 2018
    Publication date: March 21, 2019
    Inventor: Chih Lu Chang