Patents by Inventor Chih M. Chen

Chih M. Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vacuum pencil having a short tip with an abutment means
    Patent number: 5580112
    Abstract: The invention provides a vacuum pencil having an abutment pin which limits the distance the tip of the vacuum pencil can extend past the edge of a wafer thus reducing scratches on the device sides of adjacent wafers. The vacuum pencil has a relatively flat tip connected to a body. The tip has a flat top side for engaging a wafer. The top side of the tip has channels for delivering a vacuum to seal against the wafer against the tip. The top side of the tip also has an pin mounted between the channels and the body. A passage for delivering a vacuum runs through the body and the channel is connected to the channel in the tip. The pin can be a pentagon shaped pin which is about 1 mm high.
    Type: Grant
    Filed: May 10, 1995
    Date of Patent: December 3, 1996
    Assignee: Taiwan Semiconductor Manufacturing Company Ltd.
    Inventors: Dean E. Lin, Chien K. Chou, Chih M. Chen