Patents by Inventor Chih-Saing Jhong

Chih-Saing Jhong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer Processing Device and Coating Device
    Publication number: 20110283940
    Abstract: A wafer processing device includes a wafer pedestal, a plurality of lift pins retractably installed in the wafer pedestal for supporting a wafer, and a plurality of sensing devices. The sensing devices are correspondingly coupling to the plurality of supporting pins for sensing a weight or a center of gravity of the wafer. Moreover, a coating device is provided.
    Type: Application
    Filed: August 9, 2010
    Publication date: November 24, 2011
    Inventors: Chih-Saing Jhong, Sheng Cheng