Patents by Inventor Chih-Ping Chao
Chih-Ping Chao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9620421Abstract: A method of forming an integrated circuit structure includes providing a gate strip in an inter-layer dielectric (ILD) layer. The gate strip comprises a metal gate electrode over a high-k gate dielectric. An electrical transmission structure is formed over the gate strip and a conductive strip is formed over the electrical transmission structure. The conductive strip has a width greater than a width of the gate strip. A contact plug is formed above the conductive strip and surrounded by an additional ILD layer.Type: GrantFiled: November 17, 2010Date of Patent: April 11, 2017Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chien-Chih Ho, Chih-Ping Chao, Hua-Chou Tseng, Chun-Hung Chen, Chia-Yi Su, Alex Kalnitsky, Jye-Yen Cheng, Harry-Hak-Lay Chuang
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Patent number: 9607121Abstract: A MOS device includes an active area having first and second contacts. First and second gates are disposed between the first and second contacts. The first gate is disposed adjacent to the first contact and has a third contact. The second gate is disposed adjacent to the second contact and has a fourth contact coupled to the third contact. A transistor defined by the active area and the first gate has a first threshold voltage, and a transistor defined by the active area and the second gate has a second threshold voltage.Type: GrantFiled: August 21, 2014Date of Patent: March 28, 2017Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Fu-Lung Hsueh, Chih-Ping Chao, Chewn-Pu Jou, Yung-Chow Peng, Harry-Hak-Lay Chuang, Kuo-Tung Sung
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Patent number: 9589831Abstract: A method for forming a radio frequency area of an integrated circuit are provided. The method includes forming a buried oxide layer over a substrate, and an interface layer is formed between the substrate and the buried oxide layer. The method also includes etching through the buried oxide layer and the interface layer to form a deep trench, and a bottom surface of the deep trench is level with a bottom surface of the interface layer. The method further includes forming an implant region directly below the deep trench and forming an interlayer dielectric layer in the deep trench.Type: GrantFiled: December 16, 2015Date of Patent: March 7, 2017Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Kuo-Yu Cheng, Keng-Yu Chen, Wei-Kung Tsai, Kuan-Chi Tsai, Tsung-Yu Yang, Chung-Long Chang, Chun-Hung Chen, Chih-Ping Chao
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Patent number: 9583564Abstract: A structure comprises a p-type substrate, a deep n-type well and a deep p-type well. The deep n-type well is adjacent to the p-type substrate and has a first conductive path to a first terminal. The deep p-type well is in the deep n-type well, is separated from the p-type substrate by the deep n-type well, and has a second conductive path to a second terminal. A first n-type well is over the deep p-type well. A first p-type well is over the deep p-type well.Type: GrantFiled: February 11, 2014Date of Patent: February 28, 2017Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Shu-Jenn Yu, Meng-Wei Hsieh, Shih-Hsien Yang, Hua-Chou Tseng, Chih-Ping Chao
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Patent number: 9391067Abstract: A structure and method for providing a multiple silicide integration is provided. An embodiment comprises forming a first transistor and a second transistor on a substrate. The first transistor is masked and a first silicide region is formed on the second transistor. The second transistor is then masked and a second silicide region is formed on the first transistor, thereby allowing for device specific silicide regions to be formed on the separate devices.Type: GrantFiled: March 30, 2015Date of Patent: July 12, 2016Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Der-Chyang Yeh, Hsing-Kuo Hsia, Hao-Hsun Lin, Chih-Ping Chao, Chin-Hao Su, Hsi-Kuei Cheng
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Patent number: 9343352Abstract: An embodiment radio frequency area of an integrated circuit is disclosed. The radio frequency area includes a substrate having an implant region. The substrate has a first resistance. A buried oxide layer is disposed over the substrate and an interface layer is disposed between the substrate and the buried oxide layer. The interface layer has a second resistance lower than the first resistance. A silicon layer is disposed over the buried oxide layer and an interlevel dielectric is disposed in a deep trench. The deep trench extends through the silicon layer, the buried oxide layer, and the interface layer over the implant region. The deep trench may also extend through a polysilicon layer disposed over the silicon layer.Type: GrantFiled: January 23, 2015Date of Patent: May 17, 2016Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Kuo-Yu Cheng, Wei-Kung Tsai, Kuan-Chi Tsai, Tsung-Yu Yang, Chung-Long Chang, Chun-Hong Chen, Chih-Ping Chao, Chen-Yao Tang, Yu Hung Chen
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Publication number: 20160099169Abstract: The methods for forming a radio frequency area of an integrated circuit are provided. The method includes forming a buried oxide layer over a substrate, and an interface layer is formed between the substrate and the buried oxide layer. The method also includes etching through the buried oxide layer and the interface layer to form a deep trench, and a bottom surface of the deep trench is level with a bottom surface of the interface layer. The method further includes forming an implant region directly below the deep trench and forming an interlayer dielectric layer in the deep trench.Type: ApplicationFiled: December 16, 2015Publication date: April 7, 2016Inventors: Kuo-Yu CHENG, Keng-Yu CHEN, Wei-Kung TSAI, Kuan-Chi TSAI, Tsung-Yu YANG, Chung-Long CHANG, Chun-Hung CHEN, Chih-Ping CHAO
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Patent number: 9230988Abstract: Embodiments of mechanisms of forming a radio frequency area of an integrated circuit are provided. The radio frequency area of an integrated circuit structure includes a substrate, a buried oxide layer formed over the substrate, and an interface layer formed between the substrate and the buried oxide layer. The radio frequency area of an integrated circuit structure also includes a silicon layer formed over the buried oxide layer and an interlayer dielectric layer formed in a deep trench. The radio frequency area of an integrated circuit structure further includes the interlayer dielectric layer extending through the silicon layer, the buried oxide layer and the interface layer. The radio frequency area of an integrated circuit structure includes an implant region formed below the interlayer dielectric layer in the deep trench and a polysilicon layer formed below the implant region.Type: GrantFiled: October 31, 2013Date of Patent: January 5, 2016Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Kuo-Yu Cheng, Keng-Yu Chen, Wei-Kung Tsai, Kuan-Chi Tsai, Tsung-Yu Yang, Chung-Long Chang, Chun-Hung Chen, Chih-Ping Chao
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Publication number: 20150206902Abstract: Embodiments for forming a semiconductor device structure are provided. The semiconductor device structure includes a substrate and a buried oxide layer formed over the substrate. An interface layer is formed between the substrate and the buried oxide layer. The semiconductor device structure also includes a silicon layer formed over the buried oxide layer; and a polysilicon layer formed over the substrate and in a deep trench. The polysilicon layer extends through the silicon layer, the buried oxide layer and the interface layer.Type: ApplicationFiled: January 17, 2014Publication date: July 23, 2015Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Kuo-Yu CHENG, Keng-Yu CHEN, Wei-Kung TSAI, Kuan-Chi TSAI, Tsung-Yu YANG, Chung-LONG CHANG, Chun-Hung CHEN, Chih-Ping CHAO
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Publication number: 20150206871Abstract: A structure and method for providing a multiple silicide integration is provided. An embodiment comprises forming a first transistor and a second transistor on a substrate. The first transistor is masked and a first silicide region is formed on the second transistor. The second transistor is then masked and a second silicide region is formed on the first transistor, thereby allowing for device specific silicide regions to be formed on the separate devices.Type: ApplicationFiled: March 30, 2015Publication date: July 23, 2015Inventors: Der-Chyang Yeh, Hsing-Kuo Hsia, Hao-Hsun Lin, Chih-Ping Chao, Chin-Hao Su, Hsi-Kuei Cheng
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Publication number: 20150155096Abstract: A method of forming a capacitor structure includes forming a first set of electrodes having a first electrode and a second electrode, wherein each electrode of the first set of electrodes has an L-shaped portion. The method further includes forming a second set of electrodes having a third electrode and a fourth electrode, wherein each electrode of the second set of electrodes has an L-shaped portion. The method further includes forming insulation layers between the first set of electrodes and the second set of electrodes. The method further includes forming a first L-shaped line plug connecting the first electrode to the third electrode, wherein an entirety of an outer surface of the first L-shaped line plug is recessed with respect to an outer surface of the L-shaped portion of the first electrode. The method further includes forming a second line plug connecting the second electrode to the fourth electrode.Type: ApplicationFiled: February 3, 2015Publication date: June 4, 2015Inventors: Wei-Chun HUA, Chung-Long CHANG, Chun-Hung CHEN, Chih-Ping CHAO, Jye-Yen CHENG, Hua-Chou TSENG
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Publication number: 20150132918Abstract: An embodiment radio frequency area of an integrated circuit is disclosed. The radio frequency area includes a substrate having an implant region. The substrate has a first resistance. A buried oxide layer is disposed over the substrate and an interface layer is disposed between the substrate and the buried oxide layer. The interface layer has a second resistance lower than the first resistance. A silicon layer is disposed over the buried oxide layer and an interlevel dielectric is disposed in a deep trench. The deep trench extends through the silicon layer, the buried oxide layer, and the interface layer over the implant region. The deep trench may also extend through a polysilicon layer disposed over the silicon layer.Type: ApplicationFiled: January 23, 2015Publication date: May 14, 2015Inventors: Kuo-Yu Cheng, Wei-Kung Tsai, Kuan-Chi Tsai, Tsung-Yu Yang, Chung-Long Chang, Chun-Hong Chen, Chih-Ping Chao, Chen-Yao Tang, Yu Hung Chen
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Publication number: 20150115381Abstract: Embodiments of mechanisms of forming a radio frequency area of an integrated circuit are provided. The radio frequency area of an integrated circuit structure includes a substrate, a buried oxide layer formed over the substrate, and an interface layer formed between the substrate and the buried oxide layer. The radio frequency area of an integrated circuit structure also includes a silicon layer formed over the buried oxide layer and an interlayer dielectric layer formed in a deep trench. The radio frequency area of an integrated circuit structure further includes the interlayer dielectric layer extending through the silicon layer, the buried oxide layer and the interface layer. The radio frequency area of an integrated circuit structure includes an implant region formed below the interlayer dielectric layer in the deep trench and a polysilicon layer formed below the implant region.Type: ApplicationFiled: October 31, 2013Publication date: April 30, 2015Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Kuo-Yu CHENG, Keng-Yu CHEN, Wei-Kung TSAI, Kuan-Chi TSAI, Tsung-Yu YANG, Chung-LONG CHANG, Chun-Hung CHEN, Chih-Ping CHAO
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Publication number: 20150108607Abstract: An integrated circuit includes a stacked MIM capacitor and a thin film resistor and methods of fabricating the same are disclosed. A capacitor bottom metal in one capacitor of the stacked MIM capacitor and the thin film resistor are substantially at the same layer of the integrated circuit, and the capacitor bottom metal and the thin film resistor are also made of substantially the same materials. The integrated circuit with both of a stacked MIM capacitor and a thin film resistor can be made in a cost benefit way accordingly, so as to overcome disadvantages mentioned above.Type: ApplicationFiled: October 17, 2013Publication date: April 23, 2015Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Shao-Yu CHEN, Chih-Ping Chao, Chun-Hung Chen, Chung-Long Chang, Kuan-Chi Tsai, Wei-Kung Tsai, Hsiang-Chi Chen, Ching-Chung Hsu, Cheng-Chang Hsu, Yi-Sin Wang
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Patent number: 8993393Abstract: A structure and method for providing a multiple silicide integration is provided. An embodiment comprises forming a first transistor and a second transistor on a substrate. The first transistor is masked and a first silicide region is formed on the second transistor. The second transistor is then masked and a second silicide region is formed on the first transistor, thereby allowing for device specific silicide regions to be formed on the separate devices.Type: GrantFiled: February 11, 2010Date of Patent: March 31, 2015Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Der-Chyang Yeh, Hsing-Kuo Hsia, Hao-Hsun Lin, Chih-Ping Chao, Chin-Hao Su, Hsi-Kuei Cheng
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Patent number: 8971014Abstract: A capacitor structure includes first and second sets of electrodes and a plurality of line plugs. The first set of electrodes has a first electrode and a second electrode formed in a first metallization layer among a plurality of metallization layers, wherein the first electrode and the second electrode are separated by an insulation material. The second set of electrodes has a third electrode and a fourth electrode formed in a second metallization layer among the plurality of metallization layers, wherein the third electrode and the fourth electrode are separated by the insulation material. The line plugs connect the second set of electrodes to the first set of electrodes.Type: GrantFiled: January 5, 2011Date of Patent: March 3, 2015Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Wei-Chun Hua, Chung-Long Chang, Chun-Hung Chen, Chih-Ping Chao, Jye-Yen Cheng, Hua-Chou Tseng
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Patent number: 8941211Abstract: An embodiment radio frequency area of an integrated circuit is disclosed. The radio frequency area includes a substrate having an implant region. The substrate has a first resistance. A buried oxide layer is disposed over the substrate and an interface layer is disposed between the substrate and the buried oxide layer. The interface layer has a second resistance lower than the first resistance. A silicon layer is disposed over the buried oxide layer and an interlevel dielectric is disposed in a deep trench. The deep trench extends through the silicon layer, the buried oxide layer, and the interface layer over the implant region. The deep trench may also extend through a polysilicon layer disposed over the silicon layer.Type: GrantFiled: March 1, 2013Date of Patent: January 27, 2015Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Kuo-Yu Cheng, Wei-Kung Tsai, Kuan-Chi Tsai, Tsung-Yu Yang, Chung-Long Chang, Chun-Hong Chen, Chih-Ping Chao, Chen-Yao Tang, Yu Hung Chen
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Publication number: 20150020039Abstract: A MOS device includes an active area having first and second contacts. First and second gates are disposed between the first and second contacts. The first gate is disposed adjacent to the first contact and has a third contact. The second gate is disposed adjacent to the second contact and has a fourth contact coupled to the third contact. A transistor defined by the active area and the first gate has a first threshold voltage, and a transistor defined by the active area and the second gate has a second threshold voltage.Type: ApplicationFiled: August 21, 2014Publication date: January 15, 2015Inventors: Fu-Lung HSUEH, Chih-Ping CHAO, Chewn-Pu JOU, Yung-Chow PENG, Harry-Hak-Lay CHUANG, Kuo-Tung SUNG
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Patent number: 8847321Abstract: A MOS device includes an active area having first and second contacts. First and second gates are disposed between the first and second contacts. The first gate is disposed adjacent to the first contact and has a third contact. The second gate is disposed adjacent to the second contact and has a fourth contact coupled to the third contact. A transistor defined by the active area and the first gate has a first threshold voltage, and a transistor defined by the active area and the second gate has a second threshold voltage.Type: GrantFiled: April 26, 2010Date of Patent: September 30, 2014Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Fu-Lung Hsueh, Chih-Ping Chao, Chewn-Pu Jou, Yung-Chow Peng, Harry-Hak-Lay Chuang, Kuo-Tung Sung
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Publication number: 20140264618Abstract: A structure comprises a p-type substrate, a deep n-type well and a deep p-type well. The deep n-type well is adjacent to the p-type substrate and has a first conductive path to a first terminal. The deep p-type well is in the deep n-type well, is separated from the p-type substrate by the deep n-type well, and has a second conductive path to a second terminal. A first n-type well is over the deep p-type well. A first p-type well is over the deep p-type well.Type: ApplicationFiled: February 11, 2014Publication date: September 18, 2014Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Shu-Jenn YU, Meng-Wei HSIEH, Shih-Hsien YANG, Hua-Chou TSENG, Chih-Ping CHAO