Patents by Inventor Chih-Shin Tsai

Chih-Shin Tsai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7375005
    Abstract: Embodiments of the present invention provide a method for reclaiming and reusing a wafer. In one embodiment, a method for reclaiming a wafer comprises providing a used, nonproductive wafer having a semiconductor substrate and a polysilicon layer formed on the semiconductor substrate; oxidizing a first part of the polysilicon layer to form a first oxide layer; removing the first oxide layer; and oxidizing a second part of the polysilicon layer to form a second oxide layer on the used wafer which is to be used as a reclaimed wafer. The nonproductive wafer is used to improve the quality of a deposition process of the polysilicon layer on one or more productive wafers.
    Type: Grant
    Filed: September 15, 2004
    Date of Patent: May 20, 2008
    Assignee: Mosel Vitelic, Inc.
    Inventors: Jen-Chieh Chang, Shih-Chi Lai, Yi-Fu Chung, Chih-Shin Tsai
  • Publication number: 20050250277
    Abstract: Embodiments of the present invention provide a method for reclaiming and reusing a wafer. In one embodiment, a method for reclaiming a wafer comprises providing a used, nonproductive wafer having a semiconductor substrate and a polysilicon layer formed on the semiconductor substrate; oxidizing a first part of the polysilicon layer to form a first oxide layer; removing the first oxide layer; and oxidizing a second part of the polysilicon layer to form a second oxide layer on the used wafer which is to be used as a reclaimed wafer. The nonproductive wafer is used to improve the quality of a deposition process of the polysilicon layer on one or more productive wafers.
    Type: Application
    Filed: September 15, 2004
    Publication date: November 10, 2005
    Applicant: Mosel Vitelic, Inc.
    Inventors: Jen-Chieh Chang, Shih-Chi Lai, Yi-Fu Chung, Chih-Shin Tsai