Abstract: A first protective layer is formed on a first die and a second die, and openings are formed within the first protective layer. The first die and the second die are encapsulated such that the encapsulant is thicker than the first die and the second die, and vias are formed within the openings. A redistribution layer can also be formed to extend over the encapsulant, and the first die may be separated from the second die.

Abstract: A chuck vacuum line of a semiconductor processing tool includes a first portion that penetrates a sidewall of a main pumping line of the semiconductor processing tool. The chuck vacuum line includes a second portion that is substantially parallel to the sidewall of the main pumping line and to a direction of flow in the main pumping line. A size of the second portion increases between an inlet end of the second portion and an outlet end of the second portion along the direction of flow in the main pumping line.

Abstract: A resistive force sensing circuit and a resistive force sensing apparatus. The circuit includes a plurality of sensor circuit inputs, a plurality of sensor circuit outputs; and a plurality of resistor units. Each of the resistor units includes a force-sensing resistor, a first side resistor, and a second side resistor. The first terminals of the force-sensing resistor, the first side resistor and the second side resistor are electrically connected to each other at one node, a second terminal of the force-sensing resistor is electrically connected to one of the sensor circuit inputs, and second terminals of the first side resistor and the second side resistor are electrically connected to two adjacent sensor circuit outputs, respectively. The first side resistor and the second side resistor are a pair of resistors with substantially equal resistance. The apparatus includes structures to realize the function of the resistive force sensing circuit.

Abstract: A resistive force sensing circuit and a resistive force sensing apparatus. The circuit includes a plurality of sensor circuit inputs, a plurality of sensor circuit outputs; and a plurality of resistor units. Each of the resistor units includes a force-sensing resistor, a first side resistor, and a second side resistor. The first terminals of the force-sensing resistor, the first side resistor and the second side resistor are electrically connected to each other at one node, a second terminal of the force-sensing resistor is electrically connected to one of the sensor circuit inputs, and second terminals of the first side resistor and the second side resistor are electrically connected to two adjacent sensor circuit outputs, respectively. The first side resistor and the second side resistor are a pair of resistors with substantially equal resistance. The apparatus includes structures to realize the function of the resistive force sensing circuit.