Abstract: A first protective layer is formed on a first die and a second die, and openings are formed within the first protective layer. The first die and the second die are encapsulated such that the encapsulant is thicker than the first die and the second die, and vias are formed within the openings. A redistribution layer can also be formed to extend over the encapsulant, and the first die may be separated from the second die.

Abstract: Various embodiments of the present disclosure are directed towards a semiconductor package comprising optically coupled integrated circuit (IC) chips. A first IC chip and a second IC chip overlie a substrate at a center of the substrate. A photonic chip overlies the first and second IC chips and is electrically coupled to the second IC chip. A laser device chip overlies the substrate, adjacent to the photonic chip and the second IC chip, at a periphery of the substrate. The photonic chip is configured to modulate a laser beam from the laser device chip in accordance with an electrical signal from the second IC chip and to provide the modulated laser beam to the first IC chip. This facilitates optical communication between the first IC chip to the second IC chip. Various embodiments of the present disclosure are further directed towards simultaneously aligning and bonding constituents of the semiconductor package.

Abstract: A chuck vacuum line of a semiconductor processing tool includes a first portion that penetrates a sidewall of a main pumping line of the semiconductor processing tool. The chuck vacuum line includes a second portion that is substantially parallel to the sidewall of the main pumping line and to a direction of flow in the main pumping line. A size of the second portion increases between an inlet end of the second portion and an outlet end of the second portion along the direction of flow in the main pumping line.

Abstract: An optical disk clamping device. The device includes a diamagnetic member, a turntable, a magnet, and a clamping member. The turntable supports an optical disk. The magnet is disposed between the diamagnetic member and the turntable. The clamping member is disposed on the turntable to support the magnet. A repellent force is generated between the diamagnetic member and the magnet when the turntable rotates, pushing the magnet toward the clamping member to fix the optical disk.

Abstract: A method for phase matching matches a relative phase of a first element and a second element by detecting a magnetic flux. The method provides a magnetic flux generator to generate the magnetic flux. The method also provides a magnetic sensor in order to detect the magnetic flux. According to the magnetic flux detected by the magnetic sensor, the relative position of the first element and the second element is adjusted until the magnetic flux reaches a predetermined value, which means that the phase of the first element and that of the second element are matched.

Abstract: An optical disk clamping device. The device includes a diamagnetic member, a turntable, a magnet, and a clamping member. The turntable supports an optical disk. The magnet is disposed between the diamagnetic member and the turntable. The clamping member is disposed on the turntable to support the magnet. A repellent force is generated between the diamagnetic member and the magnet when the turntable rotates, pushing the magnet toward the clamping member to fix the optical disk.

Abstract: A method for phase matching matches a relative phase of a first element and a second element by detecting a magnetic flux. The method provides a magnetic flux generator to generate the magnetic flux. The method also provides a magnetic sensor in order to detect the magnetic flux. According to the magnetic flux detected by the magnetic sensor, the relative position of the first element and the second element is adjusted until the magnetic flux reaches a predetermined value, which means that the phase of the first element and that of the second element are matched.